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公开(公告)号：DE69601062D1
公开(公告)日：1999-01-14
申请号：DE69601062
申请日：1996-08-13
Applicant: EBARA CORP
Inventor： NIIMURA YASUHIRO , IKEGAMI TETSUMA , HANAFUSA NAOYA , NAKANIWA MASARU
Abstract: A trap for collecting solid is connected to either an exhaust port or a suction port of a vacuum pump for trapping a solid material separated from a sublimed gas discharged by the vacuum pump. The trap (3) includes a casing (4), a passage defining member (6) disposed in the casing (4) and defining a gas passage in the casing (4), and an intermediate member (7) disposed between the casing (4) and the passage defining member (6). The intermediate member (7) is made of a flat thin sheet which is formed into a tubular member, and the tubular member is capable of being spread when taken out from the casing (4).
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公开(公告)号：DE69705440D1
公开(公告)日：2001-08-09
申请号：DE69705440
申请日：1997-02-21
Applicant: EBARA CORP
Inventor： NAKANIWA MASARU , ISHIBASHI KINNOSUKE , SHIOZUKA TAKANORI , UMEZAWA KOUICHI
Abstract: A rotor with lobes for use in a turbomachine having a rotation shaft is disclosed. The rotor (1) comprises a rotor shell (2) having a shell member (4), which is made of a sheet strip metal and having profile curvatures to conform to a required shape of the lobe of the rotor, and a connecting portion (3) for connecting the rotor to the rotation shaft (6). By making a rotor from a sheet strip metal through bending process to form a rotor shell, a rotor having thin walls can be produced efficiently and economically to provide a light weight rotor of reduced inertial moment so that the startup process or shut down process can be performed quickly.
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公开(公告)号：DE69316214T2
公开(公告)日：1998-08-13
申请号：DE69316214
申请日：1993-07-06
Applicant: EBARA CORP
Inventor： MORI SATOSHI , MATSUMURA MASAO , KANEMITSU YOICHI , YOSHIOKA TAKESHI , KAJIYAMA MASAAKI , KONDO FUMIO , SHIRAO YUJI , EGUCHI MASATO , SHINOZAKI HIROYUKI , IKEDA YUKIO , HIROSE MASAYOSHI , NAKANIWA MASARU , KIMURA NORIO , USUI KATSUAKI , AOKI KATSUYUKI
IPC: H01L21/00 , H01L21/677 , B65G54/02 , B65G49/00 , B65G49/07 , B65G47/52 , B65G47/68 , B65G47/92 , B60L13/06 , H01L21/68
Abstract: In a tunnel which is kept in a high-vacuum or filled with a highly clean atmosphere, a carrying truck (3) is moved by an electromagnetic levitation system. Electromagnets (4) for electromagnetically levitate the carrying truck (3) which travels in the tunnel (1) in a noncontact way and carries semiconductor waters, electromagnets (6) constituting a linear motor for driving the carrying truck (3), and displacement sensors (8) for sensing the levitation quantity of the carrying truck (3) in the tunnel (1) are provided outside the tunnel (1). Thereby, gases are not produced and the semiconductor wafers (22) are not contaminated. Also, when the carrying truck (3) changes the traveling direction by 90 DEG at a branch part where two tracks intersect at right angles in the tunnel (1), the electromagnets (4) are provided in parallel with the respective tracks and are so controlled that the excitation levels of the electromagnets (4) are changed gradually. Thereby, the traveling direction of the carrying truck (3) can be changed smoothly without contact of the truck with the inner wall of the tunnel (1) and the semiconductor wafers (22) are prevented from being damaged by collisions, etc.
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公开(公告)号：DE69629412T2
公开(公告)日：2004-06-24
申请号：DE69629412
申请日：1996-04-19
Applicant: EBARA CORP
Inventor： TAKEUCHI NORIYUKI , MURAKAMI TAKESHI , SHINOZAKI HIROYUKI , TSUKAMOTO KIWAMU , NAKANIWA MASARU , MATSUDA NAOKI
IPC: C23C16/44 , C23C16/455 , C23C16/52 , C23C16/46
Abstract: A thin-film vapor deposition apparatus has a reaction casing defining a reaction chamber, a stage for supporting a substrate, the stage being disposed in the reaction chamber, and a shower head supported on the reaction casing in confronting relation to the stage, for discharging a material gas toward the substrate on the stage for depositing a thin film on the substrate. A plurality of flow path systems are disposed in various regions of the shower head and the reaction casing, for passing a heating medium to control the temperatures of the regions under the control of a temperature controller.
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公开(公告)号：DE69316214D1
公开(公告)日：1998-02-12
申请号：DE69316214
申请日：1993-07-06
Applicant: EBARA CORP
Inventor： MORI SATOSHI , MATSUMURA MASAO , KANEMITSU YOICHI , YOSHIOKA TAKESHI , KAJIYAMA MASAAKI , KONDO FUMIO , SHIRAO YUJI , EGUCHI MASATO , SHINOZAKI HIROYUKI , IKEDA YUKIO , HIROSE MASAYOSHI , NAKANIWA MASARU , KIMURA NORIO , USUI KATSUAKI , AOKI KATSUYUKI
IPC: H01L21/00 , H01L21/677 , B65G54/02 , B65G49/00 , B65G49/07 , B65G47/52 , B65G47/68 , B65G47/92 , B60L13/06 , H01L21/68
Abstract: In a tunnel which is kept in a high-vacuum or filled with a highly clean atmosphere, a carrying truck (3) is moved by an electromagnetic levitation system. Electromagnets (4) for electromagnetically levitate the carrying truck (3) which travels in the tunnel (1) in a noncontact way and carries semiconductor waters, electromagnets (6) constituting a linear motor for driving the carrying truck (3), and displacement sensors (8) for sensing the levitation quantity of the carrying truck (3) in the tunnel (1) are provided outside the tunnel (1). Thereby, gases are not produced and the semiconductor wafers (22) are not contaminated. Also, when the carrying truck (3) changes the traveling direction by 90 DEG at a branch part where two tracks intersect at right angles in the tunnel (1), the electromagnets (4) are provided in parallel with the respective tracks and are so controlled that the excitation levels of the electromagnets (4) are changed gradually. Thereby, the traveling direction of the carrying truck (3) can be changed smoothly without contact of the truck with the inner wall of the tunnel (1) and the semiconductor wafers (22) are prevented from being damaged by collisions, etc.
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Patent Agency Ranking
公开(公告)号：DE69629412D1
公开(公告)日：2003-09-18
申请号：DE69629412
申请日：1996-04-19
Applicant: EBARA CORP
Inventor： TAKEUCHI NORIYUKI , MURAKAMI TAKESHI , SHINOZAKI HIROYUKI , TSUKAMOTO KIWAMU , NAKANIWA MASARU , MATSUDA NAOKI
IPC: C23C16/44 , C23C16/455 , C23C16/52 , C23C16/46
Abstract: A thin-film vapor deposition apparatus has a reaction casing defining a reaction chamber, a stage for supporting a substrate, the stage being disposed in the reaction chamber, and a shower head supported on the reaction casing in confronting relation to the stage, for discharging a material gas toward the substrate on the stage for depositing a thin film on the substrate. A plurality of flow path systems are disposed in various regions of the shower head and the reaction casing, for passing a heating medium to control the temperatures of the regions under the control of a temperature controller.
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公开(公告)号：DE69705440T2
公开(公告)日：2002-05-16
申请号：DE69705440
申请日：1997-02-21
Applicant: EBARA CORP
Inventor： NAKANIWA MASARU , ISHIBASHI KINNOSUKE , SHIOZUKA TAKANORI , UMEZAWA KOUICHI
Abstract: A rotor with lobes for use in a turbomachine having a rotation shaft is disclosed. The rotor (1) comprises a rotor shell (2) having a shell member (4), which is made of a sheet strip metal and having profile curvatures to conform to a required shape of the lobe of the rotor, and a connecting portion (3) for connecting the rotor to the rotation shaft (6). By making a rotor from a sheet strip metal through bending process to form a rotor shell, a rotor having thin walls can be produced efficiently and economically to provide a light weight rotor of reduced inertial moment so that the startup process or shut down process can be performed quickly.
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公开(公告)号：DE69601062T2
公开(公告)日：1999-06-10
申请号：DE69601062
申请日：1996-08-13
Applicant: EBARA CORP
Inventor： NIIMURA YASUHIRO , IKEGAMI TETSUMA , HANAFUSA NAOYA , NAKANIWA MASARU
Abstract: A trap for collecting solid is connected to either an exhaust port or a suction port of a vacuum pump for trapping a solid material separated from a sublimed gas discharged by the vacuum pump. The trap (3) includes a casing (4), a passage defining member (6) disposed in the casing (4) and defining a gas passage in the casing (4), and an intermediate member (7) disposed between the casing (4) and the passage defining member (6). The intermediate member (7) is made of a flat thin sheet which is formed into a tubular member, and the tubular member is capable of being spread when taken out from the casing (4).
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公开(公告)号：EP1312860A4
公开(公告)日：2007-02-28
申请号：EP01956985
申请日：2001-08-21
Applicant: EBARA CORP
Inventor： TSUJI TAKESHI , KAWAMURA KOHTARO , NAKANIWA MASARU , OKUDA KAZUTAKA , ISHIKAWA KEIICHI , MIYAZAKI KAZUTOMO , NAKAMURA RIKIYA , KOMAI TETSUO , OHASHI TOMONORI , TAKEMURA YOSHIRO
CPC classification number: F23G7/065 , F23C2900/9901 , F23D14/74 , F23D14/82 , F23M11/042 , F23N5/082 , F23N2029/00
Abstract: A combustion type exhaust gas treatment method capable of heat-decomposing or oxidation-decomposing the inflammable components in the exhaust gas by introducing the exhaust gas produced in an industrial product working process into a combustion flame, comprising the steps of producing hydrogen gas and oxide gas by the electrolysis of water, feeding the hydrogen gas and oxide gas as a combustion gas forming the combustion flame, and detecting the combustion flame with a UV sensor through a tube or a hole formed in the wall of a burner part on the upstream side of the combustion flame so that the combustion flame can be observed directly.
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公开(公告)号：JPH06179524A
公开(公告)日：1994-06-28
申请号：JP21362492
申请日：1992-07-18
Applicant: EBARA CORP
Inventor： KAJIYAMA MASAAKI , HIROSE MASAYOSHI , KIMURA NORIO , NAKANIWA MASARU , USUI KATSUAKI
IPC: B65G54/02 , H01L21/677 , H01L21/68 , H02K41/02
Abstract: PURPOSE:To provide a magnetic levitation vacuum conveyance device which can restrain an object to be conveyed from being polluted and accomplish a high vacuum. CONSTITUTION:A magnetic levitation vacuum conveyance device is provided with a vacuum tunnel 1 which is formed by a partition and whose inside is kept in a vacuum, a carrier base 3 disposed in the vacuum tunnel 1, multiple electromagnets 4 for levitation which levitates and supports the carrier base 3 in a no-contact condition, a linear motor 6 which moves the carrier base 3, and a displacement sensor 8 which detects a distance in the vertical direction of the carrier base 3. The electromagnets 4 for levitation, the linear motor 6, and the displacement sensor 8 are disposed outside the vacuum tunnel 1 and stored in thin-wall caps 5, 7, 9 which are made to pass through the partition 2 and whose parts are exposed in the vacuum tunnel 1.
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