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公开(公告)号：DE69123612D1
公开(公告)日：1997-01-30
申请号：DE69123612
申请日：1991-01-29
Applicant: HITACHI LTD
Inventor： YAMADA OSAMU , HAZAKI EIICHI , NAKAIZUMI YASUSHI
Abstract: A sample (1) is mounted on a support table (2,3) adjacent a probe (5) of a scanning tunnelling microscope, the support table (2,3) permitting the sample (1) to move relative to the probe (5). The probe (5) is also movable in a direction generally perpendicular to the sample surface, between a withdrawn position and a scanning separation. A scanning electron microscope (10) is located adjacent the sample (1) and probe (5), and its electron beam (11) scans both the sample (1) and the probe (5) and generates an image on a display (16a) from electrons from the sample detected by a detector (12). In order that that operator can position the probe (5) on a target of a sample (1), for scanning by the probe (5), a marker (18) is generated on the display (16a) by a graphics display unit (17), which marker (18) indicates the probe-to-sample separation (dL) and preferably indicates the probe-to-sample approach point and the direction of movement of the probe (5) towards the sample (1). The graphics display unit (17) may alternatively, or in addition, generate a marker (19) representing the scan area of the probe (5) when it is moved to a scanning separation from the sample (1).
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公开(公告)号：DE69230414T2
公开(公告)日：2000-08-03
申请号：DE69230414
申请日：1992-08-03
Applicant: HITACHI LTD
Inventor： TODOKORO HIDEO , YAMADA OSAMU , OTAKA TADASHI
IPC: H01J37/147 , G02B21/00 , H01J37/22 , H01J37/26 , H01J37/28
Abstract: A scanning microscope, such as a scanning electron microscope, has an energy beam (1) which is caused to scan on a sample (4). A detector (6) detects the interaction of the beam (1) with the sample (4) and generates sample image signals which are used to generate a display image (20) of the scanned part of the sample (4). The sample image signals may be stored in an image memory (14) and a part of those sample image signals read to generate the display image. This permits an effective magnification to be achieved without scanning the sample with scanning lines which are too close. Alternatively, or in addition, the beam (1) may be cut intermittently during the scanning, at least for magnifications above a predetermined limit. Where scanning is in a series of frames, each of a series of scanning lines, such cutting may change the interval between frames, the interval between lines, or may cause intermittent cutting within a line. All these reduce the duration of the beam (1) on the sample (4), so reducing the risk of excessive charge build-up.
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公开(公告)号：DE69313517D1
公开(公告)日：1997-10-09
申请号：DE69313517
申请日：1993-06-02
Applicant: HITACHI LTD
Inventor： OKURA AKIMITSU , SATO MITSUGU , YAMADA OSAMU , NAKAIZUMI YASUSHI , HAZAKI EIICHI
Abstract: A specimen is scanned with an electron beam so as to generate a signal characteristic of the specimen to thereby produce an image thereof on the basis of the generated signal. A memory (102) is provided for storing operating conditions of a scanning electron microscope (107) which are associated with identification information for specifying the specimen. The identification information is designated so that at least one operating condition corresponding to the designated identification information is read out from the memory (102), and the read out operating condition is automatically set so that the scanning electron microscope (107) is operated under the set operating condition.
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公开(公告)号：DE69225184T2
公开(公告)日：1998-12-17
申请号：DE69225184
申请日：1992-08-03
Applicant: HITACHI LTD
Inventor： TODOKORO HIDEO , OTAKA TADASHI , YAMADA OSAMU
IPC: H01J37/147 , G02B21/00 , H01J37/22 , H01J37/26 , H01J37/28
Abstract: A scanning microscope, such as a scanning electron microscope, has an energy beam (1) which is caused to scan on a sample (4). A detector (6) detects the interaction of the beam (1) with the sample (4) and generates sample image signals which are used to generate a display image (20) of the scanned part of the sample (4). The sample image signals may be stored in an image memory (14) and a part of those sample image signals read to generate the display image. This permits an effective magnification to be achieved without scanning the sample with scanning lines which are too close. Alternatively, or in addition, the beam (1) may be cut intermittently during the scanning, at least for magnifications above a predetermined limit. Where scanning is in a series of frames, each of a series of scanning lines, such cutting may change the interval between frames, the interval between lines, or may cause intermittent cutting within a line. All these reduce the duration of the beam (1) on the sample (4), so reducing the risk of excessive charge build-up.
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公开(公告)号：DE69225184D1
公开(公告)日：1998-05-28
申请号：DE69225184
申请日：1992-08-03
Applicant: HITACHI LTD
Inventor： TODOKORO HIDEO , OTAKA TADASHI , YAMADA OSAMU
IPC: H01J37/147 , G02B21/00 , H01J37/22 , H01J37/26 , H01J37/28
Abstract: A scanning microscope, such as a scanning electron microscope, has an energy beam (1) which is caused to scan on a sample (4). A detector (6) detects the interaction of the beam (1) with the sample (4) and generates sample image signals which are used to generate a display image (20) of the scanned part of the sample (4). The sample image signals may be stored in an image memory (14) and a part of those sample image signals read to generate the display image. This permits an effective magnification to be achieved without scanning the sample with scanning lines which are too close. Alternatively, or in addition, the beam (1) may be cut intermittently during the scanning, at least for magnifications above a predetermined limit. Where scanning is in a series of frames, each of a series of scanning lines, such cutting may change the interval between frames, the interval between lines, or may cause intermittent cutting within a line. All these reduce the duration of the beam (1) on the sample (4), so reducing the risk of excessive charge build-up.
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Patent Agency Ranking
公开(公告)号：DE69313517T2
公开(公告)日：1998-04-02
申请号：DE69313517
申请日：1993-06-02
Applicant: HITACHI LTD
Inventor： OKURA AKIMITSU , SATO MITSUGU , YAMADA OSAMU , NAKAIZUMI YASUSHI , HAZAKI EIICHI
Abstract: A specimen is scanned with an electron beam so as to generate a signal characteristic of the specimen to thereby produce an image thereof on the basis of the generated signal. A memory (102) is provided for storing operating conditions of a scanning electron microscope (107) which are associated with identification information for specifying the specimen. The identification information is designated so that at least one operating condition corresponding to the designated identification information is read out from the memory (102), and the read out operating condition is automatically set so that the scanning electron microscope (107) is operated under the set operating condition.
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公开(公告)号：DE69117215T2
公开(公告)日：1997-01-23
申请号：DE69117215
申请日：1991-05-08
Applicant: HITACHI LTD , HITACHI CONSTRUCTION MACHINERY
Inventor： HAZAKI EIICHI , YAMADA OSAMU , NAKAIZUMI YASUSHI , HOSOKI SHIGEYUKI , HOSAKA SUMIO , HASHIMOTO AKIRA
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公开(公告)号：DE3115067A1
公开(公告)日：1982-04-15
申请号：DE3115067
申请日：1981-04-14
Applicant: HITACHI LTD
Inventor： MURAKAMI HIROYA , TAKASAKI MITSUHIRO , YAMADA OSAMU , KAMADA ATSUYA , HORI KATSUYOSHI
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公开(公告)号：DE69230414D1
公开(公告)日：2000-01-13
申请号：DE69230414
申请日：1992-08-03
Applicant: HITACHI LTD
Inventor： TODOKORO HIDEO , YAMADA OSAMU , OTAKA TADASHI
IPC: H01J37/147 , G02B21/00 , H01J37/22 , H01J37/26 , H01J37/28
Abstract: A scanning microscope, such as a scanning electron microscope, has an energy beam (1) which is caused to scan on a sample (4). A detector (6) detects the interaction of the beam (1) with the sample (4) and generates sample image signals which are used to generate a display image (20) of the scanned part of the sample (4). The sample image signals may be stored in an image memory (14) and a part of those sample image signals read to generate the display image. This permits an effective magnification to be achieved without scanning the sample with scanning lines which are too close. Alternatively, or in addition, the beam (1) may be cut intermittently during the scanning, at least for magnifications above a predetermined limit. Where scanning is in a series of frames, each of a series of scanning lines, such cutting may change the interval between frames, the interval between lines, or may cause intermittent cutting within a line. All these reduce the duration of the beam (1) on the sample (4), so reducing the risk of excessive charge build-up.
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公开(公告)号：DE69123612T2
公开(公告)日：1997-06-12
申请号：DE69123612
申请日：1991-01-29
Applicant: HITACHI LTD
Inventor： YAMADA OSAMU , HAZAKI EIICHI , NAKAIZUMI YASUSHI
Abstract: A sample (1) is mounted on a support table (2,3) adjacent a probe (5) of a scanning tunnelling microscope, the support table (2,3) permitting the sample (1) to move relative to the probe (5). The probe (5) is also movable in a direction generally perpendicular to the sample surface, between a withdrawn position and a scanning separation. A scanning electron microscope (10) is located adjacent the sample (1) and probe (5), and its electron beam (11) scans both the sample (1) and the probe (5) and generates an image on a display (16a) from electrons from the sample detected by a detector (12). In order that that operator can position the probe (5) on a target of a sample (1), for scanning by the probe (5), a marker (18) is generated on the display (16a) by a graphics display unit (17), which marker (18) indicates the probe-to-sample separation (dL) and preferably indicates the probe-to-sample approach point and the direction of movement of the probe (5) towards the sample (1). The graphics display unit (17) may alternatively, or in addition, generate a marker (19) representing the scan area of the probe (5) when it is moved to a scanning separation from the sample (1).
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