公开(公告)号：WO2015088708A3

公开(公告)日：2015-10-08

申请号：PCT/US2014065964

申请日：2014-11-17

Applicant: FUJIFILM DIMATIX INC

Inventor： LATEV DIMITRE ,  HAJATI ARMAN ,  IMAI DARREN TODD ,  TRAN UT

IPC: B06B1/06

CPC classification number: H01L41/042 ,  B06B1/0622 ,  B32B37/12 ,  B32B37/185 ,  B32B2457/00 ,  H01L41/0475 ,  H01L41/098 ,  H01L41/29 ,  Y10T156/10

Abstract: Techniques and structures for providing flexibility of a micromachined transducer array. In an embodiment, a transducer array includes a plurality of transducer elements each comprising a piezoelectric element and one or more electrodes disposed in or on a support layer. The support layer is bonded to a flexible layer including a polymer material, wherein flexibility of the transducer array results in part from a total thickness of a flexible layer. In another embodiment, flexibility of the transducer array results in part from one or more flexural structures formed therein.

Abstract translation: 提供微加工换能器阵列灵活性的技术和结构。 在一个实施例中，换能器阵列包括多个换能器元件，每个换能器元件包括设置在支撑层中或上的压电元件和一个或多个电极。 支撑层结合到包括聚合物材料的柔性层，其中换能器阵列的柔性部分地导致柔性层的总厚度。 在另一个实施例中，换能器阵列的灵活性部分地由其中形成的一个或多个挠曲结构引起。

公开(公告)号：WO2013165706A3

公开(公告)日：2014-03-20

申请号：PCT/US2013037382

申请日：2013-04-19

Applicant: FUJIFILM DIMATIX INC

Inventor： HAJATI ARMAN

IPC: B06B1/06

CPC classification number: H01L41/0475 ,  B06B1/0622 ,  B06B1/0629 ,  G01S7/521 ,  G10K11/346 ,  H01L41/047 ,  H01L41/0825 ,  H01L41/098 ,  H04R17/00 ,  H04R2201/401 ,  H04R2201/403

Abstract: Piezoelectric micromachined ultrasonic transducer (pMUT) arrays and techniques for frequency shaping in pMUT arrays are described, for example to achieve both high frequency and low frequency operation in a same device. The ability to operate at both high and low frequencies may be tuned during use of the device to adaptively adjust for optimal resolution at a particular penetration depth of interest. Various sizes of piezoelectric membranes are fabricated for tuning resonance frequency across the membranes. Signal processing of the drive and/or response signals generated and/or received from each of the two or more electrode rails may achieve a variety of operative modes, such as a near field mode, a far field mode, or ultra wide bandwidth mode.

Abstract translation: 例如，在同一设备中实现高频和低频操作的压电微机械超声换能器（pMUT）阵列和pMUT阵列中的频率整形技术。 在使用设备期间可以调节在高频和低频两种操作的能力，以适应性地调整在感兴趣的特定穿透深度处的最佳分辨率。 制造各种尺寸的压电膜用于调谐跨膜的共振频率。 从两个或更多个电极轨道中的每一个产生和/或接收的驱动和/或响应信号的信号处理可以实现各种操作模式，例如近场模式，远场模式或超宽带宽模式。

公开(公告)号：WO2013165709A3

公开(公告)日：2014-05-15

申请号：PCT/US2013037419

申请日：2013-04-19

Applicant: FUJIFILM DIMATIX INC

Inventor： HAJATI ARMAN ,  OTTOSSON MATS

IPC: B06B1/06

CPC classification number: B06B1/0629

Abstract: Piezoelectric micromachined ultrasonic transducer (pMUT) arrays and systems comprising pMUT arrays are described. Coupling strength within a population of transducer elements provides degenerate mode shapes that split for wide bandwidth total response while less coupling strength between adjacent element populations provides adequately low crosstalk between the element populations. In an embodiment, differing membrane sizes within a population of transducer elements provides differing frequency response for wide bandwidth total response while layout of the differing membrane sizes between adjacent element populations provides adequately low crosstalk between the element populations. In an embodiment, elliptical piezoelectric membranes provide multiple resonant modes for wide bandwidth total response and high efficiency.

Abstract translation: 描述了压电微加工超声换能器（pMUT）阵列和包括pMUT阵列的系统。 传感器元件群内的耦合强度提供了简化模式形状，可以分割宽带宽总响应，而相邻元素群之间较少的耦合强度可提供元素群体之间的足够低的串扰。 在一个实施例中，在换能器元件群内的不同膜尺寸为宽带宽总响应提供不同的频率响应，而相邻元件群之间的不同膜尺寸的布局在元件群之间提供足够低的串扰。 在一个实施例中，椭圆形压电膜为宽带宽总响应和高效率提供多个谐振模式。

公开(公告)号：WO2013165705A3

公开(公告)日：2014-03-13

申请号：PCT/US2013037379

申请日：2013-04-19

Applicant: FUJIFILM DIMATIX INC

Inventor： HAJATI ARMAN

IPC: B06B1/06 ,  H01L41/08

CPC classification number: G10K11/343 ,  B06B1/0622 ,  B06B1/0629 ,  B06B1/0696 ,  G01N29/2406 ,  H01L41/047 ,  H01L41/0475 ,  H01L41/098

Abstract: Wide bandwidth piezoelectric micromachined ultrasonic transducers (pMUTs), pMUT arrays and systems having wide bandwidth pMUT arrays are described herein. For example, a piezoelectric micromachined ultrasonic transducer (pMUT) includes a piezoelectric membrane disposed on a substrate. A reference electrode is coupled to the membrane. First and second drive/sense electrodes are coupled to the membrane to drive or sense a first and second mode of vibration in the membrane.

Abstract translation: 本文描述了宽带压电微机械超声换能器（pMUT），pMUT阵列和具有宽带宽pMUT阵列的系统。 例如，压电微加工超声波换能器（pMUT）包括设置在基板上的压电膜。 参考电极耦合到膜。 第一和第二驱动/感测电极耦合到膜以驱动或感测膜中的第一和第二振动模式。

公开(公告)号：EP3092083A4

公开(公告)日：2017-11-29

申请号：EP14878344

申请日：2014-09-09

Applicant: FUJIFILM DIMATIX INC

Inventor： HAJATI ARMAN ,  TRAN UT ,  IMAI DARREN TODD ,  SCHOEPPLER MARTIN

IPC: B06B1/06

CPC classification number: B06B1/0622 ,  B06B1/0688 ,  H01L41/098 ,  H01L41/313 ,  H01L41/331 ,  Y10T29/42

Abstract: Techniques and mechanisms to provide mechanical support for a micromachined piezoelectric transducer array. In an embodiment, a transducer array includes transducer elements each comprising a respective membrane portion and a respective supporting structure disposed on or around a periphery of that membrane portion. The transducer elements are initially formed on a sacrificial wafer, wherein supporting structures of the transducer elements facilitate subsequent removal of the sacrificial wafer and/or subsequent handling of the transducer elements. In another embodiment, a polymer layer is disposed on the transducer elements to provide for flexible support during such subsequent handling.

公开(公告)号：EP2946416A4

公开(公告)日：2016-11-02

申请号：EP14749312

申请日：2014-01-30

Applicant: FUJIFILM DIMATIX INC

Inventor： HAJATI ARMAN ,  LATEV DIMITRE ,  GARDNER DEANE ,  LAW HUNG-FAI STEPHEN

IPC: H01L41/113 ,  B06B1/02 ,  B06B1/06

CPC classification number: B25J15/12 ,  B06B1/0292 ,  B06B1/0622 ,  B25J9/104 ,  B25J15/0009 ,  H01L27/20 ,  H01L41/098 ,  Y10S901/29

公开(公告)号：EP2912858A4

公开(公告)日：2016-06-29

申请号：EP13848357

申请日：2013-10-03

Applicant: FUJIFILM DIMATIX INC

Inventor： HAJATI ARMAN

IPC: B06B1/06 ,  B06B1/02

CPC classification number: B06B1/0276 ,  A61B18/082 ,  B06B1/0622 ,  B06B1/0629 ,  H01L41/042 ,  H01L41/0825 ,  H01L41/331

公开(公告)号：EP3148714A4

公开(公告)日：2018-01-17

申请号：EP15800527

申请日：2015-05-27

Applicant: FUJIFILM DIMATIX INC

Inventor： HAJATI ARMAN

IPC: B06B1/06 ,  G01N29/22 ,  G10K11/30

CPC classification number: B06B1/0622 ,  B06B1/0633 ,  G01D5/12 ,  G01N29/221 ,  G01N29/34 ,  G01N2291/101 ,  G01N2291/106 ,  G10K11/30

Abstract: In an embodiment, a probe device includes a portion having a curved surface and a plurality of tiles variously coupled to the curved surface. The tiles each include a plurality of piezoelectric transducer elements and a base adjoining and supporting the plurality of piezoelectric transducer elements. The probe device further comprises curved lens portions each coupled to a respective one of the plurality of tiles, wherein for each of the tiles, the plurality of piezoelectric transducer elements of the tile are to propagate a wave toward the respective curved lens portion. In another embodiment, the probe device further comprises a sheath material surrounding the curved lens portions.

公开(公告)号：EP3079838A4

公开(公告)日：2017-08-16

申请号：EP14868892

申请日：2014-11-17

Applicant: FUJIFILM DIMATIX INC

Inventor： LATEV DIMITRE ,  HAJATI ARMAN ,  IMAI DARREN TODD ,  TRAN UT

IPC: B06B1/06

CPC classification number: H01L41/042 ,  B06B1/0622 ,  B32B37/12 ,  B32B37/185 ,  B32B2457/00 ,  H01L41/0475 ,  H01L41/098 ,  H01L41/29 ,  Y10T156/10

Abstract: Techniques and structures for providing flexibility of a micromachined transducer array. In an embodiment, a transducer array includes a plurality of transducer elements each comprising a piezoelectric element and one or more electrodes disposed in or on a support layer. The support layer is bonded to a flexible layer including a polymer material, wherein flexibility of the transducer array results in part from a total thickness of a flexible layer. In another embodiment, flexibility of the transducer array results in part from one or more flexural structures formed therein.

Abstract translation: 提供微加工换能器阵列灵活性的技术和结构。 在一个实施例中，换能器阵列包括多个换能器元件，每个换能器元件包括设置在支撑层中或上的压电元件和一个或多个电极。 支撑层结合到包括聚合物材料的柔性层，其中换能器阵列的柔性部分地导致柔性层的总厚度。 在另一个实施例中，换能器阵列的灵活性部分地由其中形成的一个或多个挠曲结构引起。

公开(公告)号：EP3148715A4

公开(公告)日：2018-01-24

申请号：EP15800113

申请日：2015-05-27

Applicant: FUJIFILM DIMATIX INC

Inventor： HAJATI ARMAN

IPC: B06B1/06 ,  A61B8/12 ,  B06B1/02 ,  G01N29/26 ,  G01N29/34 ,  G01S7/52 ,  G01S15/89 ,  G10K11/34

CPC classification number: G01D5/12 ,  A61B8/12 ,  B06B1/0207 ,  B06B1/06 ,  B06B1/0622 ,  B06B2201/55 ,  G01N29/262 ,  G01N29/34 ,  G01N29/348 ,  G01S7/5208 ,  G01S15/8915 ,  G01S15/8925 ,  G01S15/8927 ,  G01S15/8929 ,  G10K11/346

Abstract: In an embodiment, a transducer device comprises a flexible substrate and a plurality of tiles coupled to the substrate. The tiles each include a plurality of piezoelectric transducer elements and a base adjoining and supporting the plurality of piezoelectric transducer elements. The substrate has disposed therein or thereon signal lines to serve as a backplane for communication to, from and/or among integrated circuitry of the tiles. In another embodiment, the integrated circuitry of the tiles are each pre-programmed to implement any of a respective plurality of operational modes. Signals exchanged with the tiles via the flexible substrate facilitate operation of the transducer device to provide a phased array of transducer elements.