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公开(公告)号：DE10061769B4
公开(公告)日：2011-06-01
申请号：DE10061769
申请日：2000-12-12
Applicant: ELPIDA MEMORY INC
Inventor： KITAYAMA MAKOTO , OBARA TAKASHI , CHONAN TORU , FUKUZO YUKIO , KOSHIKAWA YASUJI , MATSUBARA YASUSHI , MITOU HIDEKI
IPC: G11C11/409 , G11C11/41 , G11C5/02 , G11C7/06 , G11C7/08 , G11C11/401 , G11C16/06 , H01L21/8242 , H01L27/108
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