公开(公告)号：JPH0250901A

公开(公告)日：1990-02-20

申请号：JP9428689

申请日：1989-04-13

Applicant: ELECTRO PLASMA INC

Inventor： ERITSUKU MIYUURUBAAGAA ,  ARUBAATO SHITSUKINJIYAA

IPC: B22F1/00 ,  C23C4/12 ,  C23G5/00

Abstract: PURPOSE: To deposit oxide-free metallic powder on a substrate by performing connection to a negative transfer arc power source where a plasma gun is made to an anode and a substrate is made to a cathode, at the time of spraying the powder of an easily oxidizable metal such as Ti, Ta and Al, on a substrate by means of a plasma stream. CONSTITUTION: A plasma stream 72 is generated from a plasma gun 16 and the fine-grained powder of an easily oxidizable metal such as Ti, Ta and Al, is supplied into the plasma stream and deposited on a substrate 70. At this time, a negative transfer arc power source 50 is arranged between the plasma gun 16 and the substrate 70 and the substrate 70 and the plasma gun 16 are connected to respective terminals 76, 74 so that they become a cathode and an anode, respectively. Oxide coatings on the surfaces of the supplied metal particles are removed by the steam of negative electrons from the substrate 70 and the particles of the metal, such as Ti, Ta and Al, free from oxide coatings can be deposited on the substrate 70.