公开(公告)号：JP2011076097A

公开(公告)日：2011-04-14

申请号：JP2010243316

申请日：2010-10-29

Applicant: Epson Toyocom Corp ,  エプソントヨコム株式会社

Inventor： OTO MASAYUKI

IPC: G02B5/30 ,  G11B7/135

Abstract: PROBLEM TO BE SOLVED: To provide a means for forming a laminated half-wave plate for a triple-wavelength compatible optical pickup device. SOLUTION: A first and a second wave plates using crystal having birefringence are laminated together in such a manner that their optical axes intersect to form a laminated wave plate functioning as a half-wave plate as a whole. Phase differences of the first and the second wave plates relative to an ordinary ray and an extraordinary ray with respect to a predetermined wavelength λ are set to be Γ1 and Γ2, an order of a high-mode order is set to be a natural number n, whereby the high-order mode laminated half-wave plate is formed so as to satisfy: Γ1=180°+360°×n; and Γ2=180°+360°×n. COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供一种用于形成用于三波长兼容的光学拾取装置的叠层半波片的装置。 解决方案：使用具有双折射的晶体的第一和第二波片层叠在一起，使得它们的光轴相交，从而形成作为半波片整体起作用的叠层波片。 第一和第二波片相对于普通光线和相对于预定波长λ的非凡光线的相位差被设置为Γ1和Γ2，高模量次序的顺序被设置为自然数n 由此形成高阶模式层叠半波片，以满足：Γ1= 180°+ 360°×n; Γ2= 180°+ 360°×n。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2011065175A

公开(公告)日：2011-03-31

申请号：JP2010246107

申请日：2010-11-02

Applicant: Epson Toyocom Corp ,  エプソントヨコム株式会社

Inventor： OTO MASAYUKI

IPC: G02B5/30 ,  G11B7/135

Abstract: PROBLEM TO BE SOLVED: To provide a half-wavelength plate in which two sheets of wavelength plates are pasted and temperature dependence of the phase difference of a plate is reduced. SOLUTION: The wavelength plate becomes by pasting together a first wavelength plate having a phase difference τ 1 (deg) and an azimuth of an optical axis θ 1 (deg) and a second wavelength plate having a phase difference τ 2 (deg) and an azimuth of an optical axis θ 2 (deg). The first wavelength plate and the second wavelength plate are pasted to satisfy θ 1 =(90+θ/2)/2, θ 2 =θ 1 +90+θ/2, when the phase difference τ 1 (deg) of the first wavelength plate and that τ 2 (deg) of the second wavelength plate are taken as τ 1 =τ 2 =360n+180 (n=0, 1, 2, ...), and an angle between polarization faces of incoming light and outgoing light is taken as θ(deg). COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供其中粘贴两张波片的半波长板，并降低板的相位差的温度依赖性。 解决方案：波长板通过将具有相位差τ 1 （deg）的第一波长板和光轴θ 1°（deg）的方位粘合在一起 ）和具有相位差τ 2 （deg）和光轴θ 2（°）的方位角的第二波长板。 第一波长板和第二波长板被粘贴以满足θ =（90 +θ/ 2）/ 2，θ 2 =θ 当第一波长板的相位差τ 1（s / s）（deg）和第二波长板的τ 2 （度）时，SB> + 90 +θ/ 2是 取为τ 1 =τ 2 = 360n + 180（n = 0,1,2，...），以及入射光和出射的极化面之间的角度 光取为θ（度）。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2010186824A

公开(公告)日：2010-08-26

申请号：JP2009028882

申请日：2009-02-10

Applicant: Epson Toyocom Corp ,  エプソントヨコム株式会社

Inventor： OTO MASAYUKI ,  YAMADA KOHEI ,  SAKURAI TOSHINOBU

IPC: H01L41/08 ,  G01L9/00 ,  H01L41/09 ,  H01L41/18 ,  H01L41/22 ,  H01L41/23 ,  H01L41/312

Abstract: PROBLEM TO BE SOLVED: To provide a method of processing a recess in transparent piezoelectric materials such as crystal, glass materials, and the other materials such as a substrate having the translucence, a sensor using the processing method, a piezoelectric device such as a vibrator, a method of manufacturing various components constituting the other electronic devices, and a pressure sensor. SOLUTION: In the method of processing the substrate, a corrosion resistant film 32 is formed on a surface of a crystal substrate 31 to pattern, a dry film 34 is formed on the surface of the exposed crystal substrate 31 and the remaining corrosion resistant film 32, this is exposed from the back of the crystal substrate 31 and is developed to pattern a mask 34a of the dry film 34 on the corrosion resistant film 32, the crystal substrate 31 is blast processed from the surface side to process a recess 35, and further the crystal substrate 31 is wet-etched to form a desired recess 36. When a thickness of the crystal substrate 31 prior to wet etching is t 0 , an amount of processing t of wet etching is set to 0.1 μm≤t 0 . COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：提供一种在诸如晶体，玻璃材料的透明压电材料以及诸如具有半透明度的基板之类的其它材料的处理凹槽的方法，使用该处理方法的传感器， 作为振动器，制造构成其他电子设备的各种部件的方法和压力传感器。 解决方案：在处理基板的方法中，在晶体基板31的表面上形成耐蚀膜32以进行图案化，在暴露的晶体基板31的表面上形成干膜34，并且剩余的腐蚀 将其从晶体基板31的背面露出并显影成在耐腐蚀膜32上形成干膜34的掩模34a，从表面侧对晶体基板31进行喷砂处理，以处理凹部 35，并且进一步对该晶体基板31进行湿式蚀刻以形成所需的凹部36.当在湿蚀刻之前的晶体基板31的厚度为t 0 时，湿蚀刻 设定为0.1μm≤t 0 。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2010146020A

公开(公告)日：2010-07-01

申请号：JP2010012904

申请日：2010-01-25

Applicant: Epson Toyocom Corp ,  エプソントヨコム株式会社

Inventor： KOBAYASHI SHUHO ,  OTO MASAYUKI ,  MATSUMOTO HIROSHI

IPC: G02B5/30 ,  G02F1/1335 ,  G03B21/00 ,  G03B21/14

Abstract: PROBLEM TO BE SOLVED: To provide a laminated retardation plate further improved in polarization converting efficiency of incident light than conventional technology. SOLUTION: A first retardation plat 10 and a second retardation plate 20 are bonded so as to intersect the optical axes 11, 21, thereby a laminated retardation plate 1 which functions as a half-wave retardation plate in 400-700 nm wavelength region. Where each plate thickness of the first retardation plate 10 and the second retardation plate 20 are in the range capable of mutually compensating the deviation in the phase difference. The laminated retardation plate 1 which is improved in polarization converting efficiency of the incident light than the conventional technology can be provided. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：为了提供进一步提高入射光的偏振转换效率的层压延迟板比常规技术。 解决方案：将第一相位差板10和第二延迟板20接合以与光轴11,21相交，由此形成400-700nm波长的用作半波延迟板的叠层相位差板1 地区。 其中，第一延迟板10和第二延迟板20的每个板厚都在能够相互补偿相位差的偏差的范围内。 可以提供比常规技术更好地提高入射光的偏振转换效率的层叠相位差板1。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2009283135A

公开(公告)日：2009-12-03

申请号：JP2009204778

申请日：2009-09-04

Applicant: Epson Toyocom Corp ,  エプソントヨコム株式会社

Inventor： MATSUMOTO HIROSHI ,  OTO MASAYUKI ,  SAKURAI MAKOTO ,  KANEKO TATSURO

IPC: G11B7/135

Abstract: PROBLEM TO BE SOLVED: To improve optical characteristics of a wide band 1/4 wavelength plate and to reduce the number of optical components constituting an optical pickup. SOLUTION: The wide band wavelength plate is configured by laminating two wavelength plates across a spacer in order to eliminate the wavefront aberration of a 1/4 wavelength plate, and includes gaps in optical surfaces of the two wavelength plates. A wide band 1/4 wavelength plate 20 is formed by laminating a 1/2 wavelength plate 17 and a 1/4 wavelength plate 18 across a frame-shaped spacer 21. Thus, the optical surfaces of the 1/2 wavelength plate 17 and the 1/4 wavelength plate 18 are laminated together via a gap 22, thereby eliminating the wavefront aberration of the wide band 1/4 wavelength plate 20. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：为了改善宽带1/4波长板的光学特性并减少构成光学拾取器的光学部件的数量。 解决方案：宽带波长板通过跨隔离物层叠两个波长板来构造，以消除1/4波长板的波前像差，并且在两个波长板的光学表面中包括间隙。 通过将1/2波长板17和1/4波长板18跨过框形间隔件21而形成宽带1/4波长板20.因此，1/2波长板17和 1/4波长板18通过间隙22层叠在一起，从而消除宽带1/4波长板20的波前像差。（C）2010，JPO＆INPIT

公开(公告)号：JP2009282483A

公开(公告)日：2009-12-03

申请号：JP2008227973

申请日：2008-09-05

Applicant: Epson Toyocom Corp ,  エプソントヨコム株式会社

Inventor： OTO MASAYUKI

IPC: G02B5/30 ,  G11B7/135

CPC classification number: G02B5/3083 ,  G11B7/1365 ,  G11B2007/0006

Abstract: PROBLEM TO BE SOLVED: To provide a laminated wave plate capable of coping with a plurality of different wavelengths, capable of restraining phase difference fluctuation to the minimum, even when the used wavelength is shifted from a prescribed value, and capable of rotating a polarization face of a linear polarization by 90°, when it functions as a 1/2-wave plate. SOLUTION: This laminated wave plate is defined by the condition of satisfying Γ A1 =360°+360°×2N A , Γ A2 =180°+360°×N A , Γ B1 =360°×2N B , Γ B2 =360°×N B , and NB=(Δn B /Δn A )×(λ A /λ B )×(0.5+N A ), where Γ A1 represents a phase difference of the wavelength λ A in the first wave plate 2, Γ A2 represents a phase difference of the wavelength λ A in the second wave plate 3; Γ B1 represents a phase difference of the wavelength λ B in the first wave plate 2; Γ B2 represents a phase difference of the wavelength λ B in the second wave plate 3; an in-plane azimuth θ 1 of the first wave plate 2 is -21°, an in-plane azimuth θ 2 of the second wave plate 3 is 45°; Δn A represents a difference between a normal ray refractive index no A and an abnormal ray refractive index ne A of the wavelength λ A , and where Δn B represents a difference between a normal ray refractive index no B ; and an abnormal ray refractive index ne B of the wavelength λ B . COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：即使当使用的波长从规定值偏移，并且能够旋转时，提供能够应对能够将相位差波动抑制到最小的多个不同波长的层叠波片 当其用作1/2波片时，线极化的偏振面为90°。

解决方案：该层压波片由满足Γ A1 = 360°+ 360°×2N A ，Γ A2 = 180°+ 360°×N A ，Γ B1 = 360°×2N B = 360°×N B ，NB =（Δn B /Δn A ）×（λ< λ B ）×（0.5 + N A ），其中Γ A1 表示波长λ A A2 表示第二波片3中的波长λ A 的相位差; Γ B1 表示第一波片2中的波长λ B 的相位差; Γ B2 表示第二波片3中的波长λ B 的相位差; 第一波片2的面内方位θ 1 为-21°，第二波片3的面内方位θ 2 为45°; Δn A 表示波长λ A的正常射线折射率No A 与异常光线折射率ne A ，并且其中Δn B 表示正常射线折射率No B 之间的差; 和波长λ B 的异常光线折射率ne B 。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2009122689A

公开(公告)日：2009-06-04

申请号：JP2009000451

申请日：2009-01-05

Applicant: Epson Toyocom Corp ,  エプソントヨコム株式会社

Inventor： OTO MASAYUKI

IPC: G02B5/30 ,  G02F1/1335 ,  G02F1/13363 ,  G03B21/00 ,  G03B21/14

Abstract: PROBLEM TO BE SOLVED: To provide a polarization converting element provided with a layered wavelength plate serving as a 1/2 wavelength plate at 400-700 nm wavelength, using a quartz substrate with excellent heat resistance and reliability. SOLUTION: This polarization converting element 12 includes: the 1/2 wavelength plate in a prescribed position of a prism array 3 with first and second optical thin films 2, 2 deposited on a slope of a prism. The 1/2 wavelength plate includes a first quartz wavelength plate 6 having 190 deg. phase difference Γ1 and 19 deg. optical axis azimuth θ1 in 420 nm wavelength, and a second quartz wavelength plate 7 having 200 deg. phase difference Γ2 and 64 deg. optical axis azimuth θ2 in 420 nm wavelength, which are laminated so as to cross crystalline optical axes 8, 9 at 45 deg. angle, and functions in 400-700 nm wavelength as a whole. A linear polarization 10 of a P polarization component incident into the 1/2 wavelength plate is output as a linear polarization 11 of an S polarization component in which a polarizing face for an incident light is rotated by 90 deg., while a phase is shifted by 180 deg on an exit surface. COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供一种具有400-700nm波长的1/2波片的分层波长板的偏振转换元件，使用具有优异的耐热性和可靠性的石英基片。 解决方案：该偏振转换元件12包括：在具有第一和第二光学薄膜2,2的棱镜阵列3的规定位置的1/2波长板，其沉积在棱镜的斜面上。 1/2波长板包括具有190度的第一石英波长板6。 相位差Γ1和19度 420nm波长的光轴方位角θ1和200度的第二石英波片7。 相位差Γ2和64度。 在420nm波长处的光轴方位角θ2，其被层压以在45度处交叉结晶光轴8,9。 角度，功能在整个400-700nm波长。 入射到1/2波长板中的P偏振分量的线性极化10被输出为S偏振分量的线性偏振11，其中入射光的偏振面旋转90度，而相位偏移 在出口表面上180度。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2009008878A

公开(公告)日：2009-01-15

申请号：JP2007170077

申请日：2007-06-28

Applicant: Epson Toyocom Corp ,  エプソントヨコム株式会社

Inventor： KOBAYASHI SHUHO ,  MATSUMOTO HIROSHI ,  OTO MASAYUKI

IPC: G02B5/30

Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a polarization converting element that is excellent in heat resistance and light resistance, easily handled and excellent in work efficiency.
SOLUTION: The polarization converting element 10 includes a retardation plate 3 which has a rectangular ring frame 3a and a grid comprising an aperture portion 3b and a retardation portion 3c thinner than the ring frame 3a surrounded by the ring frame 3a, the retardation plate 3 being formed by etching a planar quartz substrate having a 1/2 λ retardation function, and which is stuck to a light-exiting surface of a polarization separation element 2 with an adhesive 4 applied on the ring frame 3a, the polarization separation element 2 for separating incident light into two kinds of polarized light.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 解决的问题：提供一种耐热性和耐光性优异的极化转换元件的制造方法，易于处理，工作效率优异。 解决方案：偏振转换元件10包括具有矩形环形框架3a的延迟板3和包括开口部分3b和比由环形框架3a包围的环形框架3a更薄的延迟部分3c的网格，延迟 板3通过蚀刻具有1/2λ延迟函数的平面石英衬底形成，并且通过施加在环形框架3a上的粘合剂4粘附到偏振分离元件2的光出射表面，偏振分离元件 2用于将入射光分离成两种偏振光。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2008268244A

公开(公告)日：2008-11-06

申请号：JP2007106756

申请日：2007-04-16

Applicant: Epson Toyocom Corp ,  エプソントヨコム株式会社

Inventor： OTO MASAYUKI

IPC: G02F1/37

Abstract: PROBLEM TO BE SOLVED: To provide a wavelength conversion element having less influence of optical rotatory power of crystal and having enhanced wavelength conversion efficiency.
SOLUTION: Second harmonics 200 generated by a right crystal plate 1 and a right crystal plate 2 of each laminate 4 can be taken out by dichroic mirrors 5 and interference of the second harmonic 200 whose polarized surface is rotated by dextrorotatory properties of the crystal does not affect the second harmonic 200 generated by the other laminate 4 and laser light 100. Since principal surfaces of the right crystal plates 1 and 2 are joined by optical coupling, attenuation of the laser light 100 and the second harmonic 200 at a coupling interface can be suppressed. Thereby, the wavelength conversion element 10 having less influence of the optical rotatory power of the crystal and having enhanced wavelength conversion efficiency can be obtained.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供一种波长转换元件，其具有较小的晶体旋光度的影响并具有增强的波长转换效率。 解决方案：由分层镜4的右晶体板1和右晶体板2产生的二次谐波200可以被分色镜5取出，并且二极化表面被二极化表面旋转的二次谐波200的干涉 晶体不影响由另一层叠体4和激光100产生的二次谐波200.由于右晶体板1和2的主表面通过光耦合而接合，所以在耦合时激光100和二次谐波200的衰减 界面可以被抑制。 因此，可以获得具有较小的晶体的旋光度的影响并且具有增强的波长转换效率的波长转换元件10。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2008217954A

公开(公告)日：2008-09-18

申请号：JP2007058179

申请日：2007-03-08

Applicant: Epson Toyocom Corp ,  エプソントヨコム株式会社

Inventor： OTO MASAYUKI

IPC: G11B7/135 ,  G02B5/18 ,  G02B5/28 ,  G11B7/22

Abstract: PROBLEM TO BE SOLVED: To provide a diffraction grating which is adaptive to two wavelengths, requires less adjustment of refractive indexes of materials to be used therein and has low wavelength dependence of the diffraction efficiency, and an optical head device using the same. SOLUTION: The diffraction grating 10 having low wavelength dependence can be obtained by controlling a transmittance of a first wavelength λ1 by a first optical multilayer film 12 and controlling that of a second wavelength λ2 by a second optical multilayer film 15 to bring about more amplitude modulation type diffraction than phase modulation type diffraction. The number of layers of the first and second multilayer films 12 and 15 and film thicknesses of respective layers are determined in accordance with refractive indexes of low-refractive index materials and a high-refractive index materials to be used, so that transmittances of the first and second wavelengths can be determined. Furthermore, adjustment of refractive indexes of materials to be used can be reduced because of use of first and second transparent materials 11 and 13 having approximately the same refractive index as a glass substrate 1. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：为了提供适应于两个波长的衍射光栅，需要对其中使用的材料的折射率的较少调节，并且衍射效率具有低的波长依赖性，以及使用其的光学头装置 。 解决方案：具有低波长依赖性的衍射光栅10可以通过利用第一光学多层膜12控制第一波长λ1的透射率并通过第二光学多层膜15控制第二波长λ2的透射率来获得 更多的调幅型衍射比相位调制型衍射。 根据要使用的低折射率材料和高折射率材料的折射率来确定第一和第二多层膜12和15的层数和各层的膜厚度，使得第一和第二多层膜12和15的透射率 并且可以确定第二波长。 此外，由于使用具有与玻璃基板1大致相同的折射率的第一透明材料11和第二透明材料13，因此可以减少使用的材料的折射率的调节。（C）2008，JPO＆INPIT