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    Folded longitudinal torsional hinge for gimbaled mems mirror hinge
    1.
    发明专利
    Folded longitudinal torsional hinge for gimbaled mems mirror hinge 有权
    折叠式MEMS镜面铰链的折叠式纵向铰链

    公开(公告)号：JP2010198029A

    公开(公告)日：2010-09-09

    申请号：JP2010091585

    申请日：2010-04-12

    Applicant: Glimmerglass Networks Inc ,  グリマーグラス・ネットワークス・インコーポレーテッド

    Inventor： STAKER BRYAN P ,  BANYAI WILLIAM C

    IPC: G02B26/08 ,  B81B3/00 ,  G02B26/10

    CPC classification number: G02B26/0841 ,  B81B3/0062 ,  G02B26/0833 ,  G02B26/105

    Abstract: PROBLEM TO BE SOLVED: To provide a hinge used with a dual axis micromirror such as an MEMS array and a parallel plate electrostatic operation, that allows for a compliant torsional rotation while simultaneously restricting net vertical and horizontal displacement.
    SOLUTION: A circular mirror (12) is connected to a gimbal (44) at opposing, but at locations (36) and (37) deviated from the center axis with compound longitudinal hinges (40) and (42).
    COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题：提供与诸如MEMS阵列和平行板静电操作的双轴微反射镜一起使用的铰链，其允许顺应扭转旋转同时限制净垂直和水平位移。 解决方案：圆形反射镜（12）以相对的方式连接到万向节（44），但是在具有复合纵向铰链（40）和（42）的中心轴线偏离的位置（36）和（37）处。 版权所有（C）2010，JPO＆INPIT

    FOLDED LONGITUDINAL TORSIONAL HINGE FOR GIMBALED MEMS MIRROR HINGE
    2.
    发明专利
    FOLDED LONGITUDINAL TORSIONAL HINGE FOR GIMBALED MEMS MIRROR HINGE 未知

    公开(公告)号：AU2003213165A1

    公开(公告)日：2003-09-09

    申请号：AU2003213165

    申请日：2003-02-18

    Applicant: GLIMMERGLASS NETWORKS INC

    Inventor： STAKER BRYAN P ,  BANYAI WILLIAM C

    IPC: B81B3/00 ,  G02B26/08 ,  G02B26/10 ,  G02B7/182

    Abstract: In a gimbaled micromachined micromirror array optimized for parallel-plate electrostatic operation, longitudinal-type gimbal hinge elements are provided in which a plurality of torsional longitudinal hinge elements are arranged in an array parallel to the axis of rotation and which are linked together by rigid lateral brace sections. In primary embodiment the hinge elements are arranged in a double gimbal configuration. Specific embodiments of the hinge elements are simple longitudinal, compound longitudinal, stacked simple longitudinal, and stacked compound longitudinal. The longitudinal hinges may be used with various types of mirrors including circular or rectilinear, recessed or nonrecessed, where the hinges are connected in either a symmetric or asymmetric configuration relative to one another, as hereinafter illustrated by way of a subset of examples. A preferred embodiment of a mirror structure suitable for an array structure according to the invention is a nonstacked compound longitudinal hinge symmetrically connected to a circular nonrecessed electrostatically-actuatable parallel plate mirror within a substantially circular ring hinged in substantially the same way to form a double gimbaled structure.

    3.
    发明专利
    未知

    公开(公告)号：DE60325829D1

    公开(公告)日：2009-03-05

    申请号：DE60325829

    申请日：2003-02-18

    Applicant: GLIMMERGLASS NETWORKS INC

    Inventor： STAKER BRYAN P ,  BANYAI WILLIAM C

    IPC: G02B7/182 ,  B81B3/00 ,  G02B26/08 ,  G02B26/10

    Abstract: In a gimbaled micromachined micromirror array optimized for parallel-plate electrostatic operation, longitudinal-type gimbal hinge elements are provided in which a plurality of torsional longitudinal hinge elements are arranged in an array parallel to the axis of rotation and which are linked together by rigid lateral brace sections. In primary embodiment the hinge elements are arranged in a double gimbal configuration. Specific embodiments of the hinge elements are simple longitudinal, compound longitudinal, stacked simple longitudinal, and stacked compound longitudinal. The longitudinal hinges may be used with various types of mirrors including circular or rectilinear, recessed or nonrecessed, where the hinges are connected in either a symmetric or asymmetric configuration relative to one another, as hereinafter illustrated by way of a subset of examples. A preferred embodiment of a mirror structure suitable for an array structure according to the invention is a nonstacked compound longitudinal hinge symmetrically connected to a circular nonrecessed electrostatically-actuatable parallel plate mirror within a substantially circular ring hinged in substantially the same way to form a double gimbaled structure.

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