DISCHARGE TUBE
    2.
    发明专利

    公开(公告)号:JPH11283558A

    公开(公告)日:1999-10-15

    申请号:JP8423998

    申请日:1998-03-30

    Abstract: PROBLEM TO BE SOLVED: To provide a discharge tube having absorbing transition around 193.35 nm wavelength, practically usable high intensity and high bright line output stability. SOLUTION: A discharge tube 1 has a sealed container 2, and light- transmitting windows 5, 6 made of quartz glass, such as synthetic quartz are installed in the sealed container 2. A cathode 9 at least part whose is made of platinum and an anode 8 are arranged facing each other within the sealed container 2. Sealed gas which is inert with respect to platinum is sealed in the sealed container 2. A hollow part 9a is formed in the cathode 9, and the hollow part 9a may be coated with a platinum layer, or a platinum cylinder or a platinum coil may be put into the hollow part 9a with pressure.

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