公开(公告)号：US20140231390A1

公开(公告)日：2014-08-21

申请号：US14266268

申请日：2014-04-30

Applicant: FUJIKURA LTD.

Inventor： Osamu NUKAGA ,  Satoshi YAMAMOTO ,  Hiroyuki WAKIOKA

IPC: B44C1/22

CPC classification number: B44C1/228 ,  B23K26/53 ,  C03C15/00 ,  C03C23/0025

Abstract: A method of manufacturing a substrate including a micro hole, includes: setting a scanning rate (μm/sec) of pulsed laser light to 1×103 to 4000×103 μm/sec; adjusting a repetition rate (Hz) of the laser light so that a pulse pitch (μm) represented by the following Formula (1) is 0.08 to 0.8 μm; scanning the inside of the substrate with the focal point into which the laser light is collected, thereby forming a modified region having a lowered resistance to etching, at a region through which the focal point passed or at an adjacent region thereof; and forming a micro hole in the substrate by removing the modified region by an etching treatment. pulse pitch (μm)={the scanning rate (μm/sec) of the laser light}/{the repetition rate (Hz) of the laser light}  Formula (1)

Abstract translation: 制造包括微孔的基板的方法包括：将脉冲激光的扫描速度（μm/ sec）设定为1×103〜4000×103μm/ sec; 调整激光的重复率（Hz），使得由下式（1）表示的脉冲间距（μm）为0.08〜0.8μm; 用收集激光的焦点扫描基板的内部，从而在焦点通过的区域或其相邻区域形成具有降低的耐蚀刻性的改性区域; 以及通过蚀刻处理去除改质区域而在基板中形成微孔。 脉冲间距（μm）= {激光的扫描速度（μm/ sec）} / {激光的重复频率（Hz）}式（1）

公开(公告)号：US20140233348A1

公开(公告)日：2014-08-21

申请号：US14261095

申请日：2014-04-24

Applicant: FUJIKURA LTD.

Inventor： Satoshi YAMAMOTO ,  Hiroyuki WAKIOKA ,  Osamu NUKAGA ,  Tatsuya SHIOIRI

IPC: B01F13/00

CPC classification number: B01F13/0064 ,  B01F13/0066 ,  B01F15/00928 ,  B01J19/00

Abstract: A fluid control device for mixing liquids, includes at least: a monolithic base body; and a plurality of micro holes disposed in the base body. Also, the micro holes in a flow channel group α that configures a specific group have opening portions in a region A and a region B on surfaces being outer surfaces of the base body, the micro holes in a flow channel group β (n) that configures the other specific group have opening portions in the region A and a region C (n) on the surfaces being outer surfaces of the base body, and in the base body, the micro holes are disposed apart from the micro holes belonging to the different flow channel group throughout entire lengths. Here, the n refers to a natural number.

Abstract translation: 用于混合液体的流体控制装置至少包括：整体式基体; 以及设置在基体中的多个微孔。 此外，构成特定组的流路组α中的微孔在区域A中具有开口部，表面上的区域B在基体的外表面，流路组中的微孔＆bgr; （n），其构成另一特定组在区域A中具有开口部分，在表面上的区域C（n）是基体的外表面，并且在基体中，微孔与微孔隔开 属于不同流道组，整个长度。 在这里，n指自然数。

公开(公告)号：US20130029093A1

公开(公告)日：2013-01-31

申请号：US13645102

申请日：2012-10-04

Applicant: Fujikura Ltd.

Inventor： Hiroyuki WAKIOKA

IPC: B29C59/16 ,  B32B3/24 ,  B44C1/22

CPC classification number: H01L21/4803 ,  B23K26/0006 ,  B23K26/0624 ,  B23K26/361 ,  B23K2103/56 ,  H01L21/4846 ,  H01L23/473 ,  H01L2924/0002 ,  H05K3/002 ,  H05K2203/107 ,  Y10T428/24273 ,  H01L2924/00

Abstract: A method of forming a microstructure includes a Step (A) of forming a modified region in a substrate by irradiating a laser beam having a pulse duration on the order of picoseconds or shorter on a region where a pore-like microstructure is to be provided, and scanning a focal point at which the laser beam is converged; and a Step (B) of forming a microstructure by performing an etching process on the substrate in which the modified region has been formed, and removing the modified region, where a linear polarized laser beam is used as the laser beam in the Step (A), and the laser beam is irradiated so that an orientation of a linear polarization has a certain direction with respect to a direction of scanning the focal point.

Abstract translation: 形成微观结构的方法包括：通过在要设置孔状微结构的区域上照射脉冲持续时间大约为皮秒或更短的激光的方式在衬底中形成修饰区域的步骤（A） 并扫描激光束会聚的焦点; 以及通过在其中形成有改质区域的基板上进行蚀刻处理而形成微结构的工序（B），并且在步骤（A）中除去使用线偏振激光束作为激光束的改质区域 ），并且激光束被照射，使得线偏振的取向相对于扫描焦点的方向具有一定的方向。

公开(公告)号：US20130335936A1

公开(公告)日：2013-12-19

申请号：US13968886

申请日：2013-08-16

Applicant: FUJIKURA LTD.

Inventor： Satoshi YAMAMOTO ,  Hiroyuki WAKIOKA

IPC: H05K1/11 ,  H05K7/00

CPC classification number: H05K1/115 ,  H01L23/49827 ,  H01L25/0657 ,  H01L2224/16225 ,  H01L2225/06517 ,  H01L2225/06572 ,  H01L2924/1461 ,  H01L2924/15172 ,  H01L2924/15182 ,  H01L2924/157 ,  H01L2924/15787 ,  H01L2924/15788 ,  H01L2924/1579 ,  H05K7/005 ,  H01L2924/00

Abstract: An interposer substrate of the invention includes: a single substrate having a first main surface and a second main surface; and a plurality of through-hole interconnections having first portions formed so as to extend in parallel with each other and connecting the first main surface to the second main surface, wherein the through-hole interconnections adjacent to each other are provided so that ideal axes are parallel to each other with a distance therebetween, and the ideal axes extend perpendicular to at least one of the first main surface and the second main surface and penetrate through centers of the first portions.

Abstract translation: 本发明的内插衬底包括：具有第一主表面和第二主表面的单个衬底; 以及多个通孔互连，其具有形成为彼此平行地延伸的第一部分，并将第一主表面连接到第二主表面，其中设置彼此相邻的通孔互连，使得理想的轴是 彼此平行，并且理想轴线垂直于第一主表面和第二主表面中的至少一个延伸并穿过第一部分的中心。

公开(公告)号：US20130029092A1

公开(公告)日：2013-01-31

申请号：US13644975

申请日：2012-10-04

Applicant: Fujikura Ltd.

Inventor： Hiroyuki WAKIOKA

IPC: B29C35/08 ,  B32B3/10

CPC classification number: H05K3/002 ,  H05K3/101 ,  H05K3/107 ,  H05K3/4038 ,  H05K2203/107 ,  H05K2203/108 ,  H05K2203/128 ,  Y10T428/24273 ,  Y10T428/24479 ,  Y10T428/24744

Abstract: A microstructure forming method includes a step A of irradiating a region of a substrate, in which a hole-shaped or groove-shaped microstructure is to be formed, with a circularly or elliptically polarized laser beam having a pulse width of which the pulse duration is on the order of picoseconds or shorter, and scanning a focal point at which the laser beam converges to form a modified region, and a step B of performing an etching process on the substrate in which the modified region is formed and removing the modified region to form a microstructure.

Abstract translation: 微结构形成方法包括：步骤A，其将要形成孔形或槽状微结构的基板的区域与具有脉冲宽度的脉冲宽度的圆形或椭圆偏振的激光束照射 按照皮秒或更短的顺序，扫描激光束会聚的焦点以形成改性区域;以及步骤B，对形成有改质区域的基板进行蚀刻处理，并将修饰区域除去 形成微结构。