公开(公告)号：JPH11319685A

公开(公告)日：1999-11-24

申请号：JP13507698

申请日：1998-05-18

Applicant: FUTABA DENSHI KOGYO KK

Inventor： KATAYAMA MINORU ,  WATANABE TERUO ,  YAMAMOTO NOBORU ,  SEIWA TOSHIAKI

IPC: B05D7/00 ,  B05C11/10 ,  B05D7/24

Abstract: PROBLEM TO BE SOLVED: To prevent clogging of a nozzle part or abnormal changes in the concentration of a slurry solution by preventing the remaining of the slurry solution and sedimentation of particles (phosphor) in the liquid, to improve maintainability and to properly replenish the slurry solution. SOLUTION: In a liquid supply device for supplying slurry solution from a nozzle part 2; a valve 1 to control the slurry solution to the nozzle part 2, a cap part 3 freely attachable and detachable to the nozzle part 2 with air tightness, a main flow passage 4 communicating with the valve 1 and the cap part 3 and capable of passing the slurry solution, and a discharging part P1 for sending the slurry solution through the main flow passage 4 are provided. And at the time of stopping the supply of the slurry solution, the cap part 3 is attached to the nozzle part and the slurry solution is reversibly circulated by passing a main circulating passage R through the nozzle part 2 from the main flow passage 4.

公开(公告)号：JP2001121066A

公开(公告)日：2001-05-08

申请号：JP30657099

申请日：1999-10-28

Applicant: FUTABA DENSHI KOGYO KK

Inventor： YAMAMOTO NOBORU

IPC: B05D1/40 ,  B05C11/08 ,  G03F7/16 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To prevent formation of a protruded part in the rotation center when a slurry is coated by rotating coating apparatus. SOLUTION: A mechanism is installed to shift the center of a substrate on which a slurry is dropwise titrated from the rotation center of a coating film formation apparatus and when the coating film formation apparatus is rotated in order to apply the slurry, centrifugal force is entirely evenly applied to the slurry on the substrate to form a uniform coating film.

公开(公告)号：JPH1179387A

公开(公告)日：1999-03-23

申请号：JP25166197

申请日：1997-09-17

Applicant: FUTABA DENSHI KOGYO KK

Inventor： YAMAMOTO NOBORU ,  MAKITA YOSHIO

IPC: B65G49/06

Abstract: PROBLEM TO BE SOLVED: To transport and move a glass substrate by preventing chipping off of a corner part thereof formed by cut faces without generating dust even if it is the unpolished glass substrate immediately after cutting. SOLUTION: This holder has a frame body in which right and left side plates 3 which face mutually and vertically are opened in the forward and backward mounting directions for both side ends of a horizontal top plate 1 and a ground plate 2. A support part 6 which supports bottom face fringes of a plurality of unpolished glass substrates 14 which protrude at a predetermined interval in the vertical direction of the side plate 3 to oppose horizontally between each side plate 3 for each inner wall face of each side plate 3 and are cut to a predetermined size is provided. Moreover, a locking member which protrudes in the horizontal direction at an upper position of a horizontal line of each opposing support part 6 on each inner wall face of each side plate 3 and on a rear side between each side plate 3 and comes in contact with cut faces at side ends of each glass substrate 14 of which protruded end part is supported by each support part 6 is provided. Consequently, it does not come in contact with a corner part formed by the cut faces of the glass substrate 14 so as to prevent chipping off of the corner part so that transportation and travel can be done without generating dust.