公开(公告)号：US11366154B2

公开(公告)日：2022-06-21

申请号：US16527146

申请日：2019-07-31

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Sebastian T. Ventrone ,  Richard S. Graf ,  Ezra D. B. Hall ,  Jack R. Smith

IPC: G01R31/02 ,  G01R31/28 ,  H04L9/32

Abstract: An integrated circuit (IC) includes functional logic therein that can be enabled by application of a predefined thermal cycle. The IC includes an enabling fuse operatively coupled to the functional logic, the functional logic being disabled unless enabled by activation of the enabling fuse. A set of thermal sensors are arranged in a physically distributed manner through at least a portion of the IC. A test control macro operatively couples to the set of thermal sensors and the enabling fuse for activating the enabling fuse to enable the functional logic in response to application of a thermal cycle that causes the set of thermal sensors to sequentially experience a thermal condition matching a thermal sequence enabling test. A related method and system for applying the predefined thermal cycle are also provided.

公开(公告)号：US10976666B1

公开(公告)日：2021-04-13

申请号：US16661220

申请日：2019-10-23

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Ezra D. B. Hall ,  Jed H. Rankin ,  Alok Vaid

IPC: G03F7/20

Abstract: Embodiments of the present disclosure provide an apparatus including mask pattern formed on a mask substrate. A plurality of spatial radiation modulators may be vertically displaced from the mask pattern, and distributed across a two-dimensional area. Each of the plurality of spatial radiation modulators may be adjustable between a first transparent state and a second transparent state to control whether radiation transmitted through the mask pattern passes through each of the plurality of spatial radiation modulators.