公开(公告)号：JP2001250888A

公开(公告)日：2001-09-14

申请号：JP2000388006

申请日：2000-12-21

Applicant: GEN ELECTRIC

Inventor： SAIA RICHARD JOSEPH ,  DUROCHER KEVIN MATTHEW ,  ROSE JAMES WILSON ,  DOUGLAS LEONARD RICHARD

IPC: H05K3/40 ,  H01L21/60 ,  H01L23/12 ,  H01L23/538 ,  H05K3/00

Abstract: PROBLEM TO BE SOLVED: To align die for the interconnect metal on a flexible substrate accurately. SOLUTION: A mask (102) for via formation is first patterned on a metal layer on the bottom surface of a flexible substrate (100), die attach means (104) is then applied to the top side of the flexible substrate (100), and a bond pad (106) on die is locally, adaptively aligned on the patterned metal via mask (102) on the flexible substrate (100) with high accuracy. Then, via (110) down to the bond pads (106) is then created through the aligned metal mask on the flexible substrate (100). An interconnect metal (112) is then deposited, patterned and etched.

公开(公告)号：CA2494307C

公开(公告)日：2012-02-07

申请号：CA2494307

申请日：2003-07-24

Applicant: GEN ELECTRIC

Inventor： BALCH ERNEST WAYNE ,  DOUGLAS LEONARD RICHARD ,  SHIH MIN-YI

IPC: G02B6/12 ,  G02B6/122 ,  G02B6/13 ,  G02B6/138 ,  G02B6/42 ,  G02B6/43

Abstract: A method for adaptively fabricating a waveguide (30) comprises: measuring misplacement of a photonic device (31, 32, 34) relative to a substrate (20); generating computer readable instructions for using a plurality of graphics primitives (16) to form the waveguide; and photocomposing the waveguide on the substrate in accordance with the computer readable instructions. A reticle (14) comprises a plurality of graphics primitives with at least one of the plurality of graphics primitives comprising a tapered end. A waveguide (30) comprises a plurality of waveguide segments (22) with each of the plurality of waveguide segments comprising a tapered end and being adjacent to at least one other of the plurality of waveguide segments.

公开(公告)号：DE69620945T2

公开(公告)日：2002-12-12

申请号：DE69620945

申请日：1996-05-20

Applicant: GEN ELECTRIC

Inventor： DOUGLAS LEONARD RICHARD ,  SALA RICHARD JOSEPH ,  DUROCHER KEVIN MATTHEW

IPC: H01L21/98 ,  H01L23/52 ,  H01L23/538 ,  H01L25/065

Abstract: An adaptive method of providing electrical interconnections for a plurality of feed-through lines each having a respective end extending to at least one substrate surface includes generating an artwork representation for the electrical interconnections using specified feed-through line end positions on the at least one substrate surface. The at least one substrate surface may include a surface of a stack of substrates with at least two substrates having feed-through line ends facing a common direction. Actual positions of the at least two of the feed-through line ends are determined, and a scale factor is estimated using the determined actual positions. Actual positions of others of the feed-through line ends are estimated using the scale factor, and the artwork representation is modified to properly include electrical interconnections to ones of the feed-through line ends which are not in their specified positions. The artwork representation can be converted into a turn point polygon (TPP) format for effective data handling and modification of the artwork representation, and the TPP format can then be can be converted to a rectangular representation. A laser can be controlled in accordance with the rectangular representation of the modified artwork.

公开(公告)号：CA2176880A1

公开(公告)日：1996-12-01

申请号：CA2176880

申请日：1996-05-17

Applicant: GEN ELECTRIC

Inventor： DOUGLAS LEONARD RICHARD ,  SAIA RICHARD JOSEPH ,  DUROCHER KEVIN MATTHEW

IPC: H01L21/98 ,  H01L23/52 ,  H01L23/538 ,  H01L21/70

Abstract: An adaptive method of providing electrical interconnections for a plurality of feed-through lines each having a respective end extending to at least one substrate surface includes generating an artwork representation for the electrical interconnections using specified feedthrough line end positions on the at least one substrate surface. The at least one substrate surface may include a surface of a stack of substrates with at least two substrates having feed-through line ends facing a common direction. Actual positions of the at least two of the feedthrough line ends are determined, and a scale factor is estimated using the determined actual positions. Actual positions of others of the feed-through line ends are estimated using the scale factor and the artwork representation is modified to properly include electrical interconnections to ones of the feed-through line ends which are not in their specified positions. The artwork representation can be converted into a turn point polygon (TPP) format for effective data handling and modification of the artwork representation and the TPP format can then be can be converted to a rectangular representation. A laser can be controlled in accordance with the rectangular representation of the modified artwork.

公开(公告)号：CA2176880C

公开(公告)日：2007-11-13

申请号：CA2176880

申请日：1996-05-17

Applicant: GEN ELECTRIC

Inventor： DOUGLAS LEONARD RICHARD ,  SAIA RICHARD JOSEPH ,  DUROCHER KEVIN MATTHEW

IPC: H01L21/70 ,  H01L21/98 ,  H01L23/52 ,  H01L23/538

Abstract: An adaptive method of providing electrical interconnections for a plurality of feed-through lines each having a respective end extending to at least one substrate surface includes generating an artwork representation for the electrical interconnections using specified feed--through line end positions on the at least one substrate surface. The at least one substrate surface may include a surface of a stack of substrates with at least two substrates having feed-through line ends facing a common direction. Actual positions of the at least two of the feed--through line ends are determined, and a scale factor is estimated using the determined actual positions. Actual positions of others of the feed-through line ends are estimated using the scale factor, and the artwork representation is modified to properly include electrical interconnections to ones of the feed-through line ends which are not in their specified positions. The artwork representation can be converted into a turn point polygon (TPP) format for effective data handling and modification of the artwork representation, and the TPP format can then be can be converted to a rectangular representation. A laser can be controlled in accordance with the rectangular representation of the modified artwork.

公开(公告)号：AU2003259224A1

公开(公告)日：2004-02-16

申请号：AU2003259224

申请日：2003-07-24

Applicant: GEN ELECTRIC

Inventor： BALCH ERNEST WAYNE ,  DOUGLAS LEONARD RICHARD ,  SHIH MIN-YI

IPC: G02B6/12 ,  G02B6/122 ,  G02B6/13 ,  G02B6/138 ,  G02B6/42 ,  G02B6/43

Abstract: A method for adaptively fabricating a waveguide comprises: measuring misplacement of a photonic device relative to a substrate; generating computer readable instructions for using a plurality of graphics primitives to form the waveguide; and photocomposing the waveguide on the substrate in accordance with the computer readable instructions. A reticle comprises a plurality of graphics primitives with at least one of the plurality of graphics primitives comprising a tapered end. A waveguide comprises a plurality of waveguide segments with each of the plurality of waveguide segments comprising a tapered end and being adjacent to at least one other of the plurality of waveguide segments.

公开(公告)号：DE60324813D1

公开(公告)日：2009-01-02

申请号：DE60324813

申请日：2003-07-24

Applicant: GEN ELECTRIC

Inventor： BALCH ERNEST WAYNE ,  DOUGLAS LEONARD RICHARD ,  SHIH MIN-YI

IPC: G02B6/12 ,  G02B6/122 ,  G02B6/13 ,  G02B6/138 ,  G02B6/42 ,  G02B6/43

Abstract: A method for adaptively fabricating a waveguide comprises: measuring misplacement of a photonic device relative to a substrate; generating computer readable instructions for using a plurality of graphics primitives to form the waveguide; and photocomposing the waveguide on the substrate in accordance with the computer readable instructions. A reticle comprises a plurality of graphics primitives with at least one of the plurality of graphics primitives comprising a tapered end. A waveguide comprises a plurality of waveguide segments with each of the plurality of waveguide segments comprising a tapered end and being adjacent to at least one other of the plurality of waveguide segments.

公开(公告)号：CA2494307A1

公开(公告)日：2004-02-05

申请号：CA2494307

申请日：2003-07-24

Applicant: GEN ELECTRIC

Inventor： BALCH ERNEST WAYNE ,  DOUGLAS LEONARD RICHARD ,  SHIH MIN-YI

IPC: G02B6/12 ,  G02B6/122 ,  G02B6/13 ,  G02B6/138 ,  G02B6/42 ,  G02B6/43

Abstract: A method for adaptively fabricating a waveguide (30) comprises: measuring misplacement of a photonic device (31, 32, 34) relative to a substrate (20); generating computer readable instructions for using a plurality of graphics primitives (16) to form the waveguide; and photocomposing the waveguide on t he substrate in accordance with the computer readable instructions. A reticle (14) comprises a plurality of graphics primitives with at least one of the plurality of graphics primitives comprising a tapered end. A waveguide (30) comprises a plurality of waveguide segments (22) with each of the plurality of waveguide segments comprising a tapered end and being adjacent to at least o ne other of the plurality of waveguide segments.

公开(公告)号：DE69620945D1

公开(公告)日：2002-06-06

申请号：DE69620945

申请日：1996-05-20

Applicant: GEN ELECTRIC

Inventor： DOUGLAS LEONARD RICHARD ,  SALA RICHARD JOSEPH ,  DUROCHER KEVIN MATTHEW

IPC: H01L21/98 ,  H01L23/52 ,  H01L23/538 ,  H01L25/065

Abstract: An adaptive method of providing electrical interconnections for a plurality of feed-through lines each having a respective end extending to at least one substrate surface includes generating an artwork representation for the electrical interconnections using specified feed-through line end positions on the at least one substrate surface. The at least one substrate surface may include a surface of a stack of substrates with at least two substrates having feed-through line ends facing a common direction. Actual positions of the at least two of the feed-through line ends are determined, and a scale factor is estimated using the determined actual positions. Actual positions of others of the feed-through line ends are estimated using the scale factor, and the artwork representation is modified to properly include electrical interconnections to ones of the feed-through line ends which are not in their specified positions. The artwork representation can be converted into a turn point polygon (TPP) format for effective data handling and modification of the artwork representation, and the TPP format can then be can be converted to a rectangular representation. A laser can be controlled in accordance with the rectangular representation of the modified artwork.