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公开(公告)号:AU7937198A
公开(公告)日:1999-01-25
申请号:AU7937198
申请日:1998-07-03
Applicant: HAMAMATSU PHOTONICS KK
Inventor: IKEDA SHIRO , MATSUSHITA KOJI , WARASHINA HIDENAGA
IPC: H01J61/067 , H01J61/09 , H01J61/12 , H01S3/137
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公开(公告)号:JPH11283558A
公开(公告)日:1999-10-15
申请号:JP8423998
申请日:1998-03-30
Applicant: HAMAMATSU PHOTONICS KK
Inventor: SHIMAZU TAKESHIGE , IKEDA SHIRO , MAKINO KOJI , FUKUZAWA KATSUHIRO
Abstract: PROBLEM TO BE SOLVED: To provide a discharge tube having absorbing transition around 193.35 nm wavelength, practically usable high intensity and high bright line output stability. SOLUTION: A discharge tube 1 has a sealed container 2, and light- transmitting windows 5, 6 made of quartz glass, such as synthetic quartz are installed in the sealed container 2. A cathode 9 at least part whose is made of platinum and an anode 8 are arranged facing each other within the sealed container 2. Sealed gas which is inert with respect to platinum is sealed in the sealed container 2. A hollow part 9a is formed in the cathode 9, and the hollow part 9a may be coated with a platinum layer, or a platinum cylinder or a platinum coil may be put into the hollow part 9a with pressure.
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