公开(公告)号：DE69029777T2

公开(公告)日：1997-07-31

申请号：DE69029777

申请日：1990-09-21

Applicant: HOLTRONIC TECHNOLOGIES LTD

Inventor： DANDLIKER RENE ,  BROOK JOHN EDWARD ,  HAMIDI MASSOUD

IPC: G01B9/021 ,  G01N21/88 ,  G01N21/956 ,  G02B7/28 ,  G03F7/20 ,  G03F9/00 ,  G03H1/00 ,  H01L21/027 ,  G03H1/20 ,  G03F7/207

Abstract: Apparatus for and a method of optical inspection in a total internal reflection holographic imaging system. Multi wavelength laser beams are directed onto a prism supporting a first substrate containing pre-recorded hologram which is to be imaged onto a recording medium of a second substrate, the multi wavelength beams being normal to both substrates. The distance between the two substrates is measured by interferometric techniques. Actuators are provided for adjusting the distance between the two substrates, these actuators being energized to cause minute adjustments of the spacing during a scanning operation whereby the imaging of the pre-recorded hologram is ensured at the correct focus throughout the scanning operation.

公开(公告)号：GB2256475B

公开(公告)日：1995-11-29

申请号：GB9108760

申请日：1991-04-24

Applicant: HOLTRONIC TECHNOLOGIES LTD

Inventor： OMAR BASIL ARTHUR ,  HAMIDI MASSOUD

IPC: G01B11/14

公开(公告)号：DE69029777D1

公开(公告)日：1997-03-06

申请号：DE69029777

申请日：1990-09-21

Applicant: HOLTRONIC TECHNOLOGIES LTD

Inventor： DANDLIKER RENE ,  BROOK JOHN EDWARD ,  HAMIDI MASSOUD

IPC: G01B9/021 ,  G01N21/88 ,  G01N21/956 ,  G02B7/28 ,  G03F7/20 ,  G03F9/00 ,  G03H1/00 ,  H01L21/027 ,  G03H1/20 ,  G03F7/207

Abstract: Apparatus for and a method of optical inspection in a total internal reflection holographic imaging system. Multi wavelength laser beams are directed onto a prism supporting a first substrate containing pre-recorded hologram which is to be imaged onto a recording medium of a second substrate, the multi wavelength beams being normal to both substrates. The distance between the two substrates is measured by interferometric techniques. Actuators are provided for adjusting the distance between the two substrates, these actuators being energized to cause minute adjustments of the spacing during a scanning operation whereby the imaging of the pre-recorded hologram is ensured at the correct focus throughout the scanning operation.

公开(公告)号：GB2256475A

公开(公告)日：1992-12-09

申请号：GB9108760

申请日：1991-04-24

Applicant: HOLTRONIC TECHNOLOGIES LTD

Inventor： OMAR BASIL ARTHUR ,  HAMIDI MASSOUD

IPC: G01B11/14

Abstract: A method of measuring small distances between two parallel or near-parallel semi-reflecting surfaces includes the steps of: positioning one of said surfaces in juxtaposition to a surface of a prism 3, directing an incident beam of coherent radiation 1 having a spherical wavefront onto said surfaces, whose distance therebetween is to be measured, and analyzing the interference pattern produced by the reflection of said incident beam of radiation onto said surfaces by means of a phase shifting technique, thereby obtaining a measurement of the distance of separation therebetween. An apparatus for carrying out the method is also disclosed. The invention is particularly applicable to measuring focus by optical means in T.I.R. holographic systems which employ a prism.