公开(公告)号：DE69620945D1

公开(公告)日：2002-06-06

申请号：DE69620945

申请日：1996-05-20

Applicant: GEN ELECTRIC

Inventor： DOUGLAS LEONARD RICHARD ,  SALA RICHARD JOSEPH ,  DUROCHER KEVIN MATTHEW

IPC: H01L21/98 ,  H01L23/52 ,  H01L23/538 ,  H01L25/065

Abstract: An adaptive method of providing electrical interconnections for a plurality of feed-through lines each having a respective end extending to at least one substrate surface includes generating an artwork representation for the electrical interconnections using specified feed-through line end positions on the at least one substrate surface. The at least one substrate surface may include a surface of a stack of substrates with at least two substrates having feed-through line ends facing a common direction. Actual positions of the at least two of the feed-through line ends are determined, and a scale factor is estimated using the determined actual positions. Actual positions of others of the feed-through line ends are estimated using the scale factor, and the artwork representation is modified to properly include electrical interconnections to ones of the feed-through line ends which are not in their specified positions. The artwork representation can be converted into a turn point polygon (TPP) format for effective data handling and modification of the artwork representation, and the TPP format can then be can be converted to a rectangular representation. A laser can be controlled in accordance with the rectangular representation of the modified artwork.

公开(公告)号：DE69620945T2

公开(公告)日：2002-12-12

申请号：DE69620945

申请日：1996-05-20

Applicant: GEN ELECTRIC

Inventor： DOUGLAS LEONARD RICHARD ,  SALA RICHARD JOSEPH ,  DUROCHER KEVIN MATTHEW

IPC: H01L21/98 ,  H01L23/52 ,  H01L23/538 ,  H01L25/065

Abstract: An adaptive method of providing electrical interconnections for a plurality of feed-through lines each having a respective end extending to at least one substrate surface includes generating an artwork representation for the electrical interconnections using specified feed-through line end positions on the at least one substrate surface. The at least one substrate surface may include a surface of a stack of substrates with at least two substrates having feed-through line ends facing a common direction. Actual positions of the at least two of the feed-through line ends are determined, and a scale factor is estimated using the determined actual positions. Actual positions of others of the feed-through line ends are estimated using the scale factor, and the artwork representation is modified to properly include electrical interconnections to ones of the feed-through line ends which are not in their specified positions. The artwork representation can be converted into a turn point polygon (TPP) format for effective data handling and modification of the artwork representation, and the TPP format can then be can be converted to a rectangular representation. A laser can be controlled in accordance with the rectangular representation of the modified artwork.