A METHOD OF MAKING AN ARRAY OF SENSOR PIXELS, AND ASSOCIATED APPARATUS AND METHODS

    公开(公告)号:US20190148421A1

    公开(公告)日:2019-05-16

    申请号:US16300154

    申请日:2017-05-09

    Applicant: EMBERION OY

    Abstract: A method of making an array of sensor pixels, the method comprising: forming an array of nucleation sites on a growth substrate, each nucleation site configured to facilitate the growth of a respective domain of channel material on the growth substrate, the array of nucleation sites having a predefined configuration corresponding to an arrangement of pixel regions on a target substrate; growing an array of domains of channel material on the growth substrate from the array of respective nucleation sites to form a layer of channel material; and transferring the layer of channel material onto the target substrate such that the domains of channel material are substantially aligned with the pixel regions of the target substrate to allow the formation of a pixel array, each pixel of the array comprising source and drain electrodes configured to enable a flow of electrical current through a respective domain of channel material, and a functionalising material on the domain of channel material configured to produce a detectable change in the flow of electrical current on exposure to a physical stimulus which is indicative of one or more of the presence and magnitude of the physical stimulus.

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