公开(公告)号：US12027821B2

公开(公告)日：2024-07-02

申请号：US17852268

申请日：2022-06-28

Applicant: Excelitas Technologies Corp.

Inventor： James W Getz ,  Peter S. Whitney

IPC: H01S5/183 ,  B81B7/02 ,  H01S5/02 ,  H01S5/02345 ,  H01S5/026 ,  H01S5/04

CPC classification number: H01S5/18366 ,  B81B7/02 ,  H01S5/0215 ,  H01S5/02345 ,  H01S5/0261 ,  H01S5/041 ,  H01S5/18355 ,  H01S5/18369

Abstract: A MEMS tunable VCSEL includes a membrane device having a mirror and a distal-side electrostatic cavity for displacing the mirror to increase a size of an optical cavity. A VCSEL device includes an active region for amplifying light. Then, a proximal-side electrostatic cavity is defined between the VCSEL device and the membrane device is used to displace the mirror to decrease a size of an optical cavity.