公开(公告)号：US20150071742A1

公开(公告)日：2015-03-12

申请号：US14483096

申请日：2014-09-10

Applicant: Ebara Corporation

Inventor： Shunsuke MATSUZAWA ,  Masafumi INOUE

IPC: H01L21/677 ,  B24B37/04 ,  B08B3/04 ,  H01L21/304

CPC classification number: B08B3/04 ,  B24B37/04 ,  H01L21/67253 ,  H01L21/67259

Abstract: It is an object of the embodiment of the invention to enhance the work efficiency of a substrate transfer test between a plurality of units. A test control section (CPU) which is provided in a loading/unloading unit 2 performs a substrate transfer test for the loading/unloading unit 2 alone by receiving a wafer mounted on a substrate table 2300 or 2400 which is installed outside the loading/unloading unit 2 and transporting the wafer into the loading/unloading unit 2 by a transport mechanism or transporting a wafer placed in the loading/unloading unit 2 to a substrate table 2200 and mounting the wafer on the substrate table 2200 by the transport mechanism while the loading/unloading unit 2 is not assembled together with the cleaning unit and the polishing unit.

Abstract translation: 本发明的实施例的目的是提高多个单元之间的基板转移测试的工作效率。 设置在装载/卸载单元2中的测试控制部分（CPU）仅通过接收安装在装载/卸载的外部的基板台2300或2400上的晶片来执行装载/卸载单元2的基板传送测试 单元2并且通过传送机构将晶片运送到装载/卸载单元2中，或者将放置在装载/卸载单元2中的晶片传送到基板台2200，并且通过传送机构将晶片安装在基板台2200上，同时装载 卸载单元2不与清洁单元和抛光单元组装在一起。

公开(公告)号：US20170236730A1

公开(公告)日：2017-08-17

申请号：US15432471

申请日：2017-02-14

Applicant: EBARA CORPORATION

Inventor： Akira IMAMURA ,  Mitsuru MIYAZAKI ,  Junji KUNISAWA ,  Shunsuke MATSUZAWA

IPC: H01L21/67 ,  H01L21/687 ,  B08B3/02 ,  B08B1/04 ,  B08B3/08

CPC classification number: H01L21/67051 ,  H01L21/67046 ,  H01L21/67253 ,  H01L21/68728

Abstract: A substrate cleaning apparatus comprises: a cleaning member 11,21 that comes into contact with a substrate W and cleans the substrate W; a member rotating unit 15, 25 that rotates the cleaning member 11, 21; a pressing drive unit 19, 29 that presses the cleaning member 11, 21 against the substrate W; a torque detecting unit 16, 26 for detecting torque applied to the member rotating unit 15, 25; and a control unit 50 that controls pressing force on the basis of a result of detection by the torque detecting unit 16, 26.