Gassensor und Sensorvorrichtung
    2.
    发明专利

    公开(公告)号:DE112014006731T5

    公开(公告)日:2017-05-11

    申请号:DE112014006731

    申请日:2014-06-09

    Applicant: FUJITSU LTD

    Abstract: Gassensor, der eine Feststoffelektrolytschicht einschließt, die Träger positiver Ladung einschließt, an die Detektions-Zielgas koordiniert, eine auf einem Teil einer Ebene der Feststoffelektrolytschicht angeordnete Elektrode, und eine Einheit, die dafür eingerichtet ist, Bewegungen der Träger positiver Ladung zu beschleunigen.

    MICRO MOVING ELEMENT COMPRISING TORSION BAR

    公开(公告)号:AU2002335243A1

    公开(公告)日:2004-05-04

    申请号:AU2002335243

    申请日:2002-10-10

    Applicant: FUJITSU LTD

    Abstract: The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.

    MICRO ROCKING DEVICE HAVING TOSION BAR

    公开(公告)号:AU2002327098A1

    公开(公告)日:2004-03-03

    申请号:AU2002327098

    申请日:2002-08-14

    Applicant: FUJITSU LTD

    Abstract: A micro-oscillating element is provided with a frame (113) and a oscillating member (111) connected with the frame (113) via a connector (112). Each connector (112) includes two torsion bars (112a), each torsion bar (112a) being constructed so that the rigidity becomes relatively high toward the frame (113) and relatively low toward the oscillating member (111) by forming a plurality of holes (112b).

    MICRO MOVING ELEMENT COMPRISING TORSION BAR
    9.
    发明公开
    MICRO MOVING ELEMENT COMPRISING TORSION BAR 有权
    MICRO移动元件扭力梁

    公开(公告)号:EP1569023A4

    公开(公告)日:2007-09-12

    申请号:EP02807976

    申请日:2002-10-10

    Applicant: FUJITSU LTD

    CPC classification number: G02B26/0841 G02B26/085 H02N1/008

    Abstract: A micro moving element (X1) comprises a moving section (111), frame (112), which are integrally molded in a material substrate having a laminate structure comprising conductor layers (110a-110c) including a core conductor layer (110b) and insulation layers (110d, 110e) interposed between the conductor layers (110a-110c), and a coupling section (113) that couples them. The moving section (111) includes a first structure derived from the core conductor layer (110b). The frame (112) includes a second structure derived from the core conductor layer (110b). The coupling section (113) includes torsion bars (113a, 113b) derived from the core conductor layer (110b), continuously connected to the first and second structures, and electrically separated from each other.

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