公开(公告)号：US20130249398A1

公开(公告)日：2013-09-26

申请号：US13847523

申请日：2013-03-20

Applicant: FORSCHUNGSVERBUND BERLIN E.V.

Inventor： Silvio Kühn

IPC: H05H1/46

CPC classification number: H05H1/46 ,  H05H2001/4682

Abstract: A device (200) for generating a plasma that comprises a plasma source (241) designed as a hollow space and a resonator (201) that includes a waveguide (211, 212, 2131) and the plasma source (241), wherein the waveguide (212, 213) is operatively connected with the plasma source (241); the device further comprising a first coupling means (231) for energy introduction (251) and a second coupling means (232) for energy extraction (252), wherein each coupling means (231, 232) is in an energy- and signal-carrying (251, 252) operative connection with the waveguide; the device further comprising an active element (261) for energy supply to the resonator (201), operatively connected with the first (231) and the second (232) coupling means, wherein the plasma source (241) is at least partially integrated into a section of the waveguide (211, 212, 213) that extends between the first coupling means (231) and the second coupling means (232).

Abstract translation: 一种用于产生包括设计为中空空间的等离子体源（241）和包括波导（211,212,2131）和等离子体源（241）的谐振器（201）的等离子体的装置（200），其中所述波导 （212,213）与等离子体源（241）可操作地连接; 所述装置还包括用于能量引入的第一耦合装置（231）和用于能量提取的第二耦合装置（232），其中每个耦合装置（231,232）处于能量和信号载体 （251,252）与所述波导的操作连接; 该装置还包括用于向谐振器（201）供能的有源元件（261），其与第一（231）和第二（232）耦合装置可操作地连接，其中等离子体源（241）至少部分地集成到 在第一耦合装置（231）和第二耦合装置（232）之间延伸的波导部分（211,212,213）。