LIGHT-EMITTING DEVICE AND THE MANUFACTURING METHOD THEREOF
    1.
    发明申请
    LIGHT-EMITTING DEVICE AND THE MANUFACTURING METHOD THEREOF 审中-公开
    发光装置及其制造方法

    公开(公告)号:US20160204310A1

    公开(公告)日:2016-07-14

    申请号:US15078761

    申请日:2016-03-23

    Abstract: A method of manufacturing a light-emitting device comprises the steps of: providing a substrate; forming a mask block contacting the substrate and exposing a portion of the substrate; implanting an ion into the portion of the substrate to form an ion implantation region; and forming a semiconductor stack on the substrate such that multiple cavities are formed between the semiconductor stack and the ion implantation region; wherein the mask block comprises a material made of metal or oxide.

    Abstract translation: 一种制造发光器件的方法包括以下步骤:提供衬底; 形成与衬底接触并暴露衬底的一部分的掩模块; 将离子注入到所述衬底的所述部分中以形成离子注入区域; 以及在所述基板上形成半导体堆叠,使得在所述半导体堆叠和所述离子注入区域之间形成多个空腔; 其中所述掩模块包括由金属或氧化物制成的材料。

Patent Agency Ranking