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    POLYMER MICROACTUATOR ARRAY WITH MACROSCOPIC FORCE AND DISPLACEMENT
    4.
    发明专利
    POLYMER MICROACTUATOR ARRAY WITH MACROSCOPIC FORCE AND DISPLACEMENT 未知

    公开(公告)号：CA2357049C

    公开(公告)日：2007-09-18

    申请号：CA2357049

    申请日：1999-11-23

    Applicant: HONEYWELL INC

    Inventor： HERB WILLIAM R ,  HORNING ROBERT D ,  CABUZ CLEOPATRA

    IPC: B81B3/00 ,  H02N1/00 ,  F15C5/00

    Abstract: A microactuator array device, which includes a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electrodes associated with the array of unit cells. A source of electric potential operably connects the electrodes, whereby electrostatic forces are generated most intensely proximate the point where the gap between the sheets is smallest. Inlets and outlets for each cell permit displacement of fluid during generation of the electrostatic forces. In a preferred embodiment, the plurality of sheets forms a stack of layers of arrays of unit cells. The layers are configured such that bi-directional activation is caused by pairs of actuators working opposite each other. At least one of every pair of the sheets may be preformed into corrugations or into flaps to provide a predetermined mechanical bias between the pairs, or the sheets may form curved portions by an applied load to provide a displacement between the pairs. The sheets are preferably from about 1 .mu.m to about 100 .mu.m thick and the cells preferably have an individual displacement of from about .mu.m to about 200 .mu.m.

    Microactuator array with integrally formed package
    5.
    发明专利
    Microactuator array with integrally formed package 未知

    公开(公告)号：AU2283801A

    公开(公告)日：2001-07-16

    申请号：AU2283801

    申请日：2000-12-21

    Applicant: HONEYWELL INC

    Inventor： HORNING ROBERT D

    IPC: H02N1/00

    Abstract: A microactuator array with an integrally formed package is disclosed. Because the package is made from the same material and at the same time as the actuator itself, no extra time or cost is associated with packaging. In addition, it is contemplated that the package may be configured to provide all the necessary interconnections and leads for addressing and distributing power to the various layers in the microactuator stack. Thus, no additional steps or cost are associated with electrical interconnection.

    FABRY-PEROT MICRO FILTER-DETECTOR
    6.
    发明专利
    FABRY-PEROT MICRO FILTER-DETECTOR 未知

    公开(公告)号：CA2205875A1

    公开(公告)日：1996-07-11

    申请号：CA2205875

    申请日：1995-12-20

    Applicant: HONEYWELL INC

    Inventor： FRITZ BERNARD S ,  COLE BARRETT E ,  HORNING ROBERT D

    IPC: B81B1/00 ,  G01J3/26 ,  G01J3/28 ,  G01J5/20 ,  G02B26/00

    Abstract: A monolithically constructed infrared, tunable Fabry-Perot cavity filterdetector for spectroscopic detection of particular substances having an absorption line in the wavelength range from 2 to 12 microns. The filterdetector has a hermetically sealed Fabry-Perot cavity that has a mirror which has an adjustable distance relative to another mirror of the cavity. The former mirror is adjusted by piezoelectric film on the mirror support or with piezoelectric stacks or wall supporting the mirror. There may be electrodes situated near the mirrors for capacitive sensing of the distance between the mirrors. Light to be filtered and detected comes in through a window wafer which may have diffractive or refractive microlenses, plus an optional spatial filter. After passing through the window wafer, the light is filtered by the tunable mirrors of the Fabry-Perot cavity. The portion of the light that is passed by the cavity is detected by an infrared microbolometer or a CCD array. The cavity and detector are hermetically sealed in a vacuum.

    7.
    发明专利
    未知

    公开(公告)号：AT290265T

    公开(公告)日：2005-03-15

    申请号：AT99957588

    申请日：1999-11-23

    Applicant: HONEYWELL INC

    Inventor： CABUZ CLEOPATRA ,  HORNING ROBERT D ,  HERB WILLIAM R

    IPC: B81B3/00 ,  H02N1/00

    Abstract: A microactuator array device, which includes a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electrodes associated with the array of unit cells. A source of electric potential operably connects the electrodes, whereby electrostatic forces are generated most intensely proximate the point where the gap between the sheets is smallest. Inlets and outlets for each cell permit displacement of fluid during generation of the electrostatic forces. In a preferred embodiment, the plurality of sheets forms a stack of layers of arrays of unit cells. The layers are configured such that bi-directional activation is caused by pairs of actuators working opposite each other. At least one of every pair of the sheets may be preformed into corrugations or into flaps to provide a predetermined mechanical bias between the pairs, or the sheets may form curved portions by an applied load to provide a displacement between the pairs. The sheets are preferably from about 1 mum to about 100 mum thick and the cells preferably have an individual displacement of from about 5 mum to about 200 mum.

    POLYMER MICROACTUATOR ARRAY WITH MACROSCOPIC FORCE AND DISPLACEMENT
    9.
    发明专利
    POLYMER MICROACTUATOR ARRAY WITH MACROSCOPIC FORCE AND DISPLACEMENT 未知

    公开(公告)号：CA2357049A1

    公开(公告)日：2000-07-06

    申请号：CA2357049

    申请日：1999-11-23

    Applicant: HONEYWELL INC

    Inventor： HORNING ROBERT D ,  CABUZ CLEOPATRA ,  HERB WILLIAM R

    IPC: B81B3/00 ,  H02N1/00

    Abstract: A microactuator array device, which includes a plurality of generally parall el thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electrod es associated with the array of unit cells. A source of electric potential operably connects the electrodes, whereby electrostatic forces are generated most intensely proximate the point where the gap between the sheets is smallest. Inlets and outlets for each cell permit displacement of fluid duri ng generation of the electrostatic forces. In a preferred embodiment, the plurality of sheets forms a stack of layers of arrays of unit cells. The layers are configured such that bi-directional activation is caused by pairs of actuators working opposite each other. At least one of every pair of the sheets may be preformed into corrugations or into flaps to provide a predetermined mechanical bias between the pairs, or the sheets may form curv ed portions by an applied load to provide a displacement between the pairs. The sheets are preferably from about 1 .mu.m to about 100 .mu.m thick and the cells preferably have an individual displacement of from about 5 .mu.m to about 200 .mu.m.

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