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公开(公告)号：CA2350077C
公开(公告)日：2007-09-04
申请号：CA2350077
申请日：1998-11-06
Applicant: HONEYWELL INC
Inventor： HERB WILLIAM R , OHNSTEIN THOMAS R , CABUZ CLEOPATRA
Abstract: An electrostatic actuator device including a stationary support (11) and a buckled, moveable support mounted positioned to enter into contact with the stationary support (13). At least three electrodes (15, 17, 19) are employed. The first (15) is mounted on the moveable support (13) and a second (17) electrode is on the stationary support. A third electrode (19) is mounted on one of the supports such that the electrodes are positioned to form two pairs of electrodes for electrostatic attraction therebetween. The electrodes are powered by a voltage supply (25, 27, 29) to provide electrostatic attraction between pairs of electrodes and move them into electrostatic contact. The buckled electrode (13) has a shape configured to transmit a restoring force to its portion in contact with stationary support upon application of voltage to another pair of electrodes. The preferred voltage provides a two phase driving force including a voltage to the first pair of electrode for a period of time in a cycle of operation and a voltage to the second pair of electrodes for a period of time in the same cycle, preferably with an interim period of time with no voltage applied after each applicatio n of voltage.
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公开(公告)号：AT290265T
公开(公告)日：2005-03-15
申请号：AT99957588
申请日：1999-11-23
Applicant: HONEYWELL INC
Inventor： CABUZ CLEOPATRA , HORNING ROBERT D , HERB WILLIAM R
Abstract: A microactuator array device, which includes a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electrodes associated with the array of unit cells. A source of electric potential operably connects the electrodes, whereby electrostatic forces are generated most intensely proximate the point where the gap between the sheets is smallest. Inlets and outlets for each cell permit displacement of fluid during generation of the electrostatic forces. In a preferred embodiment, the plurality of sheets forms a stack of layers of arrays of unit cells. The layers are configured such that bi-directional activation is caused by pairs of actuators working opposite each other. At least one of every pair of the sheets may be preformed into corrugations or into flaps to provide a predetermined mechanical bias between the pairs, or the sheets may form curved portions by an applied load to provide a displacement between the pairs. The sheets are preferably from about 1 mum to about 100 mum thick and the cells preferably have an individual displacement of from about 5 mum to about 200 mum.
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公开(公告)号：CA2357049C
公开(公告)日：2007-09-18
申请号：CA2357049
申请日：1999-11-23
Applicant: HONEYWELL INC
Inventor： HERB WILLIAM R , HORNING ROBERT D , CABUZ CLEOPATRA
Abstract: A microactuator array device, which includes a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electrodes associated with the array of unit cells. A source of electric potential operably connects the electrodes, whereby electrostatic forces are generated most intensely proximate the point where the gap between the sheets is smallest. Inlets and outlets for each cell permit displacement of fluid during generation of the electrostatic forces. In a preferred embodiment, the plurality of sheets forms a stack of layers of arrays of unit cells. The layers are configured such that bi-directional activation is caused by pairs of actuators working opposite each other. At least one of every pair of the sheets may be preformed into corrugations or into flaps to provide a predetermined mechanical bias between the pairs, or the sheets may form curved portions by an applied load to provide a displacement between the pairs. The sheets are preferably from about 1 .mu.m to about 100 .mu.m thick and the cells preferably have an individual displacement of from about .mu.m to about 200 .mu.m.
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公开(公告)号：AT354025T
公开(公告)日：2007-03-15
申请号：AT00965096
申请日：2000-09-15
Applicant: HONEYWELL INC
Inventor： HERB WILLIAM R , CABUZ CLEOPATRA , ZOOK DAVID J
Abstract: A diaphragm pump, which is preferably electrostatically actuated, but which may be activated by other forces such as electromagnetic or piezoelectric actuation. The pump is formed by a pump body having a pump chamber formed therein. First and second diaphragms each having a set of valve holes in the diaphragm surface thereof are mounted in the chamber. Also provided are at least one inlet and at least one outlet port for communication with the pump chamber. The ports are positioned for sealing contact with the diaphragms at points that are not aligned with the holes in the diaphragms. A driver electrostatically actuates the diaphragms to cause diaphragm movement to a plurality of diaphragm positions to control flow of fluid through the pump. The first position is when the diaphragms are spaced from one another and from the ports to permit flow of fluid through the pump chamber. The second position is when the diaphragms are in diaphragm surface contact with the sets of holes mutually nonaligned to form a seal between the diaphragms. The third position is when a diaphragm is in diaphragm surface contact with the ports to form the sealing contact.
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公开(公告)号：CA2384993A1
公开(公告)日：2001-03-22
申请号：CA2384993
申请日：2000-09-15
Applicant: HONEYWELL INC
Inventor： ZOOK DAVID J , CABUZ CLEOPATRA , HERB WILLIAM R
Abstract: A diaphragm pump has first and second diaphragms each having a set of valve holes (the two sets being non-aligned) in the diaphragm surface thereof, one inlet port and one outlet port. The ports are positioned for sealing contact with the diaphragms at points that are not aligned with the holes in the diaphragms. A driver electrostatically actuates the two diaphragms independently to cause diaphragm movement to a plurality of diaphragm positions to control flow of fluid through the pump.
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Patent Agency Ranking
公开(公告)号：CA2270070C
公开(公告)日：2006-07-04
申请号：CA2270070
申请日：1997-11-13
Applicant: HONEYWELL INC
Inventor： YOUNGNER DANIEL W , HERB WILLIAM R , BURNS DAVID W
Abstract: A multi-material resonant thin film beam for a micromechanical sensor having a zero temperature coefficient of frequency (TCF) which is the resonant frequency shift with temperature change. One of the materials may be polysilicon and the other material may be silicon nitride or silicon oxide. Each material has a different thermal coefficient of expansion. The proportion of the various materials is adjusted and the specific geometries are determined so that the TCF is zero. One embodiment is a microbeam composed of two polysilicon thin films with a silicon nitride thin film inserted between the polysilicon films. The thickness of the silicon nitride film may be adjusted to trim the TCF to zero. The film of nitride instead may be placed on one si de of a polysilicon film to form a beam. Dual or multiple beam resonators likewise may be made with several materials. The nitride may be placed in the shank areas which join and secure the ends of the beams. Such zero TCF beams may be incorporated in microsensor structures for measuring pressure, temperature, strain and other parameters.
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公开(公告)号：AT225580T
公开(公告)日：2002-10-15
申请号：AT98956646
申请日：1998-11-06
Applicant: HONEYWELL INC
Inventor： CABUZ CLEOPATRA , OHNSTEIN THOMAS R , HERB WILLIAM R
Abstract: An electrostatic actuator device including a stationary support (11) and a buckled, moveable support mounted positioned to enter into contact with the stationary support (13). At least three electrodes (15, 17, 19) are employed. The first (15) is mounted on the moveable support (13) and a second (17) electrode is on the stationary support. A third electrode (19) is mounted on one of the supports such that the electrodes are positioned to form two pairs of electrodes for electrostatic attraction therebetween. The electrodes are powered by a voltage supply (25, 27, 29) to provide electrostatic attraction between pairs of electrodes and move them into electrostatic contact. The buckled electrode (13) has a shape configured to transmit a restoring force to its portion in contact with stationary support upon application of voltage to another pair of electrodes. The preferred voltage provides a two phase driving force including a voltage to the first pair of electrode for a period of time in a cycle of operation and a voltage to the second pair of electrodes for a period of time in the same cycle, preferably with an interim period of time with no voltage applied after each application of voltage.
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公开(公告)号：AU7587200A
公开(公告)日：2001-04-17
申请号：AU7587200
申请日：2000-09-15
Applicant: HONEYWELL INC
Inventor： HERB WILLIAM R , CABUZ CLEOPATRA , ZOOK DAVID J
Abstract: A diaphragm pump, which is preferably electrostatically actuated, but which may be activated by other forces such as electromagnetic or piezoelectric actuation. The pump is formed by a pump body having a pump chamber formed therein. First and second diaphragms each having a set of valve holes in the diaphragm surface thereof are mounted in the chamber. Also provided are at least one inlet and at least one outlet port for communication with the pump chamber. The ports are positioned for sealing contact with the diaphragms at points that are not aligned with the holes in the diaphragms. A driver electrostatically actuates the diaphragms to cause diaphragm movement to a plurality of diaphragm positions to control flow of fluid through the pump. The first position is when the diaphragms are spaced from one another and from the ports to permit flow of fluid through the pump chamber. The second position is when the diaphragms are in diaphragm surface contact with the sets of holes mutually nonaligned to form a seal between the diaphragms. The third position is when a diaphragm is in diaphragm surface contact with the ports to form the sealing contact.
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公开(公告)号：CA2357049A1
公开(公告)日：2000-07-06
申请号：CA2357049
申请日：1999-11-23
Applicant: HONEYWELL INC
Inventor： HORNING ROBERT D , CABUZ CLEOPATRA , HERB WILLIAM R
Abstract: A microactuator array device, which includes a plurality of generally parall el thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electrod es associated with the array of unit cells. A source of electric potential operably connects the electrodes, whereby electrostatic forces are generated most intensely proximate the point where the gap between the sheets is smallest. Inlets and outlets for each cell permit displacement of fluid duri ng generation of the electrostatic forces. In a preferred embodiment, the plurality of sheets forms a stack of layers of arrays of unit cells. The layers are configured such that bi-directional activation is caused by pairs of actuators working opposite each other. At least one of every pair of the sheets may be preformed into corrugations or into flaps to provide a predetermined mechanical bias between the pairs, or the sheets may form curv ed portions by an applied load to provide a displacement between the pairs. The sheets are preferably from about 1 .mu.m to about 100 .mu.m thick and the cells preferably have an individual displacement of from about 5 .mu.m to about 200 .mu.m.
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公开(公告)号：CA2350077A1
公开(公告)日：2000-05-18
申请号：CA2350077
申请日：1998-11-06
Applicant: HONEYWELL INC
Inventor： CABUZ CLEOPATRA , HERB WILLIAM R , OHNSTEIN THOMAS R
Abstract: An electrostatic actuator device including a stationary support (11) and a buckled, moveable support mounted positioned to enter into contact with the stationary support (13). At least three electrodes (15, 17, 19) are employed . The first (15) is mounted on the moveable support (13) and a second (17) electrode is on the stationary support. A third electrode (19) is mounted on one of the supports such that the electrodes are positioned to form two pair s of electrodes for electrostatic attraction therebetween. The electrodes are powered by a voltage supply (25, 27, 29) to provide electrostatic attraction between pairs of electrodes and move them into electrostatic contact. The buckled electrode (13) has a shape configured to transmit a restoring force to its portion in contact with stationary support upon application of voltage t o another pair of electrodes. The preferred voltage provides a two phase drivi ng force including a voltage to the first pair of electrode for a period of tim e in a cycle of operation and a voltage to the second pair of electrodes for a period of time in the same cycle, preferably with an interim period of time with no voltage applied after each application of voltage.
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