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公开(公告)号：AU5299400A
公开(公告)日：2000-12-18
申请号：AU5299400
申请日：2000-05-26
Applicant: HRL LAB LLC
Inventor： SCHMITZ ADELE E , WALDEN ROBERT H , LUI MARK , YU MARK K
IPC: H01L29/15 , H01L29/47 , H01L29/872
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