公开(公告)号：US20240286246A1

公开(公告)日：2024-08-29

申请号：US18441851

申请日：2024-02-14

Applicant: EBARA CORPORATION

Inventor： Masayuki TAMURA ,  Yusuke MOCHIDA ,  Tetsuya TERADA ,  Noriyuki SATO ,  Kuniaki YAMAGUCHI

IPC: B24B41/047 ,  B24B37/005

CPC classification number: B24B41/047 ,  B24B37/005

Abstract: A technique is disclosed that can allow an elastic membrane to be inflated into a desired shape when a workpiece is released from a polishing head, or when the workpiece is held on the polishing head, thereby avoiding excessive stress on the workpiece. The method includes supplying a gas into a first pressure chamber and a second pressure chamber at a first flow rate and a second flow rate regulated by a first flow-rate control valve and a second flow-rate control valve to inflate an elastic membrane of a polishing head when a polished workpiece is released from the polishing head, or when a workpiece to be polished is held on the polishing head. The first pressure chamber and the second pressure chamber are formed by the elastic membrane.

公开(公告)号：US20230001539A1

公开(公告)日：2023-01-05

申请号：US17809074

申请日：2022-06-27

Applicant: EBARA CORPORATION

Inventor： Kuniaki YAMAGUCHI ,  Masayuki TAMURA ,  Kenji SHINKAI ,  Soichi ISOBE ,  Yusuke MOCHIDA

IPC: B24B53/00 ,  B24B53/017 ,  B24B57/02

Abstract: A liquid feeder includes: a first arm having a first nozzle; a second arm having a second nozzle; a first rotation shaft supporting a proximal end part of the first arm; a second rotation shaft supporting a proximal end part of the second arm; a first rotation driver configured to rotate the first rotation shaft to turn the first arm from a fluid feed position to a retracted position; a second rotation driver configured to rotate the second rotation shaft to turn the second arm from a fluid feed position to a retracted position; and a controller. The first rotation shaft and the second rotation shaft are disposed coaxially with each other. The controller is capable of controlling the operation of the first rotation driver and the operation of the second rotation driver independently of each other.