公开(公告)号：JP2010198029A

公开(公告)日：2010-09-09

申请号：JP2010091585

申请日：2010-04-12

Applicant: Glimmerglass Networks Inc ,  グリマーグラス・ネットワークス・インコーポレーテッド

Inventor： STAKER BRYAN P ,  BANYAI WILLIAM C

IPC: G02B26/08 ,  B81B3/00 ,  G02B26/10

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  G02B26/0833 ,  G02B26/105

Abstract: PROBLEM TO BE SOLVED: To provide a hinge used with a dual axis micromirror such as an MEMS array and a parallel plate electrostatic operation, that allows for a compliant torsional rotation while simultaneously restricting net vertical and horizontal displacement.
SOLUTION: A circular mirror (12) is connected to a gimbal (44) at opposing, but at locations (36) and (37) deviated from the center axis with compound longitudinal hinges (40) and (42).
COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：提供与诸如MEMS阵列和平行板静电操作的双轴微反射镜一起使用的铰链，其允许顺应扭转旋转同时限制净垂直和水平位移。 解决方案：圆形反射镜（12）以相对的方式连接到万向节（44），但是在具有复合纵向铰链（40）和（42）的中心轴线偏离的位置（36）和（37）处。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：CA2668957A1

公开(公告)日：2008-05-22

申请号：CA2668957

申请日：2007-11-13

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： OWENS WINDSOR E ,  KINDWALL ALEXANDER P ,  FERNANDEZ ANDRES ,  STAKER BRYAN P

IPC: H01L21/00

Abstract: One or more cavities are formed in the bonding surfaces of one, all, or s ome of the elements to be bonded. These cavities serve as receptacles for th e bonding material and are where the bonds are localized. The cavities are o f sufficient size and shape so that their volume is greater than the volume of bonding material forming the bond. This ensures that when the elements ar e brought into contact with one another to mate, the bonding material, which can flow prior to solidifying into a bond, will flow into the cavities and will not impede the separation of the parts. This allows the parts to be mat ed with nominally zero separation. Once solidified, the bonding material for ms a localized bond inside each cavity. Different cavity shapes, such as, re ctangular, circular, or any other shape that can be injected or filled with adhesive material may be used.

公开(公告)号：WO2004036259A3

公开(公告)日：2004-12-29

申请号：PCT/US0331811

申请日：2003-10-07

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： STAKER BRYAN P ,  CAMPBELL EUGENE W ,  PAX PAUL H

IPC: G02B6/35

CPC classification number: G02B6/3508 ,  G02B6/3556 ,  G02B6/357

Abstract: In a folded three-dimensional free-space optical switch including a set of fibers and an optical system for producing collimated beamlets aligned to intersect an array of dual axis micromirrors of coplanar input and output mirror elements, and a folding mirror, the input and output micromirrors are arranged in a pattern wherein either the input or output mirror set is disposed along an annulus and wherein the complementary output or input mirror set is disposed within the annulus in order to globally minimize maximum tilt angles for a two-dimensional locus of tilt angles of the micromirror set. The beamlets are routed from assigned input fibers to corresponding input moveable mirrors to assigned output fibers via the static folding mirror and corresponding output moveable mirrors.

公开(公告)号：AU2003282760A8

公开(公告)日：2004-05-04

申请号：AU2003282760

申请日：2003-10-07

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： CAMPBELL EUGENE W ,  STAKER BRYAN P ,  PAX PAUL H

IPC: G02B6/35

Abstract: In a folded three-dimensional free-space optical switch including a set of fibers and an optical system for producing collimated beamlets aligned to intersect an array of dual axis micromirrors of coplanar input and output mirror elements, and a folding mirror, the input and output micromirrors are arranged in a pattern wherein either the input or output mirror set is disposed along an annulus and wherein the complementary output or input mirror set is disposed within the annulus in order to globally minimize maximum tilt angles for a two-dimensional locus of tilt angles of the micromirror set. The beamlets are routed from assigned input fibers to corresponding input moveable mirrors to assigned output fibers via the static folding mirror and corresponding output moveable mirrors.

公开(公告)号：AU2003282760A1

公开(公告)日：2004-05-04

申请号：AU2003282760

申请日：2003-10-07

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： STAKER BRYAN P ,  CAMPBELL EUGENE W ,  PAX PAUL H

IPC: G02B6/35

Abstract: In a folded three-dimensional free-space optical switch including a set of fibers and an optical system for producing collimated beamlets aligned to intersect an array of dual axis micromirrors of coplanar input and output mirror elements, and a folding mirror, the input and output micromirrors are arranged in a pattern wherein either the input or output mirror set is disposed along an annulus and wherein the complementary output or input mirror set is disposed within the annulus in order to globally minimize maximum tilt angles for a two-dimensional locus of tilt angles of the micromirror set. The beamlets are routed from assigned input fibers to corresponding input moveable mirrors to assigned output fibers via the static folding mirror and corresponding output moveable mirrors.

公开(公告)号：DE60325829D1

公开(公告)日：2009-03-05

申请号：DE60325829

申请日：2003-02-18

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： STAKER BRYAN P ,  BANYAI WILLIAM C

IPC: G02B7/182 ,  B81B3/00 ,  G02B26/08 ,  G02B26/10

Abstract: In a gimbaled micromachined micromirror array optimized for parallel-plate electrostatic operation, longitudinal-type gimbal hinge elements are provided in which a plurality of torsional longitudinal hinge elements are arranged in an array parallel to the axis of rotation and which are linked together by rigid lateral brace sections. In primary embodiment the hinge elements are arranged in a double gimbal configuration. Specific embodiments of the hinge elements are simple longitudinal, compound longitudinal, stacked simple longitudinal, and stacked compound longitudinal. The longitudinal hinges may be used with various types of mirrors including circular or rectilinear, recessed or nonrecessed, where the hinges are connected in either a symmetric or asymmetric configuration relative to one another, as hereinafter illustrated by way of a subset of examples. A preferred embodiment of a mirror structure suitable for an array structure according to the invention is a nonstacked compound longitudinal hinge symmetrically connected to a circular nonrecessed electrostatically-actuatable parallel plate mirror within a substantially circular ring hinged in substantially the same way to form a double gimbaled structure.

公开(公告)号：WO2008061097A3

公开(公告)日：2008-07-10

申请号：PCT/US2007084568

申请日：2007-11-13

Applicant: GLIMMERGLASS NETWORKS INC ,  STAKER BRYAN P ,  FERNANDEZ ANDRES ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

Inventor： STAKER BRYAN P ,  FERNANDEZ ANDRES ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

IPC: G02B26/00 ,  H01L27/00

CPC classification number: G02B26/0841

Abstract: A MEMS-based mirror is provided with trenches between adjacent electrodes in order to be able to withstand relatively high applied voltages, and thus has a substantially reduced exposure to uncontrolled surface potentials. The MEMS-based mirror, thus avoids voltage drifts and has an improved mirror position stability. The trench dimensions are selected such that the voltage applied between each adjacent pair of electrodes stays within predefined limits. An insulating layer, such as silicon dioxide, electrically isolates each pair of adjacent electrodes. Each insulting layer extends partially above an associated trench and is characterized by the same height and width dimensions.

Abstract translation: 在相邻电极之间设置有基于MEMS的反射镜，以便能够承受相对较高的施加电压，从而基本上减少暴露于不受控制的表面电位。 基于MEMS的反射镜，因此避免了电压漂移，并具有改进的镜面位置稳定性。 选择沟槽尺寸，使得施加在每个相邻电极对之间的电压保持在预定义的限度内。 诸如二氧化硅的绝缘层电隔离每对相邻的电极。 每个绝缘层部分地在相关联的沟槽上方延伸，并且其特征在于相同的高度和宽度尺寸。

公开(公告)号：WO2008061101A3

公开(公告)日：2008-07-03

申请号：PCT/US2007084575

申请日：2007-11-13

Applicant: GLIMMERGLASS NETWORKS INC ,  FERNANDEZ ANDRES ,  STAKER BRYAN P ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

Inventor： FERNANDEZ ANDRES ,  STAKER BRYAN P ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

IPC: H01L21/00

CPC classification number: B32B37/1292 ,  B32B7/12 ,  B32B2309/68 ,  B32B2457/00 ,  B81C3/001 ,  B81C2203/032 ,  B81C2203/035 ,  Y10T428/24612 ,  Y10T428/2462

Abstract: One or more cavities are formed in the bonding surfaces of one, all, or some of the elements to be bonded. These cavities serve as receptacles for the bonding material and are where the bonds are localized. The cavities are of sufficient size and shape so that their volume is greater than the volume of bonding material forming the bond. This ensures that when the elements are brought into contact with one another to mate, the bonding material, which can flow prior to solidifying into a bond, will flow into the cavities and will not impede the separation of the parts. This allows the parts to be mated with nominally zero separation. Once solidified, the bonding material forms a localized bond inside each cavity. Different cavity shapes, such as, rectangular, circular, or any other shape that can be injected or filled with adhesive material may be used.

Abstract translation: 在待结合的一个，全部或一些元件的接合表面中形成一个或多个空腔。 这些空腔用作接合材料的接收器，并且是键的位置。 空腔具有足够的尺寸和形状，使得它们的体积大于形成结合的粘合材料的体积。 这确保了当元件彼此接触以配合时，可以在凝固成粘合之前流动的粘合材料将流入空腔中，并且不会阻碍部件的分离。 这允许零件与标称零分离配合。 一旦固化，接合材料在每个空腔内形成局部粘合。 可以使用不同的腔体形状，例如矩形，圆形或可以用粘合剂材料注射或填充的任何其它形状。

公开(公告)号：CA2668956C

公开(公告)日：2010-11-09

申请号：CA2668956

申请日：2007-11-13

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： STAKER BRYAN P ,  FERNANDEZ ANDRES ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

IPC: G02B26/00 ,  B81B7/02

Abstract: A MEMS-based mirror is provided with trenches between adjacent electrodes in order to be able to withstand relatively high applied voltages, and thus has a substantially reduced exposure to uncontrolled surface potentials. The MEMS-based mirror, thus avoids voltage drifts and has an improved mirror position stability. The trench dimensions are selected such that the voltage applied between each adjacent pair of electrodes stays within predefined limits. An insulating layer, such as silicon dioxide, electrically isolates each pair of adjacent electrodes. Each insulting layer extends partially above an associated trench and is characterized by the same height and width dimensions.

公开(公告)号：CA2668956A1

公开(公告)日：2008-05-22

申请号：CA2668956

申请日：2007-11-13

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： OWENS WINDSOR E ,  FERNANDEZ ANDRES ,  STAKER BRYAN P ,  KINDWALL ALEXANDER P

IPC: G02B26/00 ,  H01L27/00

Abstract: A MEMS-based mirror is provided with trenches between adjacent electrodes in order to be able to withstand relatively high applied voltages, and thus has a substantially reduced exposure to uncontrolled surface potentials. Th e MEMS-based mirror, thus avoids voltage drifts and has an improved mirror p osition stability. The trench dimensions are selected such that the voltage applied between each adjacent pair of electrodes stays within predefined lim its. An insulating layer, such as silicon dioxide, electrically isolates eac h pair of adjacent electrodes. Each insulting layer extends partially above an associated trench and is characterized by the same height and width dimen sions.