公开(公告)号：US20170282132A1

公开(公告)日：2017-10-05

申请号：US15511803

申请日：2015-09-09

Applicant: EBARA CORPORATION

Inventor： Suguru OZAWA ,  Minoru HARADA ,  Munehito TAKAHASHI

IPC: B01F3/04 ,  C01B13/11 ,  C02F1/78 ,  B01F15/00 ,  B01F5/04

CPC classification number: B01F3/0446 ,  B01F5/0413 ,  B01F15/00149 ,  B01F15/00162 ,  B01F15/0022 ,  B01F15/00357 ,  B01F15/00422 ,  B01F2003/04886 ,  B01F2215/004 ,  C01B13/11 ,  C01B2201/64 ,  C02F1/78 ,  C02F2103/04 ,  C02F2201/782 ,  C02F2209/03 ,  C02F2209/38 ,  C02F2209/40 ,  H01L21/02052 ,  H01L21/67017

Abstract: An ozone water production device (1) includes: flow rate controllers (4, 5) that each control a flow rate of gas which is a raw material; a flow rate meter (12) that measures a flow rate of water which is a raw material; a booster pump (13) that controls pressure of the water; an ozone water generating unit (8) that generates ozone water by mixing ozone gas and the water; and a pressure sensor (17) that measures pressure of the ozone water which is to be supplied to a use point (19). The booster pump (13) controls the pressure of the water such that the pressure of the ozone water measured by the pressure sensor (17) is constant. The flow rate controllers (4, 5) each control the flow rate of the gas in accordance with the flow rate of the water measured by the flow rate meter (12).