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公开(公告)号：DE69209901T2
公开(公告)日：1996-10-24
申请号：DE69209901
申请日：1992-06-03
Applicant: IBM
Inventor： AKBAR SHAHZAD , CHU JACK OON , CUNNINGHAM BIRAN
IPC: C23C16/02 , C23C16/28 , C30B25/02 , H01L21/205 , C23C16/44 , C30B29/08 , H01L21/306
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公开(公告)号：DE69209901D1
公开(公告)日：1996-05-23
申请号：DE69209901
申请日：1992-06-03
Applicant: IBM
Inventor： AKBAR SHAHZAD , CHU JACK OON , CUNNINGHAM BIRAN
IPC: C23C16/02 , C23C16/28 , C30B25/02 , H01L21/205 , C23C16/44 , C30B29/08 , H01L21/306
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