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公开(公告)号：WO2021044031A1
公开(公告)日：2021-03-11
申请号：PCT/EP2020/074865
申请日：2020-09-04
Applicant: FREC'N'SYS , SOITEC
Inventor： BALLANDRAS, Sylvain , COURJON, Emilie , BERNARD, Florent , LAROCHE, Thierry , GARCIA, Julien
Abstract: The present invention relates to an acoustic wave sensor device, comprising an interdigitated transducer; a first reflection structure arranged on one side of the interdigitated transducer; a second reflection structure arranged on another side of the interdigitated transducer; a first resonance cavity comprising a first upper surface and formed between the interdigitated transducer and the first reflection structure; a second resonance cavity comprising a second upper surface and formed between the interdigitated transducer and the second reflection structure; and wherein the second upper surface comprises a physical and/or chemical modification as compared to the first upper surface.
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公开(公告)号：WO2020200822A1
公开(公告)日：2020-10-08
申请号：PCT/EP2020/057666
申请日：2020-03-19
Applicant: FREC'N'SYS
Inventor： BALLANDRAS, Sylvain , LAROCHE, Thierry , GARCIA, Julien
Abstract: The present invention relates to a method of interrogating an acoustic wave sensor, compris- ing transmitting, by an interrogator, an interrogation radiofrequency signal to the acoustic wave sensor by means of a transmission antenna, receiving, by the interrogator, a response radiofrequency signal from the acoustic wave sensor by means of a reception antenna, and processing by a processing means of the interrogator the received response radiofrequency signal to obtain in-phase and quadrature components both in the time domain and the fre- quency domain, determining by the processing means perturbations of the obtained in-phase and quadrature components both in the time domain and the frequency domain and deter- mining by the processing means a value of a measurand based on the detected perturba- tions.
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公开(公告)号：WO2020200810A1
公开(公告)日：2020-10-08
申请号：PCT/EP2020/057616
申请日：2020-03-19
Applicant: FREC'N'SYS
Inventor： BALLANDRAS, Sylvain , COURJON, Emilie , BERNARD, Florent , RAVESKI, Alexandre
IPC: G01L1/16
Abstract: The invention relates to a resonator device for measuring stress comprising at least two resonators, each resonator comprising an inter-digitated transducer structure arranged between two reflecting structures on or in a piezoelectric substrate, characterized in that the at least two resonators are arranged and positioned such that they have two different wave propagation directions, and each resonator comprises at least two parts with the area between the two parts of the at least two resonators forming a cavity, wherein the cavity is shared by the at least two resonators. The invention also relates to a differential sensing device comprising at least one resonator device as described previously.
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公开(公告)号：WO2020200809A1
公开(公告)日：2020-10-08
申请号：PCT/EP2020/057612
申请日：2020-03-19
Applicant: FREC'N'SYS
Inventor： BALLANDRAS, Sylvain , GARCIA, Julien
Abstract: The present invention relates to an interrogation device (20) for interrogating an acoustic wave sensor (10), comprising a transmission antenna (21) configured for transmitting an interrogation radiofrequency signal to the acoustic wave sensor; a reception antenna (22) configured for receiving a response radiofrequency signal from the acoustic wave sensor; and a processing means (24) configured for determining the in-phase components I and the quadrature components Q of the received response radiofrequency signal in each of N consecutive frames of the response radiofrequency signal, N being an integer larger than 1, wherein each of the N frames comprises X sampling points; determining the moduli IYI of each of the pairs of the determined in-phase components I and the quadrature components Q; determining a first norm M based on the determined moduli IYI; determining a first weighting function W based on the determined first norm M and the determined moduli IYI; determining the in-phase components I and the quadrature components Q of an N+1th frame of the received response radiofrequency signal, the N+1th frame comprising X sampling points of the received response radiofrequency signal; determining the moduli JYJ of each of the pairs of the determined in-phase components I and the quadrature components Q of the N+1th frame; and applying the first weighting function W to the determined moduli JYJ of the received response radiofrequency signal in the N+1th frame to obtain weighted moduli Y w of the received response radiofrequency signal for the N+1th frame.
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公开(公告)号：WO2019185363A1
公开(公告)日：2019-10-03
申请号：PCT/EP2019/056436
申请日：2019-03-14
Applicant: FREC'N'SYS
Inventor： BALLANDRAS, Sylvain , LAROCHE, Thierry
Abstract: The invention relates to a surface acoustic wave device comprising a base substrate (206, 606), a piezoelectric layer (204, 304, 610) and an electrode layer (208, 608) in between the piezoelectric layer (204, 304, 610) and the base substrate (206, 606), a comb electrode (210, 612) formed on the piezoelectric layer (204, 304, 610) comprising a plurality of electrode means (212, 614) with a pitch p, defined asp=A ,with A being the wavelength of the standing acoustic wave generated by applying opposite potentials to said electrode layer (208, 608) and comb electrode (210, 612), wherein said piezoelectric layer (204, 304, 610) comprises at least one region (216, 616) located in between the electrode means (212, 614), in which at least one physical parameter is different compared to the region (218, 624) underneath the electrode means (212, 614). The invention relates also to a method of fabrication for such surface acoustic wave device. The physical parameter may be thickness, elasticity, doping concentration of Ti or number or protons obtained by proton exchange.
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Patent Agency Ranking
公开(公告)号：WO2021053401A2
公开(公告)日：2021-03-25
申请号：PCT/IB2020/000784
申请日：2020-09-18
Applicant: FREC'N'SYS
Inventor： BALLANDRAS, Sylvain , COURJON, Emilie , BERNARD, Florent
Abstract: The invention relates to a transducer structure (100) for a surface acoustic device comprising a composite substrate comprising a piezoelectric layer (104), a pair of interdigitated comb electrodes (108, 110), comprising a plurality of electrode means (112_1, 112_2, 112_3, 112_4, 114_1, 114_2, 114_3, 114_4) with a pitch p satisfying the Bragg condition, wherein the inter-digitated comb electrodes (108, 110) are embedded in the piezoelectric layer (104) such that, in use, the excitation of a wave propagating mode in the volume of the electrode means is taking place and is the predominant propagating mode of the structure. The invention relates also to an acoustic wave device comprising at least one transducer structure as described above and to a method for fabricating said transducer structure. The invention relates also to the use of the frequency of the bulk wave propagating in the electrode means of said transducer structure in an acoustic wave device to generate contribution at high frequency, in particular above 3 GHz.
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公开(公告)号：WO2021044035A1
公开(公告)日：2021-03-11
申请号：PCT/EP2020/074871
申请日：2020-09-04
Applicant: FREC'N'SYS , SOITEC
Inventor： BALLANDRAS, Sylvain , COURJON, Emilie , BERNARD, Florent , LAROCHE, Thierry , GARCIA, Julien
Abstract: The present invention relates to an acoustic wave pressure sensor device configured to measure a pressure, comprising a substrate configured to bend when the pressure is applied to the substrate such that an area of a first kind of strain and an area of a second kind of strain are formed in the substrate; an interdigitated transducer formed over the substrate; a first Bragg mirror formed over the substrate and arranged on one side of the interdigitated transducer; a second Bragg mirror formed over the substrate and arranged on another side of the interdigitated transducer; a first resonance cavity formed between the interdigitated transducer and the first Bragg mirror; a second resonance cavity formed between the interdigitated transducer and the second Bragg mirror; and wherein the first resonance cavity is formed over the area of the first kind of strain and the second resonance cavity is formed over the area of the second kind of strain.
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公开(公告)号：WO2020021029A3
公开(公告)日：2020-01-30
申请号：PCT/EP2019/070082
申请日：2019-07-25
Applicant: FREC'N'SYS
Inventor： BALLANDRAS, Sylvain , LAROCHE, Thierry
Abstract: The invention relates to a coupled cavity filter structure, using a surface acoustic wave, in particular a guided surface acoustic wave, comprising an acoustic wave propagating substrate (102), at least one input transducer structure (112) and one output transducer structure (114), provided over the substrate (102), each comprising inter-digitated comb electrodes (124, 126), one reflecting structure (116), said reflecting structure (116) comprising at least one or more metallic strips (114), positioned at a distance and in between the input and output transducer structures (112, 114), in the direction of propagation of an acoustic wave, characterised in that the acoustic wave propagation substrate (102) is a composite substrate comprising a base substrate (106) and a piezoelectric layer (104).The invention relates also to a coupled cavity filter structure wherein the one reflecting structure (816) comprises a groove(822). The invention relates also to a SAW ladder filter device comprising at least two coupled cavity filter structures as described previously,wherein the at least two coupled cavity filter structures are positioned on a single line.
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公开(公告)号：WO2022069573A2
公开(公告)日：2022-04-07
申请号：PCT/EP2021/076840
申请日：2021-09-29
Applicant: FREC'N'SYS
Inventor： BALLANDRAS, Sylvain , COURJON, Emilie , BERNARD, Florent , LAROCHE, Thierry , GARCIA, Julien , CLAIRET, Alexandre
IPC: H03H9/02 , H03H9/145 , H03H9/02559 , H03H9/02566 , H03H9/02574 , H03H9/0259 , H03H9/02637 , H03H9/02653 , H03H9/14538 , H03H9/14541
Abstract: The invention relates to a surface acoustic wave (SAW) device comprising an interdigitated transducer structure (102, 252) and at least one acoustic wave reflective structure (104, 106, 254, 256) provided on or in an acoustic wave propagating substrate (114, 114') characterized in that the interdigitated transducer structure (102) comprises a first material and the at least one acoustic wave reflective structure (104, 106) comprises a second material different from the first material and/or the acoustic wave reflective structure (104, 106) and the interdigitated transducer structure (102) have different geometrical parameters. The invention relates further to a sensor comprising a SAW device as described previously and to a method for manufacturing a SAW device comprising at least one acoustic wave reflective structure.
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公开(公告)号：WO2020021029A4
公开(公告)日：2020-01-30
申请号：PCT/EP2019/070082
申请日：2019-07-25
Applicant: FREC'N'SYS
Inventor： BALLANDRAS, Sylvain , LAROCHE, Thierry
Abstract: The invention relates to a coupled cavity filter structure, using a surface acoustic wave, in particular a guided surface acoustic wave, comprising an acoustic wave propagating substrate (102), at least one input transducer structure (112) and one output transducer structure (114), provided over the substrate (102), each comprising inter-digitated comb electrodes (124, 126), one reflecting structure (116), said reflecting structure (116) comprising at least one or more metallic strips (114), positioned at a distance and in between the input and output transducer structures (112, 114), in the direction of propagation of an acoustic wave, characterised in that the acoustic wave propagation substrate (102) is a composite substrate comprising a base substrate (106) and a piezoelectric layer (104).The invention relates also to a coupled cavity filter structure wherein the one reflecting structure (816) comprises a groove(822). The invention relates also to a SAW ladder filter device comprising at least two coupled cavity filter structures as described previously,wherein the at least two coupled cavity filter structures are positioned on a single line.
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