公开(公告)号：US11969752B2

公开(公告)日：2024-04-30

申请号：US17555289

申请日：2021-12-17

Applicant: FENG CHIA UNIVERSITY

Inventor： Ping-Yen Hsieh ,  Xuan-Xuan Chang ,  Ying-Hung Chen ,  Chu-Liang Ho

IPC: B05D1/00 ,  C08G61/02 ,  H01J37/32

CPC classification number: B05D1/62 ,  C08G61/025 ,  H01J37/32027 ,  H01J37/32137 ,  H01J37/32449 ,  H01J37/32568 ,  B05D2201/02 ,  B05D2202/00 ,  B05D2518/00 ,  C08G2261/1412 ,  C08G2261/44

Abstract: The present invention discloses an organic polymer film and a manufacturing method thereof. The organic polymer film is mainly manufactured by the following steps. Firstly, the step (A) provides a xylene precursor and a substrate, and the step (B) places the substrate inside of a plasma equipment. After that, the step (C) evacuates the plasma equipment while introducing a carrier gas which carries vapor of the xylene precursor, and the step (D) turns on a pulse power supply system of the plasma equipment, generating a short pulse for plasma ignition. Finally, the step (E) forms the organic polymer film on the substrate. In the aforementioned steps, the frequency of the short pulse plasma is between 1 Hz˜10,000 Hz, and the pulse period of the short pulse plasma is between 1 μs˜60 μs.

公开(公告)号：US20240420951A1

公开(公告)日：2024-12-19

申请号：US18815625

申请日：2024-08-26

Applicant: FENG CHIA UNIVERSITY ,  DAH YOUNG VACUUM EQUIPMENT CO., LTD.

Inventor： Chang-Ho YU ,  Yao-Kuang Yang ,  Ping-Yen Hsieh ,  Ying-Hung Chen ,  Chu-Liang Ho

IPC: H01L21/02 ,  C23C14/34 ,  C23C14/54

Abstract: A part is adapted to be used in a semiconductor processing equipment. The part includes a substrate and a protective coating. The protective coating covers at least a part of the substrate, is made of silicon carbide, and has an atomic ratio of carbon in the protective coating increases in a direction away from the substrate while an atomic ratio of silicon in the protective coating decreases in the direction. The atomic ratio of silicon in the protective coating is larger than that of the carbon near the substrate, and the atomic ratio of silicon in the protective coating is smaller than that of carbon near the outer surface of the protective coating. A method for making the part is also provided.

公开(公告)号：US12069792B2

公开(公告)日：2024-08-20

申请号：US17123084

申请日：2020-12-15

Applicant: Feng Chia University

Inventor： Guan-Heng Lyu ,  Ying-Hung Chen ,  Ping-Yen Hsieh ,  Tsung-Han Chen ,  Chu-Liang Ho

IPC: H05H1/24 ,  A61L2/14

CPC classification number: H05H1/2406 ,  A61L2/14 ,  H05H1/2431

Abstract: The present invention discloses that a plasma aerosol device includes a gas tunnel, a dielectric barrier discharge module, and a liquid tunnel. The invention uses a mechanism similar to a dielectric barrier discharge (DBD) electrode system, thus to enable generating a plasma active water mist which riches in free radicals such as reactive nitrogen species (RNS) and reactive oxygen species (ROS). Therefore, this invention is able to be used in medical, sterilization, agriculture and preservation industries.

公开(公告)号：US12051521B2

公开(公告)日：2024-07-30

申请号：US17551175

申请日：2021-12-14

Applicant: FENG CHIA UNIVERSITY

Inventor： Jia-Lin Syu ,  Ying-Hung Chen ,  Ping-Yen Hsieh ,  Chu-Liang Ho

IPC: C23C14/08 ,  C23C14/20 ,  C23C14/35 ,  H01B1/02 ,  H01B1/08

CPC classification number: H01B1/08 ,  C23C14/08 ,  C23C14/20 ,  C23C14/352 ,  H01B1/02

Abstract: The invention discloses a flexible transparent conductive composite film and the manufacturing method thereof. The aforementioned flexible transparent conductive composite film is formed by depositing the first target material and the second target material in an alternating manner by HiPIMS. Therefore, the post-anneal step of the traditional method can be omitted, and the manufacturing efficiency of the flexible transparent conductive composite films is significantly improved.