Abstract:
Gassensor, der eine Feststoffelektrolytschicht einschließt, die Träger positiver Ladung einschließt, an die Detektions-Zielgas koordiniert, eine auf einem Teil einer Ebene der Feststoffelektrolytschicht angeordnete Elektrode, und eine Einheit, die dafür eingerichtet ist, Bewegungen der Träger positiver Ladung zu beschleunigen.
Abstract:
A micro mirror unit includes a micro mirror substrate (100), a wiring substrate (200) and an electroconductive spacer disposed between these substrates. The micro mirror substrate (100) includes a moving part, a frame (130) and torsion bars (150) connecting the moving part to the frame (130). The moving part is provided with a mirror-formed portion (110). The wiring substrate (200) is formed with a wiring pattern. The electroconductive spacer electrically connects the frame (130) to the wiring pattern, while also providing a space between the micro mirror substrate (100) and the wiring substrate (200).
Abstract:
The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.
Abstract:
A micro-oscillating element is provided with a frame (113) and a oscillating member (111) connected with the frame (113) via a connector (112). Each connector (112) includes two torsion bars (112a), each torsion bar (112a) being constructed so that the rigidity becomes relatively high toward the frame (113) and relatively low toward the oscillating member (111) by forming a plurality of holes (112b).
Abstract:
The optical switch includes: a spectroscopic device (12) which separates wavelength division multiplexed (WDM) light into its component wavelengths; and a plurality of movable reflectors (41), arranged in a spectral direction at different intervals, for reflecting light of an individual component wavelength separated by said spectroscopic device (12). With this optical switch, deterioration of the characteristic of the pass band is avoided, so that the pass band characteristic is increased.
Abstract:
The optical switch includes: a spectroscopic device (12) which separates wavelength division multiplexed (WDM) light into its component wavelengths; and a plurality of movable reflectors (41), arranged in a spectral direction at different intervals, for reflecting light of an individual component wavelength separated by said spectroscopic device (12). With this optical switch, deterioration of the characteristic of the pass band is avoided, so that the pass band characteristic is increased.
Abstract:
A micro mirror unit includes a micro mirror substrate (100), a wiring substrate (200) and an electroconductive spacer disposed between these substrates. The micro mirror substrate (100) includes a moving part, a frame (130) and torsion bars (150) connecting the moving part to the frame (130). The moving part is provided with a mirror-formed portion (110). The wiring substrate (200) is formed with a wiring pattern. The electroconductive spacer electrically connects the frame (130) to the wiring pattern, while also providing a space between the micro mirror substrate (100) and the wiring substrate (200).
Abstract:
A micro moving element (X1) comprises a moving section (111), frame (112), which are integrally molded in a material substrate having a laminate structure comprising conductor layers (110a-110c) including a core conductor layer (110b) and insulation layers (110d, 110e) interposed between the conductor layers (110a-110c), and a coupling section (113) that couples them. The moving section (111) includes a first structure derived from the core conductor layer (110b). The frame (112) includes a second structure derived from the core conductor layer (110b). The coupling section (113) includes torsion bars (113a, 113b) derived from the core conductor layer (110b), continuously connected to the first and second structures, and electrically separated from each other.
Abstract:
A heat sink (22) of a microchannel cooling device being connected to a heat source thermally has a liquid refrigerant flow channel (24) having a microscopic cross section. A thermoelectric element (10) is provided on the heat sink (22). The thermoelectric element (10) extends in a direction parallel to a direction of extension of the liquid refrigerant flow channel (24).