公开(公告)号：US12051521B2

公开(公告)日：2024-07-30

申请号：US17551175

申请日：2021-12-14

Applicant: FENG CHIA UNIVERSITY

Inventor： Jia-Lin Syu ,  Ying-Hung Chen ,  Ping-Yen Hsieh ,  Chu-Liang Ho

IPC: C23C14/08 ,  C23C14/20 ,  C23C14/35 ,  H01B1/02 ,  H01B1/08

CPC classification number: H01B1/08 ,  C23C14/08 ,  C23C14/20 ,  C23C14/352 ,  H01B1/02

Abstract: The invention discloses a flexible transparent conductive composite film and the manufacturing method thereof. The aforementioned flexible transparent conductive composite film is formed by depositing the first target material and the second target material in an alternating manner by HiPIMS. Therefore, the post-anneal step of the traditional method can be omitted, and the manufacturing efficiency of the flexible transparent conductive composite films is significantly improved.