公开(公告)号：EP1570991A3

公开(公告)日：2006-10-18

申请号：EP05004352.0

申请日：2005-02-28

Applicant: ENPLAS CORPORATION

Inventor： Yamada, Kyouhei ,  Watanabe, Yasuhiro

IPC: B41J2/14 ,  B41J2/16 ,  B01L3/02 ,  B01J19/00 ,  G01N35/10

CPC classification number: B01L3/0241 ,  B01L3/0268 ,  B01L2200/12 ,  B01L2300/0819 ,  B41J2/1433 ,  B41J2002/14475 ,  B81B2201/038 ,  G01N2035/1041

Abstract: There is provided a liquid droplet ejecting apparatus capable of being efficiently produced at low production costs. The liquid droplet ejecting apparatus 1 includes a substrate 2 which has a hole 4 extending in thickness directions to pass through the substrate 2, and a photoresist film 3 which is formed on one side 2a of the substrate 2 so as to close one end of the hole 4, the photoresist film 3 having a small hole 5 which faces the one end of the hole 4 to open the one end of the hole 4 to the atmosphere. Thus, the liquid droplet ejecting apparatus 1 is designed to eject a droplet of a liquid from the small hole 5 by applying a pressure of a pressure source 6 to the other end of the hole 4 after the liquid is injected into the hole 4.

公开(公告)号：EP1570991A2

公开(公告)日：2005-09-07

申请号：EP05004352.0

申请日：2005-02-28

Applicant: ENPLAS CORPORATION

Inventor： Yamada, Kyouhei ,  Watanabe, Yasuhiro

IPC: B41J2/14

CPC classification number: B01L3/0241 ,  B01L3/0268 ,  B01L2200/12 ,  B01L2300/0819 ,  B41J2/1433 ,  B41J2002/14475 ,  B81B2201/038 ,  G01N2035/1041

Abstract: There is provided a liquid droplet ejecting apparatus capable of being efficiently produced at low production costs. The liquid droplet ejecting apparatus 1 includes a substrate 2 which has a hole 4 extending in thickness directions to pass through the substrate 2, and a photoresist film 3 which is formed on one side 2a of the substrate 2 so as to close one end of the hole 4, the photoresist film 3 having a small hole 5 which faces the one end of the hole 4 to open the one end of the hole 4 to the atmosphere. Thus, the liquid droplet ejecting apparatus 1 is designed to eject a droplet of a liquid from the small hole 5 by applying a pressure of a pressure source 6 to the other end of the hole 4 after the liquid is injected into the hole 4.

Abstract translation: 提供了能够以低生产成本有效地生产的液滴喷射装置。 液滴喷射装置1包括：基板2，其具有在厚度方向上延伸通过基板2的孔4;以及光致抗蚀剂膜3，其形成在基板2的一侧2a上，以封闭基板2的一端 孔4，光致抗蚀剂膜3具有面向孔4的一端的小孔5，以将孔4的一端打开到大气。 因此，液滴喷射装置1被设计成在将液体注入到孔4中之后，通过将压力源6的压力施加到孔4的另一端，从小孔5喷射液滴。