公开(公告)号：WO2013016399A2

公开(公告)日：2013-01-31

申请号：PCT/US2012048090

申请日：2012-07-25

Applicant: ELECTRO SCIENT IND INC ,  HALDERMAN JONATHAN D ,  O'CONNOR CIARAN JOHN PATRICK ,  WILKINS JAY

Inventor： HALDERMAN JONATHAN D ,  O'CONNOR CIARAN JOHN PATRICK ,  WILKINS JAY

IPC: G01B11/00 ,  G01N21/00

CPC classification number: G01N23/225 ,  H01L22/12 ,  H01L33/0095

Abstract: A method;of characterizing an object includes determining a depth-wise composition of the object at a measurement site within the object. A property of the object within a region adjacent to the measurement site can, optionally, be estimated, based on the determining. Another method of characterizing an object includes disposing at least a portion of an object within a measurement region of a metrology tool, aligning a feature of the object and a location of a designated measurement site within the measurement region relative to each other, -and performing a performing a compositional analysis of;a portion of the object occupying the measurement site. Various apparatus for performing these methods are also disclosed, as are methods of monitoring manufacturing processes based on these methods.

Abstract translation: 表征对象的方法包括在对象内的测量位置处确定对象的深度方面的组合。 可选地，基于确定来估计与测量位置相邻的区域内的对象的属性。 表征对象的另一种方法包括将对象的至少一部分放置在计量工具的测量区域内，使对象的特征和测量区域内的指定测量位置的位置相对于彼此对准，并且执行 执行组成分析;占据测量位置的对象的一部分。 还公开了用于执行这些方法的各种装置，以及基于这些方法监视制造过程的方法。

公开(公告)号：EP2795283A4

公开(公告)日：2015-07-22

申请号：EP12858924

申请日：2012-11-01

Applicant: ELECTRO SCIENT IND INC

Inventor： O'CONNOR CIARAN JOHN PATRICK ,  HILLIARD SHANE ,  SUMERFIELD LEIF

IPC: G01N1/00 ,  B23K26/06 ,  G01N27/64 ,  G02B5/00 ,  G02B27/00

CPC classification number: H01J49/164 ,  G02B5/005

Abstract: An apparatus can include a first beam cropper configured to crop a portion of a radiation pulse having a first spot size to form an intermediate cropped radiation pulse having an intermediate cropped spot with an intermediate cropped spot size less than the first spot size; and a second beam cropper configured to crop the intermediate cropped spot to form a second cropped radiation pulse having a second cropped spot with a second cropped spot size less the intermediate cropped spot size.

Abstract translation: 一种装置可以包括：第一光束裁剪器，被配置为裁剪具有第一光斑尺寸的辐射脉冲的一部分，以形成中间裁剪的辐射脉冲，该中间剪切辐射脉冲具有小于第一光点尺寸的中间裁剪光点尺寸的中间裁剪光点; 以及第二光束裁剪器，其被配置为裁剪所述中间裁剪光点以形成具有第二裁剪光斑的第二裁剪的辐射脉冲，其具有小于所述中间裁切光点尺寸的第二裁剪光斑尺寸。

公开(公告)号：EP2972240A4

公开(公告)日：2016-10-26

申请号：EP14764585

申请日：2014-03-14

Applicant: ELECTRO SCIENT IND INC

Inventor： O'CONNOR CIARAN JOHN PATRICK

IPC: G01N21/71 ,  G01N21/63 ,  H05H1/30

CPC classification number: H05H1/30 ,  G01N21/718 ,  H01J49/0463

公开(公告)号：EP2795340A4

公开(公告)日：2015-07-22

申请号：EP12860555

申请日：2012-11-01

Applicant: ELECTRO SCIENT IND INC

Inventor： O'CONNOR CIARAN JOHN PATRICK ,  HILLIARD SHANE

IPC: H01J49/04 ,  G01J3/02 ,  G01N21/84

CPC classification number: G01N1/22 ,  G01J3/0202 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/443 ,  G01N21/84 ,  H01J49/0463

Abstract: An apparatus can include ablation chamber body having a transmission window and defining an accommodation region configured to accommodate a target that is movable relative to the transmission window. An aerosol transmission conduit is configured to transport an aerosol produced within the accommodation region to a sample receiving region of an analysis system along a substantially straight transport path.

公开(公告)号：AU2014228108A1

公开(公告)日：2015-09-03

申请号：AU2014228108

申请日：2014-03-14

Applicant: ELECTRO SCIENT IND INC

Inventor： O'CONNOR CIARAN JOHN PATRICK

IPC: G01N21/71 ,  G01N21/63

Abstract: A method for reducing thermal effects in laser ablation optical emission spectrometry includes creating discrete ablation spots along an analysis line on a target surface. At least one of the following is also carried out. First, the ablation spots are positioned so that a pair of successive ablation spots are spaced apart from one another along the analysis line and are separated from one another by another ablation spot. Second, when the analysis line comprises generally parallel, adjacent analysis line segments, the ablation spots are positioned so that (A) a pair of successive ablation spots are on different analysis line segments, and (B) the successive ablation spots are positioned to be at different longitudinal positions along the analysis line segments when the different analysis line segments are adjacent to one another. As a result, a linear scan of isolated ablation spots can be generated.