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公开(公告)号:JPS56126989A
公开(公告)日:1981-10-05
申请号:JP16209380
申请日:1980-11-19
Applicant: IBM
Inventor: AABINGU EIMUZU , BIRUHERUMU ANATSUKAA , KAATO RUDORUFU GURIIBU , CHIYAARUZU JIYON KAACHIYAA
IPC: H01L27/18 , H01L23/485 , H01L23/532 , H01L39/02 , H01L39/22
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公开(公告)号:JPH04230050A
公开(公告)日:1992-08-19
申请号:JP13058791
申请日:1991-05-02
Applicant: IBM
Inventor: MAIKERU FURANKU SHINA , MITSUCHIERU SHIMONZU KOOEN , EFURAIMU BEMISU FURINTO , KAATO RUDORUFU GURIIBU , DAGURASU JIYOO HOORU , KENESU POORU JIYAKUSON , MODESUTO MAIKERU OPURISUKO
IPC: H01L21/30 , G02B6/42 , H01L21/027 , H01L21/68 , H01S5/00
Abstract: PURPOSE: To provide a highly accurate passive positioning technique suitable for positioning the several sets of objects, before providing objects on an mounting surface. CONSTITUTION: By optically positioning a reference mark 516 marked on a transparent positioning plate 500, a laser 512 and the reference marks 515 and 517 marked on a fiber carrier 511, the transparent positioning plate 500, the laser 512 and the fiber carrier 511 (one set of objects) are passively positioned. A set of the passively positioned objects are temporarily fixed by a vacuum source 504. Thus, positioning is performed accurately.
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公开(公告)号:JPS62260346A
公开(公告)日:1987-11-12
申请号:JP921887
申请日:1987-01-20
Applicant: IBM
Inventor: IFUREIMU BEMISU FURINTO , KAATO RUDORUFU GURIIBU , PIITAA ARUFURETSUDO GURUUBAA , AASAA RICHIYAADO JINGAA
IPC: H01L23/36 , H01L23/433 , H01L23/467
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公开(公告)号:JPS62260347A
公开(公告)日:1987-11-12
申请号:JP4902087
申请日:1987-03-05
Applicant: IBM
Inventor: EKURAIMU BEMISU FURINTO , KAATO RUDORUFU GURIIBU
IPC: F28F9/22 , H01L23/433 , H01L23/473
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公开(公告)号:JPH05218608A
公开(公告)日:1993-08-27
申请号:JP21676992
申请日:1992-08-14
Applicant: IBM
Inventor: KURAUDEIUSU FUIIGAA , TERESHITA OODOONZU GURAHAMU , KAATO RUDORUFU GURIIBU , ARUFUONSO FUIRITSUPU RANZETSUT , JIYON JIYOZEFU RIUTOKASU , RINDA KIYARORAIN MASHIYUU , MAIKERU JIYON PAAMAA , NERUSON RATSUSERU TANAA , HOO MIN TON , CHIYAARUZU HAIRE UIRUSON , HEREN RI IEE
IPC: H01L21/60 , H01L21/48 , H01L23/495 , H01L23/498 , H01L23/50 , H01R12/04 , H05K1/11 , H05K3/00 , H05K3/28 , H05K3/34 , H05K3/36
Abstract: PURPOSE: To provide a method for obtaining a self-aligned protecting coating, so as to cover a gold-plated copper wire in a flex manufacturing process. CONSTITUTION: This method has following steps, wherein a gold layer 14 is plated on a copper lead 13 that is selectively fixed to a polyimide substrate through a seed layer 13A made of e.g. chromium. Thereafter a resist is used on both side first. Then, the resist is exposed on the both sides of the substrate and developed, and a polyimide 15 is etched. Then, a window 16 is formed. After the window has been formed, the resist is further exposed and hardened.
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