公开(公告)号：MY139787A

公开(公告)日：2009-10-30

申请号：MYPI20050127

申请日：2005-01-12

Applicant: HAMAMATSU PHOTONICS KK

Inventor： KURITA NORIO ,  OSAJIMA TETSUYA

IPC: B23K26/03

Abstract: TO PROVIDE A LASER PROCESSING APPARATUS (1) WHICH CAN CONVERGE A LASER BEAM (L1) FOR PROCESSING AN OBJECT TO BE PROCESSED (S) AT A POSITION AS CLOSE AS POSSIBLE TO A PREDETERMINED POSITION. THIS LASER PROCESSING APPARATUS (1) IS ONE FOR IRRADIATING AN OBJECT TO BE PROCESSED (S) WITH A PROCESSING LASER BEAM (L1) WHILE POSITIONING A CONVERGING POINT (P) WITHIN THE OBJECT (S) SO AS TO FORM A MODIFIED REGION (R) CAUSED BY MULTIPHOTON ABSORPTION WITHIN THE OBJECT (S) ALONG A LINE ALONG WHICH THE OBJECT (S) SHOULD BE CUT IN THE OBJECT (S), AND COMPRISES AN OBJECTIVE LENS UNIT (5) INCLUDING A PROCESSING OBJECTIVE LENS (42) WHICH CONVERGES THE PROCESSING LASER BEAM (L1) AND A RANGE FINDING LASER BEAM (L2) FOR MEASURING A DISPLACEMENT OF A MAIN SURFACE (S1) OF THE OBJECT (S) ON AN IDENTICAL AXIS (), A LIGHT-RECEIVING PART (45) WHICH RECEIVES A REFLECTED LIGHT BEAM OF THE RANGE FINDING LASER BEAM (L2) ON THE MAIN SURFACE (S1), AND AN ACTUATOR (43) WHICH HOLDS THE PROCESSING OBJECTIVE LENS (42) ACCORDING TO THE RECEIVED REFLECTED LIGHT BEAM SUCH THAT THE LENS (42) IS CAPABLE OF FREELY ADVANCING AND RETRACTING WITH RESPECT TO THE MAIN SURFACE (S1); AND A HOUSING (21) TO WHICH A LASER UNIT (3) FOR EMITTING THE PROCESSING LASER BEAM (L1) IS ATTACHED. THE OBJECTIVE LENS UNIT (5) IS DETACHABLY ATTACHED TO THE HOUSING (21).

公开(公告)号：ES2381254T3

公开(公告)日：2012-05-24

申请号：ES03777262

申请日：2003-12-04

Applicant: HAMAMATSU PHOTONICS KK

Inventor： FUKUYO FUMITSUGU ,  FUKUMITSU KENSHI ,  OSAJIMA TETSUYA

IPC: B23K26/046 ,  B23K26/064 ,  B23K26/066 ,  B23K26/40 ,  B23K101/40 ,  B28D1/22 ,  B28D5/00 ,  H01S3/00

Abstract: Aparato de procesamiento con láser (20) para irradiar un objeto a procesar en forma de oblea (1) con luz láser (L1) mientras se sitúa un punto de convergencia de la luz (P) en el interior del objeto para así formar una zona modificada (7), comprendiendo el aparato: un expansor de haz (34) para aumentar el tamaño de haz de la luz láser emitida desde una fuente de luz láser (22); una lente condensadora (31) para converger la luz láser que incide sobre la misma por medio del expansor de haz hacia el objeto; y caracterizado por: un elemento de sujeción de la lente (29) que sujeta la lente condensadora (31) y que incluye un primer orificio de transmisión de luz (32) para hacer que la luz láser incida sobre la lente condensadora; en el cual un elemento de diafragma (38), que tiene un segundo orificio de transmisión de luz (39) para reducir y transmitir la luz láser, se dispone en una trayectoria óptica de la luz láser (L1) que conecta el expansor de haz (34) y el primer orificio de transmisión de luz (32) entre sí y está dispuesto para quedar separado del elemento de sujeción de la lente (29), de manera que se evita que el calor se transmita del elemento de diafragma (38) al elemento de sujeción de la lente (29), en el que la luz láser (L1) emitida desde el expansor de haz (34) es luz paralela, el segundo orificio de transmisión de luz (39) tiene un diámetro no mayor que el del primer orificio de transmisión de luz (32), y en el que el primer orificio de transmisión de luz (32) actúa de pupila de entrada de la luz láser (L1) a la lente condensadora (31) y la zona modificada (7) se forma por absorción multifotónica en el interior del objeto que se produce bajo un estado en el que la densidad de potencia máxima de la luz láser es de 1 x 108 W/cm2 o mayor.

公开(公告)号：AU2003289188A1

公开(公告)日：2004-06-23

申请号：AU2003289188

申请日：2003-12-04

Applicant: HAMAMATSU PHOTONICS KK

Inventor： FUKUYO FUMITSUGU ,  FUKUMITSU KENSHI ,  OSAJIMA TETSUYA

IPC: B23K26/046 ,  B23K26/064 ,  B23K26/066 ,  B23K101/40 ,  B28D1/22 ,  B28D5/00 ,  H01S3/00 ,  B23K26/04

Abstract: A laser processing apparatus which can suppress the positional fluctuation in light-converging point of laser light during laser processing is provided. On an optical path of laser light L1 connecting a beam expander 34 and a first light-transmitting hole 32 of a lens holder 29 to each other in a laser processing apparatus 20, a stop member 38 including a second light-transmitting hole 39 having the same diameter as that of the first light-transmitting hole 32 is disposed. Hence, the amount of laser light L1 cut by the surrounding part of the first light-transmitting hole 32 can substantially be eliminated, whereby the lens holder 29 can be prevented from being heated upon irradiation with the laser light L1. Also, even when the stop member 38 is heated by the laser light L1 cut by the surrounding part of the second light-transmitting hole 39, heat is prevented from being transmitted from the stop member 38 to the lens holder 29, since the stop member 38 is separated from the lens holder 29. Therefore, the positional fluctuation in light-converging point P1 of the laser light L1 during laser processing can be suppressed to a low level.

公开(公告)号：AU2003281709A1

公开(公告)日：2004-02-16

申请号：AU2003281709

申请日：2003-07-04

Applicant: HAMAMATSU PHOTONICS KK

Inventor： KAWAI KAZUHITO ,  OSAJIMA TETSUYA

IPC: G02B6/04 ,  G02B6/10 ,  G02B6/42 ,  G03F7/20 ,  H01L21/027 ,  G03F7/16 ,  B05C11/08

Abstract: A light emitting end face side front end part of an optical fiber bundle 16 is covered by a sleeve member 13 and an emitting part outer cover 14. A glass rod holding member 42, which holds a glass rod 40, is mounted to emitting part outer cover 14. Glass rod 40 is fixed to glass rod holding member 42 by means of positioning pins 44 and a light incidence end face 40i thereof opposes a light emitting end face 16o of optical fiber bundle 16. A light emitting end face 40o of glass rod 40 has a rectangular shape. The light emitting from light emitting end face 40o is made uniform in illuminance across the entirety of its cross section and the cross section thereof is shaped to a rectangular shape in the process of being propagated while being totally reflected at the boundary surface of glass rod 40.

公开(公告)号：AT550129T

公开(公告)日：2012-04-15

申请号：AT03777262

申请日：2003-12-04

Applicant: HAMAMATSU PHOTONICS KK

Inventor： FUKUYO FUMITSUGU ,  FUKUMITSU KENSHI ,  OSAJIMA TETSUYA

IPC: B23K26/046 ,  B23K26/064 ,  B23K26/066 ,  B23K26/40 ,  B23K101/40 ,  B28D1/22 ,  B28D5/00 ,  H01S3/00

Abstract: A laser processing apparatus which can suppress the positional fluctuation in light-converging point of laser light during laser processing is provided. On an optical path of laser light L1 connecting a beam expander 34 and a first light-transmitting hole 32 of a lens holder 29 to each other in a laser processing apparatus 20, a stop member 38 including a second light-transmitting hole 39 having the same diameter as that of the first light-transmitting hole 32 is disposed. Hence, the amount of laser light L1 cut by the surrounding part of the first light-transmitting hole 32 can substantially be eliminated, whereby the lens holder 29 can be prevented from being heated upon irradiation with the laser light L1. Also, even when the stop member 38 is heated by the laser light L1 cut by the surrounding part of the second light-transmitting hole 39, heat is prevented from being transmitted from the stop member 38 to the lens holder 29, since the stop member 38 is separated from the lens holder 29. Therefore, the positional fluctuation in light-converging point P1 of the laser light L1 during laser processing can be suppressed to a low level.

公开(公告)号：MY131928A

公开(公告)日：2007-09-28

申请号：MYPI20044617

申请日：2004-11-04

Applicant: HAMAMATSU PHOTONICS KK

Inventor： KURITA NORIO ,  OSAJIMA TETSUYA ,  SUZUKI TATSUYA ,  WAKUDA TOSHIMITSU ,  KUSU MASAYOSHI

IPC: G02B26/02 ,  G02B5/00

Abstract: A SHUTTER UNIT CAPABLE OF PREVENTING THE SCATTERING OF THE LASER BEAM UPON CLOSING THE OPTICAL PATH OF THE LASER BEAM AND CAPABLE OF BEING MINIATURIZED, AND A LASER PROCESSING DEVICE EMPLOYING SUCH ASHUTTER UNIT. IN A SHUTTER UNIT 1, WHEN THE OPTICAL PATH OF THE LASER BEAM L IS OPENED, A ROTATING MEMBER 57 IS ROTATED AROUND AN AXIS LINE ( ), AND AN OPENING 61 IS POSITIONED ON AN OPTICAL AXIS (ALPHA) SO AS TO PASS THE LASER BEAM L THERETHROUGH. MEANWHILE, WHEN THE OPTICAL PATH OF THE LASER BEAM L IS CLOSED, THE ROTATING MEMBER 57 IS ROTATED AND A REFLECTIVE SURFACE 62 IS POSITIONED ON THE OPTICAL AXIS (ALPHA) SO AS TO REFLECT THE LASER BEAM L. HERE, SINCE THE REFLECTED LASER BEAM L IS ABSORBED BY AN OPTICAL ABSORPTION MEMBER 63, IT IS POSSIBLE TO PREVENT THE SCATTERING OF THE LASER BEAM L WHEN THE OPTICAL PATH OF THE LASER BEAM L IS CLOSED. IN ADDITION, SINCE THE OPENING 61 AND REFLECTIVE SURFACE 62 ARE BOTH FORMED ON THE ROTATING MEMBER 57 WHICH ROTATES AROUND THE AXIS LINE ( ) THAT IS SUBSTANTIALLY ORTHOGONAL TO THE OPTICAL AXIS (ALPHA), IT IS POSSIBLE TO REDUCE THE SIZE OF THE SHUTTER UNIT 1.(FIG 3)

公开(公告)号：AT522313T

公开(公告)日：2011-09-15

申请号：AT04806951

申请日：2004-12-13

Applicant: HAMAMATSU PHOTONICS KK

Inventor： KURITA NORIO ,  OSAJIMA TETSUYA

IPC: B23K26/03

Abstract: To provide a laser processing apparatus which can converge a laser beam for processing an object to be processed at a position as close as possible to a predetermined position. This laser processing apparatus is one for irradiating an object to be processed with a processing laser beam while positioning a converging point within the object so as to form a modified region caused by multiphoton absorption within the object along a line along which the object should be cut in the object, and comprises an objective lens unit 5 including a processing objective lens 42 which converges the processing laser beam and a rangefinding laser beam for measuring a displacement of a main surface of the object on an identical axis, a light-receiving part 45 which receives a reflected light beam of the rangefinding laser beam on the main surface, and an actuator 43 which holds the processing objective lens 42 according to the received reflected light beam such that the lens 42 is capable of freely advancing and retracting with respect to the main surface; and a housing 21 to which a laser unit for emitting the processing laser beam is attached. The objective lens unit 5 is detachably attached to the housing 21.

公开(公告)号：DE60322557D1

公开(公告)日：2008-09-11

申请号：DE60322557

申请日：2003-07-04

Applicant: HAMAMATSU PHOTONICS KK

Inventor： KAWAI KAZUHITO ,  OSAJIMA TETSUYA

IPC: H01L21/027 ,  B05C11/08 ,  G02B6/04 ,  G02B6/10 ,  G02B6/42 ,  G03F7/16 ,  G03F7/20

Abstract: A light emitting end face side front end part of an optical fiber bundle 16 is covered by a sleeve member 13 and an emitting part outer cover 14. A glass rod holding member 42, which holds a glass rod 40, is mounted to emitting part outer cover 14. Glass rod 40 is fixed to glass rod holding member 42 by means of positioning pins 44 and a light incidence end face 40i thereof opposes a light emitting end face 16o of optical fiber bundle 16. A light emitting end face 40o of glass rod 40 has a rectangular shape. The light emitting from light emitting end face 40o is made uniform in illuminance across the entirety of its cross section and the cross section thereof is shaped to a rectangular shape in the process of being propagated while being totally reflected at the boundary surface of glass rod 40.

公开(公告)号：EP1681591A4

公开(公告)日：2009-01-07

申请号：EP04799500

申请日：2004-11-04

Applicant: HAMAMATSU PHOTONICS KK

Inventor： KURITA NORIO ,  OSAJIMA TETSUYA ,  KUSUNOKI MASAYOSHI ,  SUZUKI TATSUYA ,  WAKUDA TOSHIMITSU

IPC: G02B26/02 ,  B23K26/06 ,  G02B5/00 ,  H01S3/00

CPC classification number: G02B5/005

Abstract: A shutter unit capable of preventing the scattering of a laser beam when the light path of a laser beam is blocked and being downsized, and a laser processing device using it. In the shutter unit (1), a rotation member (57) is rotated on an axial line gamma and an opening (61) is positioned on an optical axis alpha to let a laser beam L pass when the light path of the laser beam L is opened. When the light path of the laser beam L is blocked, the rotation member (57) is rotated and a reflection surface (62) is positioned on the optical axis alpha to reflect the laser beam L. Since the reflected laser beam L is absorbed by a light absorbing member (63), the scattering of the laser beam L when the light path of the laser beam L is blocked can be prevented. In addition, since both the opening (61) and the reflection surface (62) are formed on the rotation member (57) rotating on the axial line gamma almost orthogonal to the optical axis alpha, the shutter unit (1) can be downsized.

公开(公告)号：EP1716961A4

公开(公告)日：2008-08-13

申请号：EP04806951

申请日：2004-12-13

Applicant: HAMAMATSU PHOTONICS KK

Inventor： KURITA NORIO ,  OSAJIMA TETSUYA

IPC: B23K26/06 ,  B23K26/02 ,  B23K26/03 ,  B23K26/04 ,  B23K26/42

CPC classification number: B23K26/046 ,  B23K26/0057 ,  B23K26/048 ,  B23K26/40 ,  B23K26/702 ,  B23K2203/50

Abstract: A machining laser beam is condensed to a position as close as possible to a specified position. A laser beam machining system comprising an object lens unit (5) including a machining object lens (42) for condensing a machining laser beam and a distance-measuring laser beam that measures the displacement of the main surface of a work to the same axial line, a light receiving unit (45) for receiving the reflection light, off the main surface, of the distance-measuring laser beam, and an actuator (43) for holding the machining object lens (42) so as to be movable toward or from the main surface based on the received reflection light, and an enclosure (21) to which a laser unit for emitting a machining laser beam is mounted, the object lens unit (5) being detachably mounted to the enclosure (21).