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公开(公告)号：AU5757300A
公开(公告)日：2001-02-05
申请号：AU5757300
申请日：2000-06-21
Applicant: HRL LAB LLC
Inventor： DOCTER DANIEL P , KIZILOGLU KURSAD
IPC: H01L21/225 , H01L21/285 , H01L21/331 , H01L21/335 , H01L21/338
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