公开(公告)号：US20200009702A1

公开(公告)日：2020-01-09

申请号：US16454719

申请日：2019-06-27

Applicant: EBARA CORPORATION

Inventor： Lien Yin CHENG ,  Akira IMAMURA ,  Mitsuru MIYAZAKI ,  Junji KUNISAWA

IPC: B24B29/02 ,  B08B1/04 ,  H01L21/67 ,  B08B1/00

Abstract: A vacuum hole for suction holding a processing target object through vacuum is formed on a stage surface of a vacuum suction holding stage, and a hole corresponding to the vacuum hole is formed on an elastic pad. A jig includes a first projecting portion configured to be insertable into the vacuum hole on the vacuum suction holding stage, a support portion configured to come into contact with the stage surface with the first projecting portion inserted in the vacuum hole, and a second projecting portion projecting toward an opposite side to the first projecting portion with respect to the support portion and configured to be insertable into the hole on the elastic pad.