公开(公告)号：US3612941A

公开(公告)日：1971-10-12

申请号：US3612941D

申请日：1970-04-24

Applicant: ENERGY SCIENCES INC

Inventor： NABLO SAMUEL V ,  DENHOLM A STUART

IPC: H01J19/82 ,  H01J

CPC classification number: H01J19/82

Abstract: The present disclosure involves methods and apparatus for continually replacing the adsorbed gas layer stripped from highcurrent field-emission cold cathodes by the effects of highvoltage pulsing the cathode.

公开(公告)号：CA965483A

公开(公告)日：1975-04-01

申请号：CA162189

申请日：1973-01-26

Applicant: ENERGY SCIENCES INC

Inventor： DENHOLM A STUART ,  SIMCOX GORDON K

IPC: G21K1/00 ,  G21K5/04 ,  H01J3/02 ,  H01J33/00 ,  H05H5/00

公开(公告)号：FR2497999B1

公开(公告)日：1989-12-08

申请号：FR8200402

申请日：1982-01-12

Applicant: ENERGY SCIENCES INC

Inventor： DENHOLM A STUART ,  FRUTIGER WILLIAM A ,  WILLIAMS KENNETH E

IPC: H01L21/20 ,  G21K5/02 ,  H01J37/063 ,  H01J37/30 ,  H01L21/263 ,  G21K5/10 ,  H01L21/02

Abstract: This disclosure is concerned with the use of fine line converged electron beams of high aspect ratio for effecting physical, chemical, mechanical and other changes in the surface of objects, and also volume effects, including applications, for example, to semiconductor and other materials surface modification technology, annealing, welding, etching, polishing, cutting, curing and other surface and volume alteration.

公开(公告)号：FR2497999A1

公开(公告)日：1982-07-16

申请号：FR8200402

申请日：1982-01-12

Applicant: ENERGY SCIENCES INC

Inventor： DENHOLM A STUART ,  FRUTIGER WILLIAM A ,  WILLIAMS KENNETH E

IPC: H01L21/20 ,  G21K5/02 ,  H01J37/063 ,  H01J37/30 ,  H01L21/263 ,  G21K5/10 ,  H01L21/02

Abstract: This disclosure is concerned with the use of fine line converged electron beams of high aspect ratio for effecting physical, chemical, mechanical and other changes in the surface of objects, and also volume effects, including applications, for example, to semiconductor and other materials surface modification technology, annealing, welding, etching, polishing, cutting, curing and other surface and volume alteration.

公开(公告)号：DE2314681A1

公开(公告)日：1973-10-04

申请号：DE2314681

申请日：1973-03-22

Applicant: ENERGY SCIENCES INC

Inventor： SIMCOX GORDON K ,  DENHOLM A STUART

IPC: G21K1/00 ,  G21K5/04 ,  H01J3/02 ,  H01J33/00 ,  H05H5/00 ,  H01J37/00