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公开(公告)号：WO2005065417A3
公开(公告)日：2005-07-21
申请号：PCT/US2004/044070
申请日：2004-12-17
Applicant: FEI COMPANY , LIU, Kun
Inventor： LIU, Kun
IPC: G01L21/30
Abstract: A cold cathode ion gauge is provided that is suitable for use in a high vacuum and in the presence of contaminating gases. By decreasing the discharge current and, more precisely, decreasing the charge current density received by the gauge electrodes, and using certain type of materials for the gauge electrodes, the mechanism by which insulating films are deposited on surface of the electrodes is attenuated and the life of the gauge is significantly prolonged. The gauge discharge current can be decreased by providing a large resistor in series with the anode, while the charge current density can be decreased by using an electrode with larger surface area, which can be achieved by fabricating grooves or fans on electrodes and by using low electron backscattering and low secondary emission materials, like carbon. Another concept of constant current mode is also proposed in this invention for extending the lifetime of CCIGs that are used for vacuum containing unfriendly gases.
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2.发明公开
公开(公告)号：EP4297060A3
公开(公告)日：2024-03-06
申请号：EP23180071.5
申请日：2023-06-19
Applicant: FEI Company
Inventor： LIU, Kun , RUE, Chad , BAHM, Alan Stephen
Abstract: Methods of producing microrods for electron emitters and associated microrods and electron emitters. In one example, a method of producing a microrod 560 for an electron emitter comprises providing a bulk crystal ingot, removing a first plate from the bulk crystal ingot, reducing a thickness of the first plate to produce a second plate 540, and milling the second plate to produce one or more microrods 560. In another example, a microrod 1060 for an electron emitter comprises a microrod tip region 1068 that comprises a nanoneedle 1080 that in turn comprises a nanorod 1082 and a nanoprotrusion tip 1090. The microrod and the nanoneedle are integrally formed from a bulk crystal ingot by sequentially: (i) removing the microrod from the bulk crystal ingot; (ii) coarse processing the microrod tip region to produce the nanorod; and (iii) fine processing the nanorod to produce the nanoprotrusion tip.
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公开(公告)号：EP1700093A2
公开(公告)日：2006-09-13
申请号：EP04816049.3
申请日：2004-12-17
Applicant: FEI COMPANY
Inventor： LIU, Kun
IPC: G01L21/30
Abstract: A cold cathode ion gauge is provided that is suitable for use in a high vacuum and in the presence of contaminating gases. By decreasing the discharge current and, more precisely, decreasing the charge current density received by the gauge electrodes, and using certain type of materials for the gauge electrodes, the mechanism by which insulating films are deposited on surface of the electrodes is attenuated and the life of the gauge is significantly prolonged. The gauge discharge current can be decreased by providing a large resistor in series with the anode, while the charge current density can be decreased by using an electrode with larger surface area, which can be achieved by fabricating grooves or fans on electrodes and by using low electron backscattering and low secondary emission materials, like carbon. Another concept of constant current mode is also proposed in this invention for extending the lifetime of CCIGs that are used for vacuum containing unfriendly gases.
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4.发明公开
公开(公告)号：EP4297060A2
公开(公告)日：2023-12-27
申请号：EP23180071.5
申请日：2023-06-19
Applicant: FEI Company
Inventor： LIU, Kun , RUE, Chad , BAHM, Alan Stephen
Abstract: Methods of producing microrods for electron emitters and associated microrods and electron emitters. In one example, a method of producing a microrod 560 for an electron emitter comprises providing a bulk crystal ingot, removing a first plate from the bulk crystal ingot, reducing a thickness of the first plate to produce a second plate 540, and milling the second plate to produce one or more microrods 560. In another example, a microrod 1060 for an electron emitter comprises a microrod tip region 1068 that comprises a nanoneedle 1080 that in turn comprises a nanorod 1082 and a nanoprotrusion tip 1090. The microrod and the nanoneedle are integrally formed from a bulk crystal ingot by sequentially: (i) removing the microrod from the bulk crystal ingot; (ii) coarse processing the microrod tip region to produce the nanorod; and (iii) fine processing the nanorod to produce the nanoprotrusion tip.
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