公开(公告)号：WO02085790A3

公开(公告)日：2003-01-09

申请号：PCT/JP0203819

申请日：2002-04-17

Applicant: EBARA CORP ,  OZAWA SUGURU ,  SHINJO RYOICHI ,  HARADA MINORU ,  SAITO TAKAYUKI ,  SASAKI KENICHI ,  MURAKAWA KEIICHI ,  SHIMAMURA KAZUHIDE

Inventor： OZAWA SUGURU ,  SHINJO RYOICHI ,  HARADA MINORU ,  SAITO TAKAYUKI ,  SASAKI KENICHI ,  MURAKAWA KEIICHI ,  SHIMAMURA KAZUHIDE

IPC: B01F1/00 ,  B01D53/22 ,  B01D61/00 ,  B01F3/04 ,  B01F15/04 ,  C02F1/36 ,  C02F1/44 ,  C02F1/68 ,  C02F1/74 ,  C02F1/78 ,  H01L21/00

CPC classification number: H01L21/67051 ,  B01D53/22 ,  B01D61/00 ,  B01D63/02 ,  B01D2313/083 ,  B01D2313/90 ,  B01F3/04269 ,  B01F3/04985 ,  B01F2003/04404 ,  C02F1/24 ,  C02F1/36 ,  C02F1/44 ,  C02F1/444 ,  C02F1/68 ,  C02F1/74 ,  C02F1/78 ,  C02F2103/026 ,  C02F2103/04 ,  C02F2103/346 ,  C02F2209/38 ,  C02F2209/40

Abstract: The object of the present invention is to provide a gas dissolved water producing apparatus which can produce a gas dissolved water (31) having a concentration of a dissolved solution gas (3) not greater than a saturated concentration rapidly and efficiently. The apparatus comprises a gas dissolving section (11), a gas channel (12) for guiding a gas into the dissolving section, a first water channel (13) for guiding a water into the dissolving section, a gas dissolved water discharge channel (14), and a second water channel (15) for guiding the water without passing through the dissolving section. The second water channel (15) joins the gas dissolved water discharge channel (14) to control the solution gas dissolved in the gas dissolved water can be controlled to a prescribed level of concentration.

Abstract translation: 本发明的目的是提供一种气体溶解水生成装置，其能够快速有效地生成溶解气体（3）的浓度不大于饱和浓度的气体溶解水（31）。 该装置包括气体溶解部分（11），用于将气体引入溶解部分的气体通道（12），用于将水引入溶解部分的第一水通道（13），气体溶解水排放通道（14 ）和用于引导水而不通过溶解部分的第二水通道（15）。 第二水通道（15）连接气体溶解水排放通道（14）以控制溶解在气体中的溶解气溶解的水可以控制到规定的浓度水平。

公开(公告)号：KR20200139630A

公开(公告)日：2020-12-14

申请号：KR20200064882

申请日：2020-05-29

Applicant: EBARA CORP

Inventor： OZAWA SUGURU ,  ARAKI YUJI ,  WATANABE TOSHIFUMI ,  NAKAGAWA YOICHI

IPC: B01F3/04 ,  B01F15/00 ,  H01L21/67

Abstract: 가스용해액공급장치는, 액체공급부로부터공급된액체에가스공급부로부터공급된가스를가스용해부에서용해시켜가스용해액을생성하고, 가스용해부에서생성된가스용해액을가스용해액탱크에저류하여, 가스용해액탱크로부터유스포인트에공급하고, 유스포인트에공급되는가스용해액중 가스용해부로복귀되는가스용해액의유량을측정하고, 측정결과에따라서, 액체공급부로부터가스용해부에공급되는액체의유량을조정한다.

公开(公告)号：SG10202005037PA

公开(公告)日：2021-01-28

申请号：SG10202005037P

申请日：2020-05-28

Applicant: EBARA CORP

Inventor： OZAWA SUGURU ,  ARAKI YUJI ,  WATANABE TOSHIFUMI ,  NAKAGAWA YOICHI

Abstract: A gas dissolution supply apparatus (1) dissolves a gas supplied from a gas supply unit (3) in a liquid supplied from a liquid supply unit (4) to produce a gas dissolution in a gas dissolving unit (5), stores the gas dissolution produced in the gas dissolving unit (5) in a gas dissolution tank (6), supplies the gas dissolution from the gas dissolution tank (6) to a use point, measures the flow rate of a part of the gas dissolution supplied to the use point that is returned to the gas dissolving unit (5), and adjusts the flow rate of the liquid supplied from the liquid supply unit (4) to the gas dissolving unit (5) based on the result of the measurement.

公开(公告)号：SG10202101150PA

公开(公告)日：2021-09-29

申请号：SG10202101150P

申请日：2021-02-03

Applicant: EBARA CORP

Inventor： OZAWA SUGURU ,  ARAKI YUJI ,  NAKAGAWA YOICHI ,  WATANABE TOSHIFUMI

Abstract: A gas solution manufacturing device 1 includes a gas supply line 2 configured to supply a gas as a raw material of a gas solution, a liquid supply line 3 configured to supply a liquid as a raw material of the gas solution, a gas solution production unit 4 configured to mix the gas and the liquid together to produce the gas solution, a gas-liquid separation unit 5 configured to perform gas-liquid separation of the produced gas solution into a supplied liquid to be supplied to a use point and a discharged gas to be discharged through an exhaust port, and a gas dissolving unit 6 provided in the liquid supply line 4 and configured to dissolve the discharged gas resulting from the gas-liquid separation in the liquid. The gas dissolving unit 6 is configured with a hollow fiber membrane configured with a gas permeable membrane.

公开(公告)号：SG11201805417PA

公开(公告)日：2018-07-30

申请号：SG11201805417P

申请日：2017-01-13

Applicant: EBARA CORP

Inventor： OZAWA SUGURU ,  NAKAGAWA YOICHI ,  TAKAHASHI MUNETO ,  XU TAO ,  YOKOYAMA TOSHIO

IPC: B01F23/80

Abstract: SUPPLY-LIQUID PRODUCING APPARATUS AND SUPPLY-LIQUID PRODUCING METHOD Provided is a supply-liquid producing apparatus capable of producing a supply liquid by an amount needed at a use point. A supply-liquid producing apparatus includes a mixer 113 that mixes water and ozone gas to produce ozone water; a booster pump 112 that increases the pressure of the water to be supplied to the mixer 113; a gas-liquid separation tank 114 that separates the ozone water produced by the mixer 113 into ozone water to be supplied to a use point 119 and exhaust gas to be discharged from an exhaust port 125; a flowmeter 117 that measures the flow rate of the ozone water to be supplied from the gas- liquid separation tank 114 to the use point 119; a flow control unit 126 that adjusts the pressure (flow rate) of the water to be increased in pressure and supplied to the mixer 113 by controlling the booster pump 112 in response to the flow rate of the ozone water measured by the flowmeter 117; and an exhaust pressure control unit 127 that controls the exhaust pressure of the exhaust gas so as to keep the water level in the gas-liquid separation tank 114 constant. [FIG. 1]

公开(公告)号：EP3195926A4

公开(公告)日：2018-04-18

申请号：EP15842759

申请日：2015-09-09

Applicant: EBARA CORP

Inventor： OZAWA SUGURU ,  HARADA MINORU ,  TAKAHASHI MUNETO

IPC: C01B13/11 ,  B01F1/00 ,  B01F3/04 ,  B01F5/04 ,  B01F15/00 ,  B01F15/02 ,  B01F15/04 ,  C02F1/78 ,  H01L21/304

CPC classification number: B01F3/0446 ,  B01F1/00 ,  B01F3/04 ,  B01F5/04 ,  B01F5/0413 ,  B01F15/00149 ,  B01F15/00162 ,  B01F15/0022 ,  B01F15/00357 ,  B01F15/00422 ,  B01F15/02 ,  B01F15/04 ,  B01F2003/04886 ,  B01F2215/004 ,  C01B13/11 ,  C01B2201/64 ,  C02F1/78 ,  C02F2103/04 ,  C02F2201/782 ,  C02F2209/03 ,  C02F2209/38 ,  C02F2209/40 ,  H01L21/02052 ,  H01L21/304

Abstract: An ozone water production device (1) includes: flow rate controllers (4, 5) that each control a flow rate of gas which is a raw material; a flow rate meter (12) that measures a flow rate of water which is a raw material; a booster pump (13) that controls pressure of the water; an ozone water generating unit (8) that generates ozone water by mixing ozone gas and the water; and a pressure sensor (17) that measures pressure of the ozone water which is to be supplied to a use point (19). The booster pump (13) controls the pressure of the water such that the pressure of the ozone water measured by the pressure sensor (17) is constant. The flow rate controllers (4, 5) each control the flow rate of the gas in accordance with the flow rate of the water measured by the flow rate meter (12).

公开(公告)号：SG10202005812YA

公开(公告)日：2021-02-25

申请号：SG10202005812Y

申请日：2020-06-18

Applicant: EBARA CORP

Inventor： NAKAGAWA YOICHI ,  OZAWA SUGURU ,  ARAKI YUJI ,  WATANABE TOSHIFUMI

IPC: B01F33/40

Abstract: A gas dissolved liquid manufacturing device includes: a pump configured to pressurize a liquid; a pipe communicating with the pump; a nozzle disposed in the pipe, the nozzle being configured to generate micro bubbles using a supplied gas; and a gas-liquid separation tank whose upper part communicates with the pipe, the gas-liquid separation tank being configured to separate a gas-liquid mixture generated by the nozzle into a gas and a liquid.

公开(公告)号：SG11201702242PA

公开(公告)日：2017-04-27

申请号：SG11201702242P

申请日：2015-09-09

Applicant: EBARA CORP

Inventor： OZAWA SUGURU ,  HARADA MINORU ,  TAKAHASHI MUNEHITO

IPC: B01F1/00 ,  B01F15/02 ,  B01F3/04 ,  B01F5/04 ,  B01F15/04 ,  C01B13/10 ,  C01B13/11 ,  C02F1/78 ,  H01L21/304

Abstract: An ozone water production device (1) includes: flow rate controllers (4, 5) that each control a flow rate of gas which is a raw material; a flow rate meter (12) that measures a flow rate of water which is a raw material; a booster pump (13) that controls pressure of the water; an ozone water generating unit (8) that generates ozone water by mixing ozone gas and the water; and a pressure sensor (17) that measures pressure of the ozone water which is to be supplied to a use point (19). The booster pump (13) controls the pressure of the water such that the pressure of the ozone water measured by the pressure sensor (17) is constant. The flow rate controllers (4, 5) each control the flow rate of the gas in accordance with the flow rate of the water measured by the flow rate meter (12).