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公开(公告)号:JPH04217249A
公开(公告)日:1992-08-07
申请号:JP5607191
申请日:1991-02-27
Applicant: HOECHST AG
Inventor: GEORUKU PAUROUSUKII , RARUFU DANMERU , HORUSUTO REESHIERUTO , WARUTAA SHIYUPIISU , UINFURIITO MAIERU
IPC: G03F7/004 , C07D233/84 , G03F7/016 , G03F7/038 , H01L21/027
Abstract: PURPOSE: To enhance sensitivity and heat stability and to prevent occurrence of any of corrosive products photodecomposed by exposure in a wide spectral region by incorporating a specified compound and a binder. CONSTITUTION: This radiation sensitive mixture contains as an essential components (a) a compound to be allowed to release an acid by irradiation with active rays and represented by formula I, (b) a compound having at least 2 reactive groups cross-linkable by acid, and (c) a binder insoluble in water but soluble in an aqueous solution of alkali or at least swellable in it. In formula I, R is an R -SO2 - or R -CO- group; and each of R and R is, independently, an alkyl or cycloalkyl or aryl or heteroaryl group each optionally substituted.
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公开(公告)号:JPH03103856A
公开(公告)日:1991-04-30
申请号:JP23885790
申请日:1990-09-07
Applicant: HOECHST AG
Inventor: GEORUKU PAUROUSUKII , HANSUUYOAHIMU MEREMU , YURUGEN RINGUNAU , RARUFU DAMERU , HORUSUTO REESHIERUTO
Abstract: PURPOSE: To stabilize a compound capable of forming an acid by photochemical decomposition on a substrate and to eliminate corrosive action as a photochemical product by incorporating the compound to be allowed to form an acid by irradiation, a compound to be cleft by an acid, and a binder insoluble in water but soluble in an aqueous solution of alkali as specified constituents. CONSTITUTION: This radiation sensitive mixture comprises the compound to be allowed to form a strong acid by irradiation with by active rays, the compound having a -C-O-C- or -C-O-Si-bond to be cleft by acid, and the binder insoluble in water but soluble in an aqueous solution of alkali. The compound to be allowed to form a strong acid by the irradiation is an α-carbonyl-α- sulfonyl-diazomethane compound represented by formula I in which each of R and R is an optionally substituted alkyl or cycloalkyl or aryl group, this permitting the obtained mixture to be high in sensitivity in a wide spectral region and in thermal stability and not to produce any corrosive photochemical decomposition product at all.
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3.
公开(公告)号:JPH075689A
公开(公告)日:1995-01-10
申请号:JP5456494
申请日:1994-02-28
Applicant: HOECHST AG
Inventor: HORUSUTO REESHIERUTO , GEORUKU PAUROUSUKII
IPC: C07D271/12 , G03F7/004 , G03F7/039 , H01L21/027 , G03F7/029 , G03F7/033
Abstract: PURPOSE: To generate acid having high thermal stability, high resolution and high sensitivity and having no corrosive action as a photoreaction product by incorporating a compound forming acid when exposed to radiation, a compound having bonds such as C-O-C that can be cleft by acid, and a polymer binder that can be insoluble to water but soluble to aqu. solution of alkali. CONSTITUTION: The mixture contains a) a compound forming acid when exposed to chemical ray radiation, b) a compound containing a C-O-C or C-O-Si bond that can be cleft by acid, and c) a polymer binder that is insoluble to water but soluble to or swelled in aqu. solution of alkali. The compound a) is indicated by the formula. In the formula, S represents 1 to 20C acyclic, homocyclic and heterocyclic groups, EWG represents an electron withdrawing group, R represents 1 to 20C acyclic, homocyclic and heterocyclic groups, W is 0, 1 or 2, and X is an integer of 1∼5.
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4.
公开(公告)号:JPH0627669A
公开(公告)日:1994-02-04
申请号:JP20131892
申请日:1992-07-28
Applicant: HOECHST AG
Inventor: GEORUKU PAUROUSUKII , RARUFU DAMERU , HORUSUTO REESHIERUTO , UINFURIITO MAIAA , WARUTAA SHIYUPIISU , KURAUSUUYURUGEN PURUTSUIBIRA
IPC: G03F7/00 , C04B41/50 , G03F7/029 , G03F7/038 , H01L21/027
Abstract: PURPOSE: To provide a radiation sensitive recording material which is particularly preferable for production of photoresists, production of electronic parts and printing plates or for chemical milling. CONSTITUTION: This negative type radiation sensitive mixture contains (a) a compd. which contains at least one piece of -CBr3 groups bonded to the atom not bonded to a hydrogen atom and forms a strong acid at the exposure to active radiations, (b) a compd. contg. at least two pieces of acid crosslinkable groups and (c) a water-insoluble high-polymer binder which is soluble or at least swellable in an aq. alkaline soln. and contains a phenolic OH group.
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5.
公开(公告)号:JPH0841086A
公开(公告)日:1996-02-13
申请号:JP6308995
申请日:1995-03-22
Applicant: HOECHST AG
Inventor: HANSUUIERUKU KURAINAA , DEIITAA REGUNAATO , HORUSUTO REESHIERUTO
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公开(公告)号:JPH06202335A
公开(公告)日:1994-07-22
申请号:JP28988593
申请日:1993-10-26
Applicant: HOECHST AG
IPC: C07C309/73 , G03F7/004 , G03F7/039 , G03F7/075 , H01L21/027 , G03F7/023 , G03F7/028
Abstract: PURPOSE: To produce a mixture, especially suitable for producing a photoresist, and particularly suitable for a deep UV photoresist and a radiation sensitive recording material, containing the mixture. CONSTITUTION: In a positive radiation sensitive mixture, (a) α-hydroxymethyl benzoin sulfonate ester generating a strong acid by an action of an active ray radiation and (b) a binder insoluble to water but soluble to an alkali aq. soln. or at least swellable are incorporated; moreover, a compd. having at least one C-O-C or C-O-Si bond capable of breaking down with acid are incorporated. Moreover, in the radiation sensitive recording material consisting of a carrier and a radiation sensitive layer, the mixture is incorporated in the layer.
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公开(公告)号:JPH0840954A
公开(公告)日:1996-02-13
申请号:JP6309095
申请日:1995-03-22
Applicant: HOECHST AG
Inventor: HANSUU IERUKU KURAINAA , DEIITAA REGUNAATO , HORUSUTO REESHIERUTO
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公开(公告)号:JPH06194669A
公开(公告)日:1994-07-15
申请号:JP20083693
申请日:1993-08-12
Applicant: HOECHST AG
Inventor: HORUSUTO REESHIERUTO , NORUBERUTO REESHIYU
IPC: C08K5/00 , C08K5/15 , C08K5/35 , C08L25/00 , C08L25/18 , C09D125/18 , G02F1/1337
Abstract: PURPOSE: To prepare an oriented film which is capable of providing a liquid crystal display with excellent liquid crystal orientation, high contrast and high transmissivity in a bright state and further enables the manufacture of a very stable liquid crystal switching/display device by using a modified poly(hydroxystyrene) as a constituent material of the orient film for the liquid crystal display. CONSTITUTION: This oriented film for a liquid crystal display contains: (a) a poly(hydroxystyrene) produced from a monomer represented by the formula (in the formula: R is H, CH3 , F or Cl; and each of R and R is H, R , OR , SR , OH, F, Cl, Br, NO2 , a phenyl group or CH2 X, independently from the other, wherein R is a 1-6C straight chain or branched chain alkyl group whose at least one hydrogen atom is optionally substituted by a fluorine atom and X is p-tosylate, 2-mesitylate, mesylate or triflate group, or OOC-CH3 , OH, Cl or Br); and (b) at least one compound selected from among macrocyclic compounds, cryptands, coronands, podands, mercapto compounds and ionophores.
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公开(公告)号:JPH03103854A
公开(公告)日:1991-04-30
申请号:JP23885890
申请日:1990-09-07
Applicant: HOECHST AG
Inventor: GEORUKU PAUROUSUKII , HANSUUYOAHIMU MEREMU , YURUGEN RINGUNAU , RARUFU DAMERU , HORUSUTO REESHIERUTO
Abstract: PURPOSE: To stabilize a compound capable of forming an acid by photochemical decomposition on a substrate and to eliminate corrosive action as a photochemical product by incorporating the compound to be allowed to form an acid by irradiation, a compound to be cleft by an acid, and a binder insoluble in water but soluble in an aqueous solution of alkali as specified constituents. CONSTITUTION: This radiation sensitive mixture comprises the compound to be allowed to form a strong acid by irradiation with by active rays, the compound having a -C-O-C- or -C-O-Si-bond to be cleft by acid, and the binder insoluble in water but soluble in an aqueous solution of alkali. The compound to be allowed to form a strong acid by the irradiation is an α-, α-bis(sulfonyl)- diazomethane compound represented by formula I in which R is a desirable substituent, such as an alkyl or cycloalkyl or aryl group, thus permitting the obtained mixture to be high in sensitivity in a wide spectral region and heat stability and to produce no corrosive photochemical reaction product.
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