公开(公告)号：DE60205097T2

公开(公告)日：2006-05-24

申请号：DE60205097

申请日：2002-03-06

Applicant: FIBERCORE INC

Inventor： GOUSKOV I ,  DANILOV B ,  ASLAMI A ,  WU DAU

IPC: C03B37/014 ,  C03B37/018 ,  C03B37/027

Abstract: A plurality of glass deposition targets are rotated simultaneously and a first plasma torch, having a coil diameter larger than the sum of the target diameters, deposits glass simultaneously on the plurality. After the diameter of the targets reaches a threshold a second plasma torch is used. The diameter of the second plasma torch can provide for simultaneous deposition. In a further embodiment, after the target diameter reaches a second threshold a third plasma torch is used. In a further embodiment the spacing between the axes of rotation of the targets is widened as the target diameter increases. In a still further embodiment a single plasma torch includes movable concentric tubes within its coil to selectively operate as any of a plurality of different diameter plasma torches.

公开(公告)号：DE60205097D1

公开(公告)日：2005-08-25

申请号：DE60205097

申请日：2002-03-06

Applicant: FIBERCORE INC

Inventor： GOUSKOV I ,  DANILOV B ,  ASLAMI A ,  WU DAU

IPC: C03B37/018 ,  C03B37/014 ,  C03B37/027

Abstract: A plurality of glass deposition targets are rotated simultaneously and a first plasma torch, having a coil diameter larger than the sum of the target diameters, deposits glass simultaneously on the plurality. After the diameter of the targets reaches a threshold a second plasma torch is used. The diameter of the second plasma torch can provide for simultaneous deposition. In a further embodiment, after the target diameter reaches a second threshold a third plasma torch is used. In a further embodiment the spacing between the axes of rotation of the targets is widened as the target diameter increases. In a still further embodiment a single plasma torch includes movable concentric tubes within its coil to selectively operate as any of a plurality of different diameter plasma torches.