公开(公告)号：DE4447477B4

公开(公告)日：2006-02-16

申请号：DE4447477

申请日：1994-02-11

Applicant: ENTEGRIS INC

Inventor： COLLINS TIMOTHY R ,  GRANT ROBERT C ,  CHINNOCK ROBERT T ,  HAMILTON DEAN T

IPC: G01D5/24 ,  G01N27/04

Abstract: The capacitive proximity monitoring device comprises a capacitance field element or sensing element disposed in a corrosive atmosphere environment and being made of conductive plastic resistant for such an environment. Such conductive plastic is rendered conductive by carbon filling the plastic, or by adding iron particles to the plastic. The field element may be a functional part of a functional device that performs a function with respect to the presence of the liquid being sensed; and in some cases the field element is nonfunctional with respect to the liquid, but functional and sensing the capacitance and determining the presence or absence of liquid. The functional device may incorporate a valve or coupling for tubing.

公开(公告)号：WO2012006626A3

公开(公告)日：2012-04-19

申请号：PCT/US2011043575

申请日：2011-07-11

Applicant: ENTEGRIS INC ,  ULSCHMID TODD M ,  FISHER JOHN G ,  DIAZ JORGE A ,  WILKINSON WILEY J ,  BELSKY CHRISTOPHER M ,  CHINNOCK ROBERT T ,  SNYDER ROBERT K

Inventor： ULSCHMID TODD M ,  FISHER JOHN G ,  DIAZ JORGE A ,  WILKINSON WILEY J ,  BELSKY CHRISTOPHER M ,  CHINNOCK ROBERT T ,  SNYDER ROBERT K

IPC: G05D7/06 ,  G01F1/34

CPC classification number: G05D7/0635 ,  G01F1/34 ,  G01F15/003 ,  G01F15/005

Abstract: A flow controller includes a body having an inlet end, an outlet end, a flow measurement portion, a variable valve portion and a control portion to control the valve portion based on an output from the flow measurement portion. The flow measurement portion includes a pair of differential pressure sensors for measuring the pressure drop across a flow path as the fluid flows through the flow path. The flow control portion comprises a flexible tube and a plunger with a motor drive that incrementally pinches the flexible tube. A linear, constant diameter bore extends through the housing forming a fluid flow passage for providing a calibrated pressure drop to a fluid that is passed through the fluid flow passage. A replaceable portion of the fluid flow passage is comprised of resilient soft plastic tubing as part of a pinch valve having non-contaminating fittings for positive device shut off.

Abstract translation: 流量控制器包括具有入口端，出口端，流量测量部分，可变阀部分和控制部分的主体，用于基于流量测量部分的输出来控制阀部分。 流量测量部分包括一对差压传感器，用于当流体流过流路时测量流路上的压降。 流量控制部分包括柔性管和具有马达驱动器的柱塞，其逐渐地夹持柔性管。 线性恒定直径的孔延伸穿过壳体，形成流体流动通道，用于向通过流体流动通道的流体提供经校准的压降。 流体流动通道的可替换部分由弹性软塑料管构成，作为夹紧阀的一部分，具有用于正装置关闭的无污染配件。

公开(公告)号：WO2007008692B1

公开(公告)日：2007-07-19

申请号：PCT/US2006026570

申请日：2006-07-10

Applicant: ENTEGRIS INC ,  CHINNOCK ROBERT T ,  MEACHAM CHARLES ,  MILLER CLIFFORD

Inventor： CHINNOCK ROBERT T ,  MEACHAM CHARLES ,  MILLER CLIFFORD

IPC: F16K17/26

CPC classification number: G01F1/363 ,  G05D7/0635 ,  H05K1/0218 ,  H05K1/0393 ,  H05K2201/0715 ,  H05K2201/09354 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/7895

Abstract: A flow controller including a unitary controller body with a chemically inert fluid conduit having an insertable constriction or orifice disposed within the conduit having a reduced cross-sectional area to thereby restrict the flow of fluid within the conduit allowing for reliable flow measurement. An integrated circuit or controller may becoupled to the control valve and also coupled to the pressure sensors by a lead structure including signal conductors surrounded by a Faraday cage, and a chemically inert housing coupled to the unitary controller body enclosing the control valve and the pressure sensors.

Abstract translation: 一种流量控制器，其包括具有化学惰性流体导管的单一控制器本体，所述流体导管具有设置在导管内的可插入收缩部或孔口，其具有减小的横截面面积，从而限制导管内流体的流动，从而允许可靠的流量测量。 集成电路或控制器可以与控制阀连接并且还通过包括由法拉第笼围绕的信号导体的引线结构和与封闭控制阀和压力传感器的单体控制器本体连接的化学惰性外壳耦合到压力传感器 。

公开(公告)号：WO2012006626A9

公开(公告)日：2012-03-01

申请号：PCT/US2011043575

申请日：2011-07-11

Applicant: ENTEGRIS INC ,  ULSCHMID TODD M ,  FISHER JOHN G ,  DIAZ JORGE A ,  WILKINSON WILEY J ,  BELSKY CHRISTOPHER M ,  CHINNOCK ROBERT T ,  SNYDER ROBERT K

Inventor： ULSCHMID TODD M ,  FISHER JOHN G ,  DIAZ JORGE A ,  WILKINSON WILEY J ,  BELSKY CHRISTOPHER M ,  CHINNOCK ROBERT T ,  SNYDER ROBERT K

IPC: G05D7/06 ,  G01F1/34

CPC classification number: G05D7/0635 ,  G01F1/34 ,  G01F15/003 ,  G01F15/005

Abstract: A flow controller includes a body having an inlet end, an outlet end, a flow measurement portion, a variable valve portion and a control portion to control the valve portion based on an output from the flow measurement portion. The flow measurement portion includes a pair of differential pressure sensors for measuring the pressure drop across a flow path as the fluid flows through the flow path. The flow control portion comprises a flexible tube and a plunger with a motor drive that incrementally pinches the flexible tube. A linear, constant diameter bore extends through the housing forming a fluid flow passage for providing a calibrated pressure drop to a fluid that is passed through the fluid flow passage. A replaceable portion of the fluid flow passage is comprised of resilient soft plastic tubing as part of a pinch valve having non-contaminating fittings for positive device shut off.

Abstract translation: 流量控制器包括具有入口端，出口端，流量测量部分，可变阀部分和控制部分的主体，以基于来自流量测量部分的输出来控制阀部分。 流量测量部分包括一对差压传感器，用于在流体流过流动路径时测量流动路径上的压降。 流量控制部分包括柔性管和带有马达驱动器的柱塞，马达驱动器递增地夹紧柔性管。 线性恒定直径的孔延伸穿过壳体形成流体流动通道，用于向通过流体流动通道的流体提供校准的压降。 流体流动通道的可更换部分由弹性软塑料管构成，作为夹紧阀的一部分，该夹紧阀具有用于正向装置关闭的非污染配件。

公开(公告)号：WO2006084061A2

公开(公告)日：2006-08-10

申请号：PCT/US2006003724

申请日：2006-02-02

Applicant: ENTEGRIS INC ,  WEHRS DAVID L ,  CHINNOCK ROBERT T

Inventor： WEHRS DAVID L ,  CHINNOCK ROBERT T

IPC: G01F1/58

CPC classification number: G01F1/60 ,  G01F1/588

Abstract: A magnetic flow metering device and method is disclosed for the measurement of corrosive flow streams. The device utilizes a unibody construction wherein the flow conduit is constructed entirely from an insulative, non-conducting material without resorting to a metallic outer housing. The portions of the electrodes in contact with the flow stream are made of a suitable conductive polymer material, resistant to the corrosive media. The electrodes also feature shields that are molded into the electrode assembly to reduce background electrical noise. The invention also utilizes an electrical configuration that actively drives the electrode shield circuit (electrodes as well as cabling) to provide a more accurate measurement of the electromotive force.

Abstract translation: 公开了一种用于测量腐蚀性流动的流量计量装置和方法。 该装置使用一体式结构，其中流动管道完全由绝缘的非导电材料构成，而不借助于金属外壳体。 电极与流动流接触的部分由合适的导电聚合物材料制成，耐腐蚀性介质。 电极还具有模制到电极组件中以减少背景电噪声的屏蔽。 本发明还利用主动驱动电极屏蔽电路（电极以及布线）以提供更准确的电动势测量的电气结构。

公开(公告)号：WO2007008692A3

公开(公告)日：2007-05-10

申请号：PCT/US2006026570

申请日：2006-07-10

Applicant: ENTEGRIS INC ,  CHINNOCK ROBERT T ,  MEACHAM CHARLES ,  MILLER CLIFFORD

Inventor： CHINNOCK ROBERT T ,  MEACHAM CHARLES ,  MILLER CLIFFORD

IPC: F16K17/26

CPC classification number: G01F1/363 ,  G05D7/0635 ,  H05K1/0218 ,  H05K1/0393 ,  H05K2201/0715 ,  H05K2201/09354 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/7895

Abstract: A flow controller including a unitary controller body with a chemically inert fluid conduit having an insertable constriction or orifice disposed within the conduit having a reduced cross-sectional area to thereby restrict the flow of fluid within the conduit allowing for reliable flow measurement. An integrated circuit or controller may becoupled to the control valve and also coupled to the pressure sensors by a lead structure including signal conductors surrounded by a Faraday cage, and a chemically inert housing coupled to the unitary controller body enclosing the control valve and the pressure sensors.

Abstract translation: 流量控制器包括具有化学惰性流体导管的整体控制器主体，其具有设置在导管内的可插入的收缩部或孔口，其具有减小的横截面积，从而限制管道内的流体流动，从而可靠地进行流量测量。 集成电路或控制器可以耦合到控制阀，并且还通过包括由法拉第笼包围的信号导体的引线结构耦合到压力传感器，以及耦合到包围控制阀和压力传感器的整体控制器主体的化学惰性壳体 。

公开(公告)号：EP1907735A4

公开(公告)日：2008-10-08

申请号：EP06786652

申请日：2006-07-10

Applicant: ENTEGRIS INC

Inventor： CHINNOCK ROBERT T ,  MILLER CLIFFORD ,  MEACHAM CHARLES

IPC: G01F1/36

CPC classification number: G01F1/363 ,  G05D7/0635 ,  H05K1/0218 ,  H05K1/0393 ,  H05K2201/0715 ,  H05K2201/09354 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/7895

Abstract: A flow controller including a unitary controller body with a chemically inert fluid conduit having an insertable constriction or orifice disposed within the conduit having a reduced cross-sectional area to thereby restrict the flow of fluid within the conduit allowing for reliable flow measurement. An integrated circuit or controller may becoupled to the control valve and also coupled to the pressure sensors by a lead structure including signal conductors surrounded by a Faraday cage, and a chemically inert housing coupled to the unitary controller body enclosing the control valve and the pressure sensors.

Abstract translation: 一种流量控制器，其包括具有化学惰性流体导管的单一控制器本体，所述流体导管具有设置在导管内的可插入收缩部或孔口，其具有减小的横截面面积，从而限制导管内流体的流动，从而允许可靠的流量测量。 集成电路或控制器可以与控制阀连接并且还通过包括由法拉第笼围绕的信号导体的引线结构和与封闭控制阀和压力传感器的单体控制器本体连接的化学惰性外壳耦合到压力传感器 。

公开(公告)号：EP1846733A4

公开(公告)日：2008-12-24

申请号：EP06734235

申请日：2006-02-02

Applicant: ENTEGRIS INC

Inventor： WEHRS DAVID L ,  CHINNOCK ROBERT T

IPC: G01F1/58

CPC classification number: G01F1/60 ,  G01F1/588

Abstract: A magnetic flow metering device and method is disclosed for the measurement of corrosive flow streams. The device utilizes a unibody construction wherein the flow conduit is constructed entirely from an insulative, non-conducting material without resorting to a metallic outer housing. The portions of the electrodes in contact with the flow stream are made of a suitable conductive polymer material, resistant to the corrosive media. The electrodes also feature shields that are molded into the electrode assembly to reduce background electrical noise. The invention also utilizes an electrical configuration that actively drives the electrode shield circuit (electrodes as well as cabling) to provide a more accurate measurement of the electromotive force.