9.
    发明专利
    未知

    公开(公告)号:DE60205097T2

    公开(公告)日:2006-05-24

    申请号:DE60205097

    申请日:2002-03-06

    Applicant: FIBERCORE INC

    Abstract: A plurality of glass deposition targets are rotated simultaneously and a first plasma torch, having a coil diameter larger than the sum of the target diameters, deposits glass simultaneously on the plurality. After the diameter of the targets reaches a threshold a second plasma torch is used. The diameter of the second plasma torch can provide for simultaneous deposition. In a further embodiment, after the target diameter reaches a second threshold a third plasma torch is used. In a further embodiment the spacing between the axes of rotation of the targets is widened as the target diameter increases. In a still further embodiment a single plasma torch includes movable concentric tubes within its coil to selectively operate as any of a plurality of different diameter plasma torches.

    Multiple torch-multiple target method and apparatus for plasma outside chemical vapor deposition.

    公开(公告)号:ZA200307511B

    公开(公告)日:2005-11-17

    申请号:ZA200307511

    申请日:2002-03-06

    Applicant: FIBERCORE INC

    Abstract: A plurality of glass deposition targets are rotated simultaneously and a first plasma torch, having a coil diameter larger than the sum of the target diameters, deposits glass simultaneously on the plurality. After the diameter of the targets reaches a threshold a second plasma torch is used. The diameter of the second plasma torch can provide for simultaneous deposition. In a further embodiment, after the target diameter reaches a second threshold a third plasma torch is used. In a further embodiment the spacing between the axes of rotation of the targets is widened as the target diameter increases. In a still further embodiment a single plasma torch includes movable concentric tubes within its coil to selectively operate as any of a plurality of different diameter plasma torches.

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