公开(公告)号：US20210166981A1

公开(公告)日：2021-06-03

申请号：US17037849

申请日：2020-09-30

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Yun CHEN ,  Yao YAO ,  Shuquan DING ,  Junyu LONG ,  Maoxiang HOU ,  Dachuang SHI ,  Xin CHEN ,  Jian GAO ,  Qiang LIU ,  Lanyu ZHANG ,  Yunbo HE ,  Shenghui ZHANG ,  Zhengping WANG

IPC: H01L21/66 ,  B23K26/08 ,  B23K26/06 ,  B23K26/082

Abstract: The disclosure relates to a method for repairing an internal circuit break defect in a chip, including: S1, detecting the defect position of the chip and the type and performance parameters of a filling material; S2, positioning the chip on a two-dimensional motion platform; S3, setting parameters of two beams of laser; adjusting a focal length of the two beams of laser three-dimensional incident angle and a Z axis, so that a focus point of the two beams of laser irradiate any end of the circuit break of the chip; S4, the two-dimensional motion platform drives the chip to move, so that the focus point of the two beams of laser is moved to an other end of the circuit break, and an moving trajectory of the focus point of the two beams of laser feeds through the two ends of the circuit break of the chip.

公开(公告)号：US20200230644A1

公开(公告)日：2020-07-23

申请号：US16717331

申请日：2019-12-17

Applicant: Guangdong University of Technology

Inventor： Yun CHEN ,  Junyu LONG ,  Shuang ZHOU ,  Xin CHEN ,  Jian GAO ,  Qiang LIU ,  Ching-Ping WONG ,  Shenghui ZHANG

IPC: B05D3/06 ,  B05D1/00 ,  B05D3/04 ,  B23K26/04 ,  B23K26/06 ,  B23K26/08 ,  B23K26/12 ,  B23K26/352 ,  B23K26/359

Abstract: A device for processing microstructure arrays of polystyrene-graphene nanocomposites, including a laser generator, a vacuum chamber, an object stage, an ultraviolet filter and a gas flow control unit. The object stage is detachably fixed to a bottom of the vacuum chamber with a passage that can be opened or closed. The ultraviolet filter is provided in the vacuum chamber. A laser light emitted by the laser generator arrives at the object stage through the ultraviolet filter. The object stage is configured to place a sample to be processed. The gas flow control unit is communicated with the vacuum chamber and is configured to control the flow of the gas entering the vacuum chamber. The vacuum chamber is fixed on a three-axis precision positioning platform via a vacuum chamber clamp. The device disclosed herein aims to solve the existing difficulty in processing microstructure arrays of polystyrene-graphene nanocomposites.