公开(公告)号：US20240369760A1

公开(公告)日：2024-11-07

申请号：US18141753

申请日：2023-05-01

Applicant: GlobalFoundries U.S. Inc.

Inventor： Arpan Dasgupta ,  Zahidur Chowdhury ,  Takako Hirokawa ,  Vaishnavi Karra ,  Norman Robson

IPC: G02B6/12 ,  G02B6/136 ,  H04N5/33

Abstract: Structures including a light source and an edge coupler, and methods of forming and using such structures. The structure comprises a semiconductor substrate and a back-end-of-line stack on the semiconductor substrate. The back-end-of-line stack includes a first dielectric layer, a first plurality of metal features in the first dielectric layer, a second dielectric layer on the first dielectric layer, and a second plurality of metal features in the second dielectric layer. The second plurality of metal features have a non-overlapping relationship with the first plurality of metal features. The structure further comprises an edge coupler adjacent to the first plurality of metal features and the second plurality of metal features.