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公开(公告)号：JPS56126989A
公开(公告)日：1981-10-05
申请号：JP16209380
申请日：1980-11-19
Applicant: IBM
Inventor： AABINGU EIMUZU , BIRUHERUMU ANATSUKAA , KAATO RUDORUFU GURIIBU , CHIYAARUZU JIYON KAACHIYAA
IPC: H01L27/18 , H01L23/485 , H01L23/532 , H01L39/02 , H01L39/22
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