公开(公告)号：SG11201807416YA

公开(公告)日：2018-10-30

申请号：SG11201807416Y

申请日：2017-03-07

Applicant: EBARA CORP

Inventor： MUKAIYAMA YOSHITAKA ,  YOKOYAMA TOSHIO ,  YAMAKAWA JUNITSU ,  TSUSHIMA TAKUYA ,  HIRAO TOMONORI ,  TAMURA SHO ,  OHASHI HIROTAKA

IPC: C25D17/08 ,  B65G49/02 ,  C25D17/06 ,  H01L21/683 ,  H05K3/18

Abstract: SUBSTRATE HOLDER AND PLATING APPARATUS To provide a substrate holder and a plating apparatus that can easily position a substrate. A substrate holder includes a substrate holding body for holding a substrate, and a first holding member and a second holding member that interpose and hold the substrate holding body therebetween, and the first holding member includes an opening portion through which the plating target surface of the substrate is exposed, and a power supply member configured to be in contact with a plating target surface of the substrate. Figure 1

公开(公告)号：SG10201908287UA

公开(公告)日：2020-05-28

申请号：SG10201908287U

申请日：2019-09-09

Applicant: EBARA CORP

Inventor： TSUSHIMA TAKUYA

Abstract: A substrate attachment and detachment device appropriate for a double-sided holder is provided. The substrate attachment and detachment device is a device that holds a substrate in a substrate holder and/or releases the holding of the substrate using the substrate holder. The substrate holder includes a first frame and a second frame. The first frame and the second frame have openings, respectively. The device includes a substrate supporting unit that sandwiches the substrate between the first frame and the second frame. The substrate supporting unit includes a lower substrate supporter, and an upper substrate supporter. The lower substrate supporter is configured to come into contact with the substrate through the opening of the frame positioned on a lower side. The upper substrate supporter is configured to come into contact with the substrate through the opening of the frame positioned on an upper side.