公开(公告)号：WO1998013664A1

公开(公告)日：1998-04-02

申请号：PCT/US1997016960

申请日：1997-09-24

Applicant: FED CORPORATION

Inventor： FED CORPORATION ,  GHOSH, Amalkumar, P. ,  SCHWARTZ JONES, Susan, K. ,  JONES, Gary, W. ,  ZIMMERMAN, Steve, M. ,  LIU, Yachin

IPC: G01B09/02

CPC classification number: G03F7/70408 ,  G03F7/001

Abstract: An interferometric lithographic apparatus (10) includes an arrangement for applying interfering laser beams (11) to a part for producing a first interference pattern. The first interference pattern has a first fringe spacing. A mobile part holder stage (32, 44) is repositioned to change the interference pattern and produce a second fringe spacing (N).

Abstract translation: 干涉光刻设备（10）包括用于将干涉激光束（11）施加到用于产生第一干涉图案的部件的装置。 第一干涉图案具有第一边缘间隔。 重新定位移动部件保持台（32,44）以改变干涉图案并产生第二条纹间距（N）。

公开(公告)号：EP1038312A1

公开(公告)日：2000-09-27

申请号：EP98966131.9

申请日：1998-12-31

Applicant: FED CORPORATION

Inventor： ZIMMERMAN, Steven, M. ,  HOWARD, Webster, E. ,  LIU, Yachin ,  PRACHE, Olivier

IPC: H01L21/44 ,  H01L21/48 ,  H01L21/50

CPC classification number: H01L27/156 ,  H01L23/26 ,  H01L51/5243 ,  H01L51/5246 ,  H01L51/525 ,  H01L51/5253 ,  H01L51/5259 ,  H01L51/529 ,  H01L2224/16225 ,  H01L2224/73253 ,  H01L2924/09701 ,  H01L2924/12044

Abstract: A packaging assembly for compactly sealing a display chip device is disclosed. The packaging assembly includes at least a first cover member and a seal assembly for sealing the display chip device within an enclosure. A method of packaging a display chip device is also disclosed.