公开(公告)号：US20230268205A1

公开(公告)日：2023-08-24

申请号：US18062025

申请日：2022-12-06

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Xin CHEN ,  Zhihang LIN ,  Hui TANG ,  Hongcheng LI ,  Jian GAO ,  Qiang LIU ,  Xun CHEN

IPC: H01L21/67 ,  H01L33/00

CPC classification number: H01L21/67144 ,  H01L33/0093

Abstract: A flexure-based continuous ejector pin mechanism for Mini/Micro chip mass transfer includes a first drive frame, a second drive frame, a mounting base, a first thorn die attach drive device, a second thorn die attach drive device, first flexible hinges, second flexible hinges, and a pricking pin. The second drive frame and the first drive frame are connected through the first flexible hinge. The mounting base is connected to a left side and a right side of the second drive frame through the second flexible hinges. Compared with a laser transfer technology, the flexible movable thorn die attach device has lower cost and higher accuracy; compared with a vacuum nozzle transfer technology, the flexible movable thorn die attach device has higher transfer efficiency and quality; and compared with a conventional thorn die attach device, the flexible movable thorn die attach device has higher transfer efficiency and precision.