Abstract:
A resonator includes a translator, a stator. and a control circuit. The control circuit is configured to provide first and second translator voltages and first through third stator voltages, wherein the translator is configured to move with respect to the stator at a resonant frequency of the resonator in response to the control circuit.
Abstract:
An electronic apparatus includes a first die, a second die, a third die, and a fourth die (101-104), wherein a portion of the second die (50) and a portion of the third die (150) are movably connected between the first die and the fourth die (101, 104).
Abstract:
A pattern tool (200 or 200a) and/or substrate (300 or 300a) including one or more strain control regions (208 or 308) to prevent deformation-related misalignment.
Abstract:
A resonator includes a translator, a stator. and a control circuit. The control circuit is configured to provide first and second translator voltages and first through third stator voltages, wherein the translator is configured to move with respect to the stator at a resonant frequency of the resonator in response to the control circuit.
Abstract:
An electronic apparatus includes a first die, a second die, a third die, and a fourth die (101-104), wherein a portion of the second die (50) and a portion of the third die (150) are movably connected between the first die and the fourth die (101, 104).